公开(公告)号：US20190030644A1

公开(公告)日：2019-01-31

申请号：US16072626

申请日：2017-01-24

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Junji OKUMA ,  Mitsuhiro NAGAO ,  Yasunori IGASAKI

IPC: B23K26/06 ,  H01S3/10 ,  B23K26/53 ,  B23K26/03

Abstract: A laser processing device includes: a device frame; a support unit attached to the device frame and configured to support an object to be processed; a laser output unit attached to the device frame; and a laser converging unit attached to the device frame so as to be movable with respect to the laser output unit. The laser output unit includes a laser light source configured to emit laser light, and the laser converging unit includes: a reflective spatial light modulator configured to reflect the laser light while modulating the laser light; a converging optical system configured to converge the laser light at the object to be processed; and an imaging optical system constituting a double telecentric optical system in which a reflective surface of the reflective spatial light modulator and an entrance pupil plane of the converging optical system are in an imaging relationship.

公开(公告)号：US20200298345A1

公开(公告)日：2020-09-24

申请号：US16087789

申请日：2017-03-28

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Junji OKUMA ,  Mitsuhiro NAGAO ,  Norihiro FUKUCHI ,  Yasunori IGASAKI

IPC: B23K26/53 ,  B23K26/064 ,  B23K26/06 ,  B23K26/08 ,  G02F1/1335

Abstract: A laser processing device configured to emit laser light on an object to perform laser processing of the object, the laser processing device including: a laser output unit configured to output the laser light; a spatial light modulator configured to reflect the laser light output from the laser output unit while modulating the laser light in accordance with a phase pattern; and an objective lens configured to converge the laser light from the spatial light modulator toward the object, in which the spatial light modulator includes an entrance surface, a reflective surface, and a modulation layer configured to display the phase pattern to modulate the laser light, and a dielectric multilayer film having a high reflectance region in a plurality of wavelength bands non-contiguous with each other is formed on the reflective surface.