公开(公告)号：US11831256B2

公开(公告)日：2023-11-28

申请号：US17676888

申请日：2022-02-22

Applicant: Harbin Institute of Technology

Inventor： Yang Liu ,  Qian Miao ,  Ning Cui

IPC: H02N2/06 ,  G01D5/14 ,  G01D5/20 ,  G05D23/19 ,  H02N2/02

CPC classification number: H02N2/062 ,  G01D5/142 ,  G01D5/20 ,  G05D23/1917 ,  H02N2/023

Abstract: A short-travel nanoscale motion stage and a method for measuring thermally-related hysteresis data are provided. A stator unit of a left two-pole electromagnet and stator units of two inchworm motors are fixed on a right side surface of a left foundation frame, and an active unit of the left two-pole electromagnet and actives of the two inchworm motors are fixed on a left side surface of a stage moving component. An active unit of a right two-pole electromagnet is fixed on a right side surface of the stage moving component, while a stator unit of the right two-pole electromagnet is fixed on a left side surface of a right foundation frame. The stage moving component is fixedly mounted on a guide sleeve of an aerostatic guideway. Each of the stator units of the left and right two-pole electromagnets has an eddy current sensor and a hall sensor fixed therein.