Learning control system and method for nano-precision motion stage

    公开(公告)号:US12124228B1

    公开(公告)日:2024-10-22

    申请号:US18731174

    申请日:2024-05-31

    Abstract: A learning control system for a nano-precision motion stage comprises a closed-loop feedback section including a motion trajectory generator, a feedback controller, a motion stage, and a first Fourier transformer; and a feedforward section including a second Fourier transformer, a learning controller, an iteration backward shift operator, and a Fourier inverse transformer. An iteration experiment count j is initialized as j=1, and a j-th frequency domain feedforward signal is initialized to 0; the system is run to collect a frequency domain error signal and a frequency domain position measurement signal; a (j+1)-th frequency domain feedforward signal is updated; and an iteration experiment count j is incremented by 1. The present disclosure can effectively suppress the influence of external noise and disturbances, and improve convergence performance. Moreover, the present disclosure requires less computation, achieves simple determination of learning gains and strong robustness, and is convenient for engineering applications.

    Short-travel nanoscale motion stage and method for measuring thermally-related hysteresis data

    公开(公告)号:US11831256B2

    公开(公告)日:2023-11-28

    申请号:US17676888

    申请日:2022-02-22

    CPC classification number: H02N2/062 G01D5/142 G01D5/20 G05D23/1917 H02N2/023

    Abstract: A short-travel nanoscale motion stage and a method for measuring thermally-related hysteresis data are provided. A stator unit of a left two-pole electromagnet and stator units of two inchworm motors are fixed on a right side surface of a left foundation frame, and an active unit of the left two-pole electromagnet and actives of the two inchworm motors are fixed on a left side surface of a stage moving component. An active unit of a right two-pole electromagnet is fixed on a right side surface of the stage moving component, while a stator unit of the right two-pole electromagnet is fixed on a left side surface of a right foundation frame. The stage moving component is fixedly mounted on a guide sleeve of an aerostatic guideway. Each of the stator units of the left and right two-pole electromagnets has an eddy current sensor and a hall sensor fixed therein.

Patent Agency Ranking