Rapid Synthesis of Polyaldehydes
    3.
    发明申请

    公开(公告)号:US20220315689A1

    公开(公告)日:2022-10-06

    申请号:US17633646

    申请日:2020-08-10

    Abstract: The present disclosure relates to depolymerizable poly(aldehydes) and systems and methods of efficiently synthesizing the same. An exemplary method of making a polymer comprises continuously flowing a polymerization solution through at least a portion of a reactor, and generating a poly(aldehyde) polymer from the polymerization solution.

    POSITIVE-TONE, CHEMICALLY AMPLIFIED, AQUEOUS-DEVELOPABLE, PERMANENT DIELECTRIC
    5.
    发明申请
    POSITIVE-TONE, CHEMICALLY AMPLIFIED, AQUEOUS-DEVELOPABLE, PERMANENT DIELECTRIC 有权
    正电,化学扩散,水溶性,永久介电

    公开(公告)号:US20150160551A1

    公开(公告)日:2015-06-11

    申请号:US14411767

    申请日:2013-06-28

    Abstract: In microelectronic applications, it is often desired to deposit and pattern a permanent dielectric film in order to electrically and mechanically isolate components. Photo-patternable dielectrics are attractive for these uses because of their reduced time and cost requirements. These permanent dielectrics should be high-speed, positive-tone, and aqueous-developable. This type of patternability may be achieved by using a chemically amplified deprotection reaction of tert-butoxycarbonate or tert-butyl acrylate catalyzed by a photo-inducible acid. Provided herein are: a composition for preparing a dielectric film comprising a polymer mixture, wherein the polymer mixture comprises a base polymer comprising a pendent protected organic functionality, a photocatalyst for deprotecting the protected organic functionality and a chemical cross-linker for cross-linking the dielectric film after a photo-patterning has taken place in an aqueous solution; a dielectric film prepared from said composition; and method of preparing a dielectric film.

    Abstract translation: 在微电子应用中,通常需要沉积和图案化永久介电膜,以便电和机械地隔离部件。 由于其可缩短的时间和成本要求,因此对于这些用途来说,光刻图形电介质是有吸引力的。 这些永久电介质应该是高速,正音和水性可显影的。 通过使用由光诱导型酸催化的叔丁氧基碳酸酯或丙烯酸叔丁酯的化学扩增脱保护反应可以实现这种类型的可模式性。 本文提供的是用于制备包含聚合物混合物的电介质膜的组合物,其中所述聚合物混合物包含包含侧基保护的有机官能团的基础聚合物,用于使受保护的有机官能团脱保护的光催化剂和用于交联 在水溶液中发生光图案化后的介电膜; 由所述组合物制备的电介质膜; 以及制备电介质膜的方法。

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