OPTICAL MODULE FOR OPTICAL HEIGHT MEASUREMENT

    公开(公告)号:US20190293406A1

    公开(公告)日:2019-09-26

    申请号:US16168972

    申请日:2018-10-24

    Abstract: The optical module for optical height measurement includes a laser light source, an irradiation optical system, a detection optical system, and a detector. The laser light source is configured to irradiate the layer-structured specimen with a light beam. The irradiation optical system includes an objective lens. The objective lens is located to be approximately perpendicular to the layer-structured specimen. The detection optical system is configured to guide a reflected light reflected by the layer-structured specimen and a light passing through the objective lens and an aperture-restrictor-for-return to the detector. The aperture-restrictor-for-return is located immediately after the objective lens. The aperture-restrictor-for-return is configured to restrict the reflected light and cause only a light in a high NA region to pass through. The detector is configured to convert an entered light into a light detection signal. The detector includes a multi-divided detector array.

    IMAGE DISPLAY ELEMENT AND IMAGE DISPLAY DEVICE USING SAME

    公开(公告)号:US20230367121A1

    公开(公告)日:2023-11-16

    申请号:US17912924

    申请日:2021-06-17

    CPC classification number: G02B27/0172

    Abstract: An image display element includes an incident diffraction grating which diffracts incident light, and an outgoing diffraction grating from which light that has propagated through the light guide plate after being diffracted by the incident diffraction grating is emitted, the incident diffraction grating and the outgoing diffraction grating being each formed by a pattern of concave-convex formed on a surface of the light guide plate, and the image display element being obtained by joining the light guide plate and a cover glass protecting the pattern of concave-convex or two or more light guide plates with an air layer therebetween by a holding member, and being configured such that the light guide plate and the cover glass are formed by a plastic material, and the holding member has an air vent through which air in the air layer and outside air communicate.

    OPTICAL MODULE FOR OPTICAL HEIGHT MEASUREMENT

    公开(公告)号:US20190293408A1

    公开(公告)日:2019-09-26

    申请号:US16170079

    申请日:2018-10-25

    Abstract: An optical module for optical height measurement optically measures a height of a specimen and includes an irradiation optical system, two detection optical systems, and a light dividing element. The irradiation optical system includes a laser light source and an objective lens to irradiate the specimen with a light beam. The two detection optical systems each include a divided optical detector configured to detect a reflected light reflected by the specimen. The light dividing element is configured to guide the reflected light to the two detection optical systems. A light that has transmitted the light dividing element and a light reflected by the light dividing element are guided to the respective two detection optical systems. Intensity distributions of the transmitted light and the reflected light on the two detection optical systems are inverted in line symmetry.

    SCANNING TYPE IMAGE MEASURING APPARATUS AND SCANNING TYPE IMAGE MEASURING METHOD

    公开(公告)号:US20180120558A1

    公开(公告)日:2018-05-03

    申请号:US15725405

    申请日:2017-10-05

    CPC classification number: G02B26/101 G01J1/0403 G02B26/0875

    Abstract: Provided is a scanning type image measuring apparatus capable of reducing an imaging time while suppressing an increase in power consumption. The scanning type image measuring apparatus includes an objective lens scanning mechanism for operating an objective lens in a first direction and a second direction perpendicular to the first direction, wherein, with respect to a resonance frequency related to a spring constant of a support member supporting a movable unit including the objective lens and a mass of the movable unit, the resonance frequency in the second direction is set to be higher than the resonance frequency in the first direction, and a scanning frequency of the objective lens in the second direction is set to be higher than the resonance frequency in the second direction.

    OPTICAL IMAGE MEASURING APPARATUS
    5.
    发明申请
    OPTICAL IMAGE MEASURING APPARATUS 有权
    光学图像测量装置

    公开(公告)号:US20160054113A1

    公开(公告)日:2016-02-25

    申请号:US14795289

    申请日:2015-07-09

    Abstract: A clear image of a measurement target in optical coherence tomography (OCT) is obtained while suppressing influence of reflected light from a specific portion. Included are a laser beam source, a beam splitter that splits a laser beam into a signal beam and reference beam; an objective lens that focuses the signal beam onto a measurement target in a container, a unit that moves the signal beam focus position, an objective lens that focuses the reference beam, a reflecting mirror, a flat plate arranged between the objective lens and reflecting mirror, and interference optics that combine the signal beam reflected by the measurement target with the reference beam reflected by the reflecting mirror and having passed through the objective lens. Three or more interference beams with different phases, and photodetectors that detect the interference beams are generated, and two of the objective lenses are the same lenses.

    Abstract translation: 在抑制来自特定部分的反射光的影响的同时,获得光学相干断层摄影(OCT)中的测量对象的清晰图像。 包括激光束源,将激光束分裂成信号光束和参考光束的分束器; 将信号束聚焦在容器中的测量对象物上的物镜,移动信号束聚焦位置的单元,聚焦参考光束的物镜,反射镜,布置在物镜和反射镜之间的平板 以及将由测量对象反射的信号光束与由反射镜反射并经过物镜反射的参考光束组合的干涉光学元件。 产生具有不同相位的三个或更多个干涉光束,以及检测干涉光束的光电检测器,并且两个物镜是相同的透镜。

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