METHOD FOR DYNAMIC OUTPUT FORCE DISTRIBUTION OF MULTI-DEGREE-OF-FREEDOM OVER-ACTUATED MOTION STAGE

    公开(公告)号:US20240202394A1

    公开(公告)日:2024-06-20

    申请号:US18450421

    申请日:2023-08-16

    CPC classification number: G06F30/20 G06F2111/10

    Abstract: A method for dynamic output force distribution of a multi-degree-of-freedom over-actuated motion stage includes: establishing a mathematical model G(s) of a motion stage based on a modal representation; setting a time delay interval parameter Δτ and an instruction shaper order nCS, and calculating each pulse time delay parameter τi; calculating matrices Tb and Vb; initializing q=1; defining Hq; calculating intermediate variable {tilde over (T)}jq, {tilde over (V)}, ΦHq, YHq, TΦHq, VΦHq, and βq; calculating an estimated value Ĥq of Hq; obtaining an amplitude Aikq of an instruction shaper; q=q+1, until calculation is completed for all logical axis channels; calculating α(s) by using Aikq; and obtaining a dynamic output force distribution matrix Tf(s). Zero-residue vibration suppression in all controllable flexible modalities can be realized with finite actuator redundancies.

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