Method for Distributing Relative Gap Parameters of Large-Scale High-Speed Rotary Equipment Components Based on Eccentricity Vector Following Measurement and Adjustment

    公开(公告)号:US20200217223A1

    公开(公告)日:2020-07-09

    申请号:US16375204

    申请日:2019-04-04

    Abstract: The present invention provides a method for distributing relative gap parameters of large-scale high-speed rotary equipment components based on eccentricity vector following measurement and adjustment. According to the present invention, a propagation process of location and orientation errors of rotors and stators of an aero-engine during assembly are analyzed, a propagation relationship of eccentricity errors after n-stage rotor and stator assembly is determined, and a coaxiality prediction model after multi-stage rotor and stator assembly is obtained; and the relative concentricity and relative runout of the rotors and stators can be further obtained by using an offset of the rotors and stators, thereby implementing the calculation of a relative gap; thereafter, a dual-objective optimization model for multi-stage rotor and stator coaxiality and relative gap amount based on an angular orientation mounting position of all stages of rotors and stators is established, the angular orientation mounting position of all stages of rotors and stators is optimized by using a genetic algorithm, to obtain an optimal mounting phase of all stages of rotors and stators; and finally, relative gap parameters of the rotor and stator can be distributed by using a probability density method.

    Stage-by-stage Measurement, Regulation and Distribution Method for Dynamic Characteristics of Multi-Stage Components of Large-Scale High-Speed Rotary Equipment Based on Multi-Biased Error Synchronous Compensation

    公开(公告)号:US20200217738A1

    公开(公告)日:2020-07-09

    申请号:US16374926

    申请日:2019-04-04

    Abstract: The present invention provides a stage-by-stage measurement, regulation and distribution method for dynamic characteristics of multi-stage components of large-scale high-speed rotary equipment based on multi-biased error synchronous compensation and belongs to the technical field of mechanical assembly. Firstly, a single-stage rotor five-parameter circular contour measurement model is established, and the five-parameter circular contour measurement model is simplified by using a distance from an ith sampling point of an ellipse to a geometry center to obtain a simplified five-parameter circular contour measurement model. Then, actually measured circular contour data is taken into the simplified five-parameter circular contour measurement model to determine a relationship between dynamic response parameters after rotor assembly and eccentricity errors as well as the amount of unbalance of all stages of rotors. Finally, a rotor speed is set according to the relationship between the dynamic response parameters after rotor assembly and the eccentricity errors as well as the amount of unbalance of all stages of rotors to obtain a critical speed parameter objective function. The high-speed response critical speed parameters for n rotors assembly are optimized by adjusting assembly phases of all stages of rotors, so that a high-speed response to a multi-stage rotor of an aero-engine can be optimized.

    METHOD FOR PREDICTING COAXIALITY OF PARTS OF ROTARY EQUIPMENT BASED ON GA-PSO-BP NEURAL NETWORK

    公开(公告)号:US20230409920A1

    公开(公告)日:2023-12-21

    申请号:US17875453

    申请日:2022-07-28

    CPC classification number: G06N3/086 G06N3/084

    Abstract: A GA-PSO-BP neural network is provided for performing a measurement of a coaxiality error of parts of a rotary equipment and predicting a coaxiality of parts of the rotary equipment in order to solve a problem that a coaxiality error of saddle surface parts is difficult to calculate by building a traditional mathematical model based on a three-dimensional coordinate system transformation due to serious deformation of fitting surfaces of spigots. The GA-PSO-BP neural network method includes the steps of analyzing an influence source of the coaxiality error of multi-stage parts after assembly; then taking an error source as an input and the coaxiality error of the multi-stage parts after assembly as an output; and introducing a genetic algorithm to optimize an initial weight and threshold of a BP neural network, and introducing a particle swarm optimization to find optimal solutions of hyperparameters.

    Large-scale High-speed Rotary Equipment Measuring and Neural Network Learning Regulation and Control Method and Device Based on Rigidity Vector Space Projection Maximization

    公开(公告)号:US20200217739A1

    公开(公告)日:2020-07-09

    申请号:US16375089

    申请日:2019-04-04

    Abstract: The present invention provides a large-scale high-speed rotary equipment measuring and neural network learning regulation and control method and device based on rigidity vector space projection maximization, belonging to the technical field of mechanical assembly. The method utilizes an envelope filter principle, a two-dimensional point set S, a least square method and a learning neural network to realize large-scale high-speed rotary equipment measuring and regulation and control. The device comprises a base, an air flotation shaft system, an aligning and tilt regulating workbench, precise force sensors, a static balance measuring platform, a left upright column, a right upright column, a left lower transverse measuring rod, a left lower telescopic inductive sensor, a left upper transverse measuring rod, a left upper telescopic inductive sensor, a right lower transverse measuring rod, a right lower lever type inductive sensor, a right upper transverse measuring rod and a right upper lever type inductive sensor. The method and the device can perform effective measuring and accurate regulation and control on large-scale high-speed rotary equipment.

    Method for Optimizing Multi-Stage Components of Large-Scale High-Speed Rotary Equipment Based on Monte Carlo Bias Evaluation

    公开(公告)号:US20200217211A1

    公开(公告)日:2020-07-09

    申请号:US16375172

    申请日:2019-04-04

    Abstract: The present invention provides a method for optimizing multi-stage components of large-scale high-speed rotary equipment based on Monte Carlo bias evaluation. The method comprises: obtaining an offset of a contact surface between all stages of rotors according to a multi-stage rotor propagation relationship, and calculating coaxiality according to a coaxiality formula; calculating a cross sectional moment of inertia of the contact surface, and obtaining a bending stiffness according to a bending stiffness formula; obtaining the amount of unbalance of a rotor according to a rotor error propagation relationship; and obtaining a probability relationship between the assembly surface runout of all stages of aero-engine rotors and the final geometric concentricity, the amount of unbalance and stiffness of multi-stage rotors by using a Monte Carlo method, and optimizing the tolerance distribution and bending stiffness of the aero-engine multi-stage rotors.

    Dynamic-Magnetic Steel Magnet Levitation Double-workpiece-stage Vector Arc Switching Method and Apparatus Based on Wireless Energy Transmission

    公开(公告)号:US20190033731A1

    公开(公告)日:2019-01-31

    申请号:US16069198

    申请日:2016-08-31

    CPC classification number: G03F7/70725 G03F7/70733

    Abstract: A dynamic-magnetic steel magnetic levitation double-workpiece-stage vector arc switching method and apparatus based on wireless energy transmission, falling within the semiconductor manufacturing equipment technology. The apparatus comprises a support frame (1), a balance mass block (2), magnetic levitation workpiece stages (4a, 4b), a workpiece stage measurement apparatus, wireless energy transmission apparatuses (5a, 5b) and a wireless energy receiving apparatus (406), wherein the two workpiece stages work between a measurement site (11) and an exposure site (12); a laser interferometer (6) is used to measure the positions of the workpiece stages; the wireless energy transmission apparatuses (5a, 5b) are used to provide energy for a sensor (407) in a micro-drive stage; the workpiece stages are driven using a magnetic levitation planar electrical motor; and during a double-workpiece-stage switching process, the planar electrical motor is used to drive the two workpiece stages so as to achieve single-beat arc quick switching. By using the method and apparatus, the problem that an existing stage switching scheme has many beats, a long track, many start-stop links and a long time for stabilization is solved, thereby reducing the stage switching links, shortening the stage switching time, and improving the productivity of a lithography machine.

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