公开(公告)号：US12261239B2

公开(公告)日：2025-03-25

申请号：US18769404

申请日：2024-07-11

Applicant: Guangdong University of Technology

Inventor： Yun Chen ,  Yanhui Chen ,  Li Ma ,  Pengwei Lv ,  Hao Zhang ,  Maoxiang Hou ,  Xin Chen

IPC: H01L33/00 ,  H01L21/68 ,  H01L21/683 ,  H01L25/075

Abstract: A device for mass transfer of Mini-LEDs based on array water jet-based ejection, including a planar motion platform, a vision camera, an array water jet-type ejection unit, a Z-axis motion platform, a blue membrane, an operation platform and a transfer substrate. The vision camera and the array water jet-type ejection unit are provided on a side of the planar motion platform. The array water jet-type ejection unit includes a water jet channel and a through-hole array. The Z-axis motion platform is provided at a side of the planar motion platform near the vision camera, and is configured for placement of the blue membrane. Multiple Mini-LED chips are bonded to the blue membrane. The operation platform is spacedly provided at a side of the Z-axis motion platform away from the planar motion platform.