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    RECHARGEABLE WAFER CARRIER SYSTEMS
    3.
    发明申请
    RECHARGEABLE WAFER CARRIER SYSTEMS 审中-公开

    公开(公告)号：US20180048169A1

    公开(公告)日：2018-02-15

    申请号：US15233454

    申请日：2016-08-10

    Applicant: GLOBALFOUNDRIES Inc.

    Inventor： Abner BELLO ,  Stephanie WAITE ,  William J. FOSNIGHT

    IPC: H02J7/00 ,  H02J50/10 ,  H01L21/677 ,  H02J7/02 ,  H01L21/67

    CPC classification number: H02J50/10 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67396 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67775 ,  H02J7/0044 ,  H02J7/025

    Abstract: Rechargeable wafer carrier systems and methods are provided. A rechargeable wafer carrier system includes, for instance, a housing for holding at least one wafer and at least one electronics system therein, a rechargeable power source operably connected to the housing for powering the at least one electronics system, and a charging interface for receiving a supply of power for charging the rechargeable power source. The housing may be configured for transport within an automated material handling system. Also provided are methods of charging a rechargeable wafer carrier system, which includes, for instance, providing a rechargeable wafer carrier system having at least one electronics system and a rechargeable power source, operably connecting the rechargeable wafer carrier system to a charging base, and supplying power from the charging base to the rechargeable power source.

    SYSTEM FOR SEPARATELY HANDLING DIFFERENT SIZE FOUPS
    4.
    发明申请
    SYSTEM FOR SEPARATELY HANDLING DIFFERENT SIZE FOUPS 有权
    单独处理不同尺寸的系统

    公开(公告)号：US20140308108A1

    公开(公告)日：2014-10-16

    申请号：US13859773

    申请日：2013-04-10

    Applicant: GLOBALFOUNDRIES INC.

    Inventor： William J. FOSNIGHT ,  Ryan J. GALLAGHER ,  Stephen B. MINER

    IPC: H01L21/677

    CPC classification number: H01L21/67775 ,  H01L21/67379

    Abstract: A system for separately handling different size FOUPs includes an end effector having a surface thereon for supporting a FOUP. The end effector and surface is configured to support different size FOUPs. A fixture or means for engaging and maintaining a FOUP, of different size FOUPs, included to position and maintain each of a different size FOUP on the end effector during transport thereof. A shelf is configured to receive each of said different size FOUPs. The end effector is thus capable of transporting either a first size FOUP or a second, smaller size FOUP.

    Abstract translation: 用于分开处理不同尺寸的FOUP的系统包括其上具有用于支撑FOUP的表面的端部执行器。 端部执行器和表面配置为支持不同尺寸的FOUP。 包括用于接合和保持不同尺寸FOUP的FOUP的固定装置或装置，用于在其运送期间在末端执行器上定位和保持每个不同尺寸的FOUP。 架子被配置为接收每个所述不同大小的FOUP。 因此，末端执行器能够运送第一尺寸FOUP或第二较小尺寸的FOUP。

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