公开(公告)号：US20240162000A1

公开(公告)日：2024-05-16

申请号：US18281871

申请日：2021-03-31

Applicant: Hitachi High-Tech Corporation

Inventor： Yuji ASAKURA ,  Michio HATANO ,  Mitsuhiro NAKAMURA

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J37/28

Abstract: The performance of a sample holder that is fillable with a liquid sample is improved. A sample holder 200 includes: an upper tip 300 that is disposed on an irradiation side of an electron beam; and a lower tip 400 that is disposed to face the upper tip 300. At this time, the sample holder 200 includes: a diaphragm 350 that is provided in the upper tip 300; a diaphragm 450 that is provided in the lower tip 400; a space 600 that is interposed between the diaphragm 350 and the diaphragm 450 and is fillable with a liquid; and a guide portion 340 that guides a liquid having an amount exceeding an amount of liquid with which the space 600 is fillable so as to be dropped from a side opposite to the irradiation side of the electron beam.