公开(公告)号：US20250138438A1

公开(公告)日：2025-05-01

申请号：US18907047

申请日：2024-10-04

Applicant: Gigaphoton Inc.

Inventor： Ken YAMADA

IPC: G03F7/00

Abstract: An electric component box includes a first box into which a wiring from the extreme ultraviolet light generation chamber device is introduced and capable of being fixed to a placement surface; a second box into which a wiring from the first box is introduced and capable of being switched, by being raised and lowered, between a fixed state and a movable state; and a connection device providing connection as allowing the second box to be rotatable with respect to the first box, from a facing state in which a predetermined side wall of the first box and a predetermined side wall of the second box face each other, in a direction in which the predetermined side wall of the first box and the predetermined side wall of the second box move away from each other, and to be capable of being raised and lowered with respect to the first box.