公开(公告)号：US12270982B1

公开(公告)日：2025-04-08

申请号：US18906132

申请日：2024-10-03

Applicant: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Jinlong Zhu ,  Zhe Yu ,  Wenyu Chen

IPC: G02B21/36 ,  G02B21/06 ,  G02B21/26

Abstract: The invention discloses a method for obtaining the complex refractive index distribution profile of a film. S101, the interference image of the reference area and the sample under test is collected; S102, the normalized light intensity map and the optical path difference of the sample under test relative to the reference area is determined through the recovery algorithm based on the obtained interference image; S103, the measurement model is established based on the reflective film transmission matrix model; S104, the relationship between the measured reflection coefficient and optical path difference of the area under test of the sample under test relative to the reference area and the measurement model is determined; S105, the complex refractive index distribution profile of the film under test is calculated based on the measured reflection coefficient and optical path difference of the area under test of the film relative to the reference area and the relationship.