Rigid-flexible coupling high-accuracy galvo scanning motor and control method thereof

    公开(公告)号:US11342825B2

    公开(公告)日:2022-05-24

    申请号:US16741777

    申请日:2020-01-14

    Abstract: A rigid-flexible coupling high-accuracy galvo scanning motor comprises: a stator, a rotor rotating relative to the stator, bearing seats and at least two groups of encoders. The rigid-flexible coupling bearings are installed on the rotating shaft of the rotor; each of the rigid-flexible coupling bearings comprises: a rigid bearing and a flexible hinge ring which is elastically deformable, and the flexible hinge ring is fixed in an inner ring of the rigid bearing; the at least two groups of encoders comprise: a first group of encoders and a second group of encoders; the first group of encoders is used to measure a rotation angle of the rotating shaft; and the second group of encoders is used to measure a rotation angle of the inner ring of the rigid bearing. A friction dead zone is avoided through the elastic deformation of the flexible hinge ring, thereby reducing a disturbance bandwidth.

    HIGH-SPEED PLATFORM MOTION PARAMETER SELF-TUNING METHOD BASED ON MODEL IDENTIFICATION AND EQUIVALENT SIMPLIFICATION

    公开(公告)号:US20170124249A1

    公开(公告)日:2017-05-04

    申请号:US15375174

    申请日:2016-12-12

    CPC classification number: G06F17/5086 G06F17/5009 G06F17/5095

    Abstract: A high-speed platform motion parameter self-tuning method based on model identification and equivalent simplification is provided, comprising: establishing a test of a motion state of a high-speed platform, identifying model parameters, and optimizing motion parameters of an equivalent simplified model; selecting any motion function from a pre-set parameterized curve, setting initial parameters, and driving the high-speed platform to move under the action of a controller and an actuator; collecting dynamic response information of the platform, calculating dynamic characteristic information of the platform such as stiffness, frequency, damping and the like; establishing a dynamic response equivalent simplified model by using the acquired dynamic characteristic information, and performing the optimization constrained by meeting motion precision and targeting at shorter execution time for the motion parameters in the selected parameterized motion function to obtain the optimum parameters. The method of the present invention gives consideration to the dynamic characteristic requirement of the platform and the comprehensive requirement of the parameter identification and optimization on the industrial site, facilitates the implementation of an algorithm in a motion control card, and is suitable for rapidly acquiring the optimum motion parameters of the actual high-speed platform on site.

    Common-stator macro/micro integrated precision motion one-dimensional linear motor assembly

    公开(公告)号:US10236762B2

    公开(公告)日:2019-03-19

    申请号:US15375178

    申请日:2016-12-12

    Abstract: A common-stator macro/micro integrated precision motion one-dimensional linear motor assembly, includes a base, linear guide rails, slide blocks, a U-shaped linear motor stator, a macro motion rotor, a micro motion rotor and a macro/micro integrated platform. A macro and micro motion platforms are connected to form an integrated platform through an elastic member, an outer frame of the macro/micro integrated platform is mounted on the linear guide rails and the slide blocks, the U-shaped linear motor stator is arranged on the base, rotors are respectively mounted on the macro and micro motion platforms, and large-scale overall high-speed motion can be realized when macro and micro rotors are simultaneously driven, and when a motion deviation occurs, the micro motion platform realizes precise displacement output by virtue of elastic deformation due to small inertia and zero friction, and high-frequency motion deviation compensation can be realized by virtue of individual drive.

    Macro-micro integrated compound platform with adjustable dynamic characteristics

    公开(公告)号:US10232477B2

    公开(公告)日:2019-03-19

    申请号:US15376658

    申请日:2016-12-13

    Abstract: The present invention proposes a macro-micro integrated compound platform with adjustable dynamic characteristics. When a macro platform mover and a micro platform mover are driven at the same time, the whole large-scale high-speed motion can be realized; when a motion deviation occurs, a micro motion platform can be driven separately to realize the high-frequency motion deviation compensation, because the micro motion platform has small inertia and zero friction and achieves precision displacement output through elastic deformation. The macro-micro integrated compound platform can realize high-speed precision motion through compound motion control, is mounted and used in a manner consistent with the traditional platform, and is convenient to be popularized and applied; a stiffness and frequency adjustment mechanism and a variable damper are arranged, so that the micro motion platform can transfer the motion of a macro motion platform and isolate the vibration at any frequency, and realize high-precision displacement compensation; meanwhile, damping of the variable damper is matched with the stiffness and frequency parameters to ensure the high-precision displacement compensation at any frequency and increase the range of working frequency.

