公开(公告)号：US20210090853A1

公开(公告)日：2021-03-25

申请号：US17027341

申请日：2020-09-21

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Takuma ASO ,  Xin MAN ,  Makoto SATO ,  Tatsuya ASAHATA

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  H01J37/30 ,  H01J37/28

Abstract: The particle beam irradiation apparatus includes: an irradiation unit configured to radiate a particle beam; a first detection unit configured to detect first particles; a second detection unit configured to detect second particles; an image forming unit configured to form an observation image based on a first signal obtained by the detection of the first particles, which is performed by the first detection unit, and to form an observation image based on a second signal obtained by the detection of the second particles, which is performed by the second detection unit; and a control unit configured to calculate a brightness of a first region in the formed first observation image and perform a brightness adjustment of the first detection unit based on a first target brightness as a first brightness adjustment when the brightness of the first region is different from the first target brightness.

公开(公告)号：US20210090855A1

公开(公告)日：2021-03-25

申请号：US17027312

申请日：2020-09-21

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Takuma ASO ,  Xin MAN ,  Makoto SATO ,  Tatsuya ASAHATA

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/244 ,  G01N23/2251 ,  G01N23/2258 ,  G01N23/2206

Abstract: The charged particle beam irradiation apparatus includes: a focused ion beam column; an electron beam column; an electron detector; an image forming unit configured to form an observation image based on a signal output from the electron detector; and a control unit configured to repeatedly perform exposure control in which the focused ion beam column is controlled to expose a cross section of a multilayered sample toward a stacking direction with the focused ion beam, the control unit being configured to perform, every time exposure of an observation target layer at a cross section of the multilayered sample is detected in a process of repeatedly performing the exposure control, observation control in which the electron beam column is controlled to radiate the electron beam, and the image forming unit is controlled to form an observation image of the cross section of the multilayered sample.

公开(公告)号：US20180288865A1

公开(公告)日：2018-10-04

申请号：US15936183

申请日：2018-03-26

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Takuma ASO ,  Atsushi UEMOTO ,  Tatsuya ASAHATA ,  Masato SUZUKI

IPC: H05H7/00

Abstract: Disclosed herein is a portable information terminal performing operation of a first operation item at a desired position. The portable information terminal is separated from a charged particle beam irradiation apparatus performing processing of a sample by irradiating the sample with a charged particle beam, and includes a display controller causing a display unit to display an image containing a graphical user interface (GUI) capable of operating a first operation item based on operation by a user, the first operation item being one or more operation items among a plurality of items operable in the charged particle beam irradiation apparatus.