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公开(公告)号:US20190250125A1
公开(公告)日:2019-08-15
申请号:US16333258
申请日:2016-09-23
Applicant: Hitachi High-Technologies Corporation
Inventor: Katsuhiro ARITOME , Ryusuke KIMURA , Motohiro YAMAZAKI , Go NAKAJIMA , Naomichi KAWASAKI
IPC: G01N27/447 , B05C7/08
CPC classification number: G01N27/44782 , B01J19/0046 , B01L2400/0421 , B05C7/08 , G01N27/447 , G01N27/44743
Abstract: This drive screw device is provided with: a drive screw; a drive unit which causes the drive screw to rotate; a slider which moves along the drive screw by means of the rotation of the drive screw; and an external load which is provided on the drive screw and applies a rotational load to the drive screw. By this means it is possible to provide a drive screw device with which there is little pressure variation even if a frictional force varies.