公开(公告)号：US20190033731A1

公开(公告)日：2019-01-31

申请号：US16069198

申请日：2016-08-31

Applicant: HARBIN INSTITUTE OF TECHNOLOGY

Inventor： Yongmeng LIU ,  Jianwei WU ,  Jiubin TAN

IPC: G03F7/20

CPC classification number: G03F7/70725 ,  G03F7/70733

Abstract: A dynamic-magnetic steel magnetic levitation double-workpiece-stage vector arc switching method and apparatus based on wireless energy transmission, falling within the semiconductor manufacturing equipment technology. The apparatus comprises a support frame (1), a balance mass block (2), magnetic levitation workpiece stages (4a, 4b), a workpiece stage measurement apparatus, wireless energy transmission apparatuses (5a, 5b) and a wireless energy receiving apparatus (406), wherein the two workpiece stages work between a measurement site (11) and an exposure site (12); a laser interferometer (6) is used to measure the positions of the workpiece stages; the wireless energy transmission apparatuses (5a, 5b) are used to provide energy for a sensor (407) in a micro-drive stage; the workpiece stages are driven using a magnetic levitation planar electrical motor; and during a double-workpiece-stage switching process, the planar electrical motor is used to drive the two workpiece stages so as to achieve single-beat arc quick switching. By using the method and apparatus, the problem that an existing stage switching scheme has many beats, a long track, many start-stop links and a long time for stabilization is solved, thereby reducing the stage switching links, shortening the stage switching time, and improving the productivity of a lithography machine.

公开(公告)号：US20160356392A1

公开(公告)日：2016-12-08

申请号：US15111750

申请日：2014-12-26

Applicant: HARBIN INSTITUTE OF TECHNOLOGY

Inventor： Bo ZHAO ,  Jianwei WU ,  Jiubin TAN ,  Lei WANG

IPC: F16K31/06 ,  F16K11/02

CPC classification number: F16K31/0603 ,  F15B1/265 ,  F15B21/048 ,  F16K11/02 ,  Y10T137/87169 ,  Y10T137/87917

Abstract: A four-state adjustable air path structure is an air storage-type pneumatic actuating mechanism. An air source (1) is respectively connected to an air storage tank (3) and a port a1 of a two-position three-way solenoid valve A (4) via a check valve (2). A port c1 and a port b1 of the two-position three-way solenoid valve A (4) are respectively connected to a port c2 of a two-position three-way solenoid valve B (6) and a vent hole (5). A port a2 and a port b2 of the two-position three-way solenoid valve B (6) are respectively connected to a port b3 of a two-position three-way solenoid valve C (8) and a port of a throttle valve (7). Another port of the throttle valve (7) is connected to a port a3 of the two-position three-way solenoid valve C (8). A port c3 of the two-position three-way solenoid valve C (8) is connected to an air tank (9). The present air storage-type pneumatic actuating mechanism uses air as a medium, utilizing the compressibility of the air to achieve a centralized air supply, thereby significantly simplifying processing and maintenance of a mechanical structure. Intellectual control of an operating speed can also be achieved. The present invention has advantages such as structural simplicity, low manufacturing costs, safe and reliable operation, long service life, and suitability for long-distance transmission.

Abstract translation: 四状态可调节空气路径结构是空气存储式气动致动机构。 空气源（1）通过止回阀（2）分别连接到储气箱（3）和两位三通电磁阀A（4）的端口a1。 两位三通电磁阀A（4）的端口c1和端口b1分别连接到两位三通电磁阀B（6）和通气孔（5）的端口c2。 两位三通电磁阀B（6）的端口a2和端口b2分别连接到两位三通电磁阀C（8）的端口b3和节流阀（ 7）。 节流阀（7）的另一个端口连接到两位三通电磁阀C（8）的端口a3。 两位三通电磁阀C（8）的端口c3连接到空气罐（9）。 目前的空气存储式气动执行机构使用空气作为介质，利用空气的压缩性实现集中供气，从而显着简化机械结构的加工和维护。 也可以实现对操作速度的智能控制。 本发明具有结构简单，制造成本低，运行安全可靠，使用寿命长，适用于长距离传输等优点。