公开(公告)号：US10564553B2

公开(公告)日：2020-02-18

申请号：US15853847

申请日：2017-12-24

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Zhijun Yang ,  Qian Li ,  Youdun Bai ,  Xin Chen ,  Xun Chen ,  Yaobin He ,  Han Sun ,  Guanxin Huang ,  Baisheng Wu

IPC: G03F7/00 ,  G03F7/20 ,  F16C11/12 ,  B23Q1/44 ,  B23Q1/36

Abstract: The present invention also discloses a multi-DOF (Degree of Freedom) large-stroke high-precision motion platform system using the guide mechanism. A large load-bearing guide mechanism comprises: a rigid frame for generating a large-stroke displacement to realize high-speed motion; a core motion platform connected with a motion portion of a non-contact actuator, connected with the rigid frame by a primary flexible hinge group and a secondary flexible hinge group, and used for generating a small-stroke precise displacement by elastic deformation of the flexible hinge groups under driving of the actuator.