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公开(公告)号:US20210233800A1
公开(公告)日:2021-07-29
申请号:US17229017
申请日:2021-04-13
Applicant: Guangdong University of Technology
Inventor: Jian GAO , Wenxiu LAI , Guocong CHEN , Lanyu ZHANG , Yachao LIU , Yongbin ZHONG , Yuheng LUO , Huawen LIN
IPC: H01L21/687 , H01L21/68
Abstract: A decoupled XY parallel micro-positioning stage, including a central moving platform, fixed mechanisms, bridge-type micro-displacement amplification mechanisms, a four-bar symmetrical flexible guide mechanism and a piezoelectric ceramic. Each fixed mechanism is arranged between adjacent amplification mechanisms and is symmetrical about X and Y axes centered on the moving platform. The amplification mechanism is symmetrically arranged with respect to the X and Y axes, and includes two first and second longitudinal beams and multiple crossbeams. The two first longitudinal beams are provided in parallel and spaced apart. The two second longitudinal beams are arranged spaced apart between the two first longitudinal beams, and are connected to the two first longitudinal beams via the crossbeams. The crossbeams are connected to the longitudinal beams via a flexible hinge. The piezoelectric ceramic is arranged between the two first longitudinal beams.
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公开(公告)号:US20230070287A1
公开(公告)日:2023-03-09
申请号:US17988096
申请日:2022-11-16
Applicant: Guangdong University of Technology
Inventor: Jian GAO , Yuanyang WEI , Lanyu ZHANG , Yongbin ZHONG , Haixiang DENG , Yun CHEN , Xin CHEN
Abstract: A real-time pose measurement method of a planar coding target for a vision system. The planar coding target includes a plurality of coding elements, a coding block, a coding template, a minimum identification unit pattern and a coding pattern. Each coding element has a unique coding value, and serial numbers of the coding elements are different from each other. The coding block includes four coding elements that are distributed in the same rectangle ABCD and do not overlap with each other. A center of the coding block is an intersection point O of two diagonals of the rectangle ABCD. A coding value of the coding block is associated with coding values of the four coding elements contained therein.
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