公开(公告)号：US20240322663A1

公开(公告)日：2024-09-26

申请号：US18679469

申请日：2024-05-31

Applicant: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Lizhan ZENG ,  Kai LIU ,  Xuedong CHEN

IPC: H02K41/03 ,  H01L21/68

CPC classification number: H02K41/031 ,  H01L21/68 ,  H02K2201/18

Abstract: The disclosure discloses a magnetic levitation planar motor workbench having a double-layer winding of coarse and fine drive, which belongs to the technical field of planar motors, and includes a stator and a mover. The vertically magnetized permanent magnets and the horizontally magnetized permanent magnets in the stator are arranged in a Halbach arrangement; the mover is located on the enhanced side of the air gap magnetic field above the stator. The mover adopts the double-layer winding of unequal heights, and the height of the upper first winding is smaller than the lower second winding. Each layer of winding may generate driving forces in six directions to achieve six-degree-of-freedom driving.

公开(公告)号：US20170082144A1

公开(公告)日：2017-03-23

申请号：US15126537

申请日：2014-04-02

Applicant: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Wei JIANG ,  Xuedong CHEN ,  Xin LUO ,  Lizhan ZENG

IPC: F16C32/06 ,  F16C29/00

CPC classification number: F16C32/0607 ,  F16C29/00 ,  F16C29/025 ,  F16C32/0614 ,  F16C32/067 ,  F16C2233/00 ,  F16C2322/39

Abstract: The present invention discloses an active airbearing device, including a airbearing body, a gas film active adjusting unit, a support body detection unit and a drive control unit, wherein the support body detection device measures a state of airbearing, the drive control system generates a control signal according to a detection signal, drives and controls the gas film active adjusting device to generate an active action, and dynamically adjusts the form of gas films on a airbearing surface, so as to dynamically adjust pressure distribution of gaps between the gas films of the airbearing device, thereby improving dynamic stiffness characteristics of the airbearing. Through the present invention, the dynamic stiffness characteristics of the airbearing can be improved significantly, and the purpose of stabilizing the airbearing is achieved; in addition, the active airbearing device according to the present invention also has the characteristics of a compact structure, convenient operation and control, and high precision, and thus is especially suitable for occasions such as ultra-precision machining or high speed spindle which has high requirements for dynamic stiffness of support.