公开(公告)号：US20240162000A1

公开(公告)日：2024-05-16

申请号：US18281871

申请日：2021-03-31

Applicant: Hitachi High-Tech Corporation

Inventor： Yuji ASAKURA ,  Michio HATANO ,  Mitsuhiro NAKAMURA

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J37/28

Abstract: The performance of a sample holder that is fillable with a liquid sample is improved. A sample holder 200 includes: an upper tip 300 that is disposed on an irradiation side of an electron beam; and a lower tip 400 that is disposed to face the upper tip 300. At this time, the sample holder 200 includes: a diaphragm 350 that is provided in the upper tip 300; a diaphragm 450 that is provided in the lower tip 400; a space 600 that is interposed between the diaphragm 350 and the diaphragm 450 and is fillable with a liquid; and a guide portion 340 that guides a liquid having an amount exceeding an amount of liquid with which the space 600 is fillable so as to be dropped from a side opposite to the irradiation side of the electron beam.

公开(公告)号：US20230197400A1

公开(公告)日：2023-06-22

申请号：US17922823

申请日：2020-06-12

Applicant: Hitachi High-Tech Corporation

Inventor： Yusuke SEKI ,  Mitsuhiro NAKAMURA ,  Keisuke TANUMA

IPC: H01J37/20 ,  H01J37/22

CPC classification number: H01J37/20 ,  H01J37/22 ,  H01J2237/28 ,  H01J2237/153

Abstract: A dielectric microscopic observation is possible, which suppresses image flow regardless of scanning speed. There are provided a sample chamber 120 holding a sample 200 between a first insulating layer 121 on which a conductive layer 211 to be irradiated with a charged particle beam is laminated and a second insulating layer 122, an amplifier 141 that amplifies a potential change that occurs at an interface between the first insulating layer and the sample as the conductive layer is irradiated with the charged particle beam, and outputs the amplified result as a measurement signal, a main control unit 142 that converts the measurement signal from the amplifier into image data, and corrects the image data with a deconvolution filter 302 to generate corrected image data, a display unit 144 including an observation image display unit 501 and a filter adjustment unit 502 that displays setting information of the deconvolution filter, and an information processing device that displays the corrected image data on the observation image display unit, and when the setting information of the deconvolution filter displayed in the filter adjustment unit is changed, adjusts the deconvolution filter according to the changed setting information.

公开(公告)号：US20240085352A1

公开(公告)日：2024-03-14

申请号：US17767813

申请日：2019-10-10

Applicant: Hitachi High-Tech Corporation ,  National Institute of advanced Industrial Science and Technology

Inventor： Michio HATANO ,  Mitsuhiro NAKAMURA ,  Toshihiko OGURA

IPC: G01N23/2204 ,  G01N23/2251

CPC classification number: G01N23/2204 ,  G01N23/2251 ,  G01N2223/20 ,  G01N2223/30

Abstract: A risk of breakage of a sample holder can be reduced and a biochemical sample or a liquid sample can be observed easily and with a high observation throughput. A sample holder 101 holding a sample includes: a sample chamber including a first insulating thin film 110 and a second insulating thin film 111 that sandwich and hold the sample 200 in a liquid or gel form and face each other, a vacuum partition wall inside which the sample chamber holding the sample is fixed in a state in which the thin film is exposed to a surrounding atmosphere, and whose internal space is kept at a degree of vacuum at least lower than that of the sample room at the time of observation of the sample, a detection electrode 820 disposed to face the second insulating thin film in a state in which the sample chamber is fixed to the vacuum partition wall, and a signal detection unit 50 connected to the detection electrode. Before the surrounding atmosphere of the sample holder is evacuated from an atmospheric pressure to a vacuum, the charged particle beam device receives a detection signal from the signal detection unit via a connector and detects an abnormality of the sample chamber based on the detection signal.

公开(公告)号：US20240079201A1

公开(公告)日：2024-03-07

申请号：US17767595

申请日：2019-10-10

Applicant: Hitachi High-Tech Corporation ,  National Institute of Advanced Industrial Science and Technology

Inventor： Michio HATANO ,  Mitsuhiro NAKAMURA ,  Toshihiko OGURA

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J37/28

Abstract: A sample holder reliably holds a liquid or gel sample, and the yield of observation with a charged particle beam device is improved. A sample holder 101 includes a first member 102 that has a lid member 111 and a first chip 105 provided with a first window 123 where a laminated film including a first insulating thin film 104 is formed, and a second member 103 that has a base material 127 having a first bottom seal surface 203 and a second bottom seal surface 200, an electrode 108 disposed on the base material, and a second chip 107 provided with a second window 124 where a second insulating thin film 106 is formed and held on the second bottom seal surface via a second seal material 119 such that the second window faces the electrode, in which a region inside a first seal material is maintained airtightly from a region outside the first seal material by the first member and the second member being combined and the first seal material being crushed between the first bottom seal surface and an upper seal surface of the lid member.

公开(公告)号：US20230260739A1

公开(公告)日：2023-08-17

申请号：US18012478

申请日：2020-07-13

Applicant: Hitachi High-Tech Corporation

Inventor： Keisuke TANUMA ,  Masato KAMIO ,  Hironori ITABASHI ,  Hiroki KANNAMI ,  Yusuke SEKI ,  Takumi UEZONO ,  Mitsuhiro NAKAMURA

IPC: H01J37/153 ,  H01J37/28 ,  H01J37/147

CPC classification number: H01J37/153 ,  H01J37/28 ,  H01J37/1474 ,  H01J2237/1536

Abstract: It is aimed to properly correct the various types of distortion without a reduction in observation throughput. The present disclosure provides a charged particle beam device that obtains an image by irradiating a specimen with a charged particle beam and includes: a deflection coil that scans the charged particle beam on the specimen; a D/A converter that converts a digital scan waveform into an analog scan waveform and outputs the analog scan waveform to the deflection coil to drive the deflection coil; and a scan waveform generation unit that generates a digital scan waveform and outputs the digital scan waveform to the D/A converter, in which the scan waveform generation unit has a basic LUT that stores parameters for correcting the digital scan waveform and includes a correction circuit that corrects a distortion characteristic of the deflection coil