    Composite frequency-adjustable shock absorber

    公开(公告)号:US09746123B2

    公开(公告)日:2017-08-29

    申请号:US15376654

    申请日:2016-12-12

    Abstract: A composite frequency-adjustable shock absorber is provided, comprising a motion main machine stand bar and a shock absorption device, which are arranged on a foundation carrier platform; the shock absorption device is divided into an upper shock absorption device and a lower shock absorption device, the shock absorption device is arranged on a base with an inner cavity, and the upper shock absorption device for suppressing the low-frequency vibration and the lower shock absorption device for absorbing additional high-frequency vibration are connected in series; the upper shock absorption device comprises an elastic component based on a flexible hinge group and a prestress adjusting device, the flexible hinge group is arranged in the inner cavity of the base, the prestress adjusting device for adjusting the inherent frequency of the flexible hinge group is connected with the flexible hinge group, and the motion main machine stand bar is fixed on a load bearing portion of the flexible hinge group. The inherent frequency of the whole flexible hinge group is changed, so the high frequency band and the low frequency band of vibration systems with different masses and different excitation frequencies are effectively isolated, the structure is simple, the adjustment is convenient, and the cost is not high.

    COMPOSITE FREQUENCY-ADJUSTABLE SHOCK ABSORBER

    公开(公告)号:US20170089505A1

    公开(公告)日:2017-03-30

    申请号:US15376654

    申请日:2016-12-12

    Abstract: A composite frequency-adjustable shock absorber is provided, comprising a motion main machine stand bar and a shock absorption device, which are arranged on a foundation carrier platform; the shock absorption device is divided into an upper shock absorption device and a lower shock absorption device, the shock absorption device is arranged on a base with an inner cavity, and the upper shock absorption device for suppressing the low-frequency vibration and the lower shock absorption device for absorbing additional high-frequency vibration are connected in series; the upper shock absorption device comprises an elastic component based on a flexible hinge group and a prestress adjusting device, the flexible hinge group is arranged in the inner cavity of the base, the prestress adjusting device for adjusting the inherent frequency of the flexible hinge group is connected with the flexible hinge group, and the motion main machine stand bar is fixed on a load bearing portion of the flexible hinge group. The inherent frequency of the whole flexible hinge group is changed, so the high frequency band and the low frequency band of vibration systems with different masses and different excitation frequencies are effectively isolated, the structure is simple, the adjustment is convenient, and the cost is not high.

    STIFFNESS-FREQUENCY ADJUSTABLE XY MICROMOTION STAGE BASED ON STRESS STIFFENING
    8.
    发明申请
    STIFFNESS-FREQUENCY ADJUSTABLE XY MICROMOTION STAGE BASED ON STRESS STIFFENING 审中-公开
    基于应力强化的柔性 - 频率可调XY显微镜

    公开(公告)号:US20170001275A1

    公开(公告)日:2017-01-05

    申请号:US15114090

    申请日:2014-09-24

    CPC classification number: B23Q1/34 B23Q1/62 B23Q5/28 B23Q2210/002 B23Q2230/004

    Abstract: The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

    Abstract translation: 本公开涉及发生精确二维运动的场合,并且适用于用于精确位移补偿的XY运动台。 本公开特别涉及基于应力硬化的刚度 - 频率可调XY微动平台,其包括X方向和Y方向运动子级以及相应的驱动器和微动作工作台。 微动阶段使用具有通过螺栓调节的张力水平的膜组作为柔性铰链,以便实现XY微动阶段的振动频率的独立调整。 本公开实现了基于预应力膜的上述构造,因此频率是可调节的。 可以根据各种工作条件和驱动频率在操作前或操作期间调整微动阶段的固有频率。 两个进给运动方向是垂直的,以防止微动工作台在二维运动期间耦合。

    Rigid-flexible coupling motion platform driven by ball screw and control method thereof

    公开(公告)号:US11157024B2

    公开(公告)日:2021-10-26

    申请号:US16558207

    申请日:2019-09-02

    Abstract: A rigid-flexible coupling motion platform driven by a ball screw includes a base, a linear guide rail fixed to the base, a rigid-flexible coupling platform, a servo motor, a ball screw, a guide rail sliding block, a displacement sensor and a driving controller. The rigid-flexible coupling platform includes a frame and a workbench. The frame and the workbench are connected through a flexible hinge; the servo motor is configured to drive the ball screw; the workbench is connected with the ball screw; the frame is connected with the linear guide rail by the guide rail sliding block; the displacement sensor is configured to feed back the position of the workbench; and the driving controller controls the ball screw to drive the workbench to move according to different control modes. The advantages of the ball screw drive and the rigid-flexible coupling motion platform are fully combined, and the positioning precision of the platform is greatly improved.

    Stiffness-frequency adjustable XY micromotion stage based on stress stiffening

    公开(公告)号:US10239167B2

    公开(公告)日:2019-03-26

    申请号:US15114090

    申请日:2014-09-24

    Abstract: The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

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