公开(公告)号：US20240219869A1

公开(公告)日：2024-07-04

申请号：US18353900

申请日：2023-07-18

Applicant: Harbin Institute of Technology

Inventor： Fazhi SONG ,  Yang LIU ,  Kaixin LIU

IPC: G05B13/02 ,  G05B19/042

CPC classification number: G05B13/025 ,  G05B19/0426

Abstract: A dynamic decoupling control method for a multi-degree-of-freedom precision comprises defining a dynamic decoupling controller and parameterizing elements in the form of a finite impulse response (FIR) filter, applying a nominal decoupling control method to measure an actual position signal of an actual system and an output of a nominal decoupling controller, calculating a virtual control quantity, and optimizing an indicator function to obtain an estimated value of a coefficient to be optimized of the dynamic decoupling controller. Decoupling at medium and high frequency bands can be effectively realized with improved accuracy of decoupling, and an algorithm flow is simplified. The method is prone to engineering implementation.

公开(公告)号：US20240202394A1

公开(公告)日：2024-06-20

申请号：US18450421

申请日：2023-08-16

Applicant: Harbin Institute of Technology

Inventor： Yang LIU ,  Zhenyu CHEN ,  Fazhi SONG ,  Jiubin TAN

IPC: G06F30/20

CPC classification number: G06F30/20 ,  G06F2111/10

Abstract: A method for dynamic output force distribution of a multi-degree-of-freedom over-actuated motion stage includes: establishing a mathematical model G(s) of a motion stage based on a modal representation; setting a time delay interval parameter Δτ and an instruction shaper order nCS, and calculating each pulse time delay parameter τi; calculating matrices Tb and Vb; initializing q=1; defining Hq; calculating intermediate variable {tilde over (T)}jq, {tilde over (V)}, ΦHq, YHq, TΦHq, VΦHq, and βq; calculating an estimated value Ĥq of Hq; obtaining an amplitude Aikq of an instruction shaper; q=q+1, until calculation is completed for all logical axis channels; calculating α(s) by using Aikq; and obtaining a dynamic output force distribution matrix Tf(s). Zero-residue vibration suppression in all controllable flexible modalities can be realized with finite actuator redundancies.

公开(公告)号：US20220276622A1

公开(公告)日：2022-09-01

申请号：US17681870

申请日：2022-02-28

Applicant: Harbin Institute of Technology

Inventor： Fazhi SONG ,  Yang LIU ,  Kaixin LIU ,  Xiaohui ZHANG

IPC: G05B13/04 ,  G06F30/20

Abstract: A precise coordination control system includes a trajectory generator, a closed-loop system of a first motion stage, and a closed-loop system of a second motion stage. The precise coordination control method includes: initializing an iteration experiment count j to 1 and feedforward control signals of two motion stages to 0; performing the jth iteration experiment and running the coordination control system; updating the feedforward control signals of the two motion stages; and continuing next iteration and stopping the iteration experiment until a coordination motion error meets a precision requirement. Both of respective servo errors of two motion stages and the coordination motion error of the two motion stages can be reduced. A learning coefficient is designed by using an adaptive method to provide an increased convergence rate, high robustness to external random disturbances, and good anti-disturbance capability.

公开(公告)号：US20160124437A1

公开(公告)日：2016-05-05

申请号：US14892778

申请日：2014-05-06

Applicant: HARBIN INSTITUTE OF TECHNOLOGY

Inventor： Xinglin CHEN ,  Yang LIU ,  Cong LI ,  Weifeng WANG ,  Chuan LIU

IPC: G05D3/12 ,  F16M11/26 ,  G05B19/27

CPC classification number: G05D3/12 ,  F16F15/00 ,  F16F15/002 ,  F16M11/121 ,  F16M11/18 ,  F16M11/26 ,  F16M11/32 ,  G05B15/02 ,  G05B19/27 ,  G05B2219/49276

Abstract: A measurement control system for a multi-shaft supported air floatation platform, the system comprising a load feedback unit (5), an execution unit (6), a position measurement unit (7), a safety protection unit (8), a controller (9), a rotating motor (10), and a linear light source 11; the load feedback unit comprises M pressure sensors (5-1) and four differential sensors (5-2); the execution unit comprises M servo voice coil motors (6-1) and M servo voice coil motor drivers (6-2); the position measurement unit comprises a plane grating (7-1), M linear gratings (7-2) a linear array CCD (7-3), a tilt sensor (7-4), M electronic levels (7-5), and an indoor GPS (7-6); the safety protection unit comprises 2M proximity sensors (8-1) and M temperature sensors (8-2); and the linear array CCD consists of no few then six CCDs. The system solves the problems of leveling limitations and narrow application range of existing supporting platforms.

Abstract translation: 一种用于多轴支撑的气浮平台的测量控制系统，该系统包括负载反馈单元（5），执行单元（6），位置测量单元（7），安全保护单元（8），控制器 （9），旋转马达（10）和线性光源11; 负载反馈单元包括M个压力传感器（5-1）和四个差动传感器（5-2）; 执行单元包括M个伺服音圈马达（6-1）和M个伺服音圈马达驱动器（6-2）; 位置测量单元包括平面光栅（7-1），M个线性光栅（7-2），线性阵列CCD（7-3），倾斜传感器（7-4），M个电子电平（7-5） 和室内GPS（7-6）; 安全保护单元包括2M接近传感器（8-1）和M温度传感器（8-2）; 线阵CCD由几个CCD组成。 该系统解决了现有支持平台的调平限制和应用范围狭窄的问题。

公开(公告)号：US20220271688A1

公开(公告)日：2022-08-25

申请号：US17676888

申请日：2022-02-22

Applicant: Harbin Institute of Technology

Inventor： Yang LIU ,  Qian MIAO ,  Ning CUI

IPC: H02N2/06 ,  G01D5/14 ,  G01D5/20 ,  G05D23/19 ,  H02N2/02

Abstract: A short-travel nanoscale motion stage and a method for measuring thermally-related hysteresis data are provided. A stator unit of a left two-pole electromagnet and stator units of two inchworm motors are fixed on a right side surface of a left foundation frame, and an active unit of the left two-pole electromagnet and actives of the two inchworm motors are fixed on a left side surface of a stage moving component. An active unit of a right two-pole electromagnet is fixed on a right side surface of the stage moving component, while a stator unit of the right two-pole electromagnet is fixed on a left side surface of a right foundation frame. The stage moving component is fixedly mounted on a guide sleeve of an aerostatic guideway. Each of the stator units of the left and right two-pole electromagnets has an eddy current sensor and a hall sensor fixed therein.