Abstract:
A pyrolysis tube for use with a material deposition system includes a plurality of channels. The channels may be defined by internal elements of the pyrolysis tube, or by internal elements that form an insert for a conventionally configured pyrolysis tube. One or more of the channels may extend straight through the pyrolysis tube, providing a direct line of sight through the pyrolysis tube. Material deposition systems that include such an insert or pyrolysis tube are also disclosed, as are methods for efficiently pyrolyzing precursor materials at temperatures that are reduced relative to conventional pyrolysis temperatures and/or at rates that are increased relative to conventional pyrolysis rates.
Abstract:
In various aspects and embodiment, the present disclosure relates to a carrier system for receiving and holding precursor material. The carrier system may be used within a material processing system for forming protecting coatings on a substrate. The carrier system may comprise a carrier including a plurality of receptacles. The carrier system may further include a plurality of cups, each cup configured to be removably positioned with a receptacle of the carrier.
Abstract:
Methods for obtaining a profile for a batch, or lot, of a precursor material and using the profile while processing the precursor material to form a polymer are disclosed. In such a method, a process profile that corresponds to the characteristics of a particular precursor material (e.g., the batch, etc.) may be generated. That process profile may then be used to cause a material processing system to process the precursor material in a manner that accounts for differences between that precursor material and a “standard” precursor material, while providing a polymer and, optionally, a film of “standard” quality. Apparatuses and systems that are configured to obtain profile data for a batch of precursor material, generate or modify a process profile based on the profile data and use the process profile to form a polymer are also disclosed.
Abstract:
A material processing system that prevents transmission of infrared radiation from its pyrolysis tube to one or more adjacent elements, such as a vaporization chamber or a deposition chamber, is disclosed. Such a material processing system may include at least one conduit with a non-linear element. The non-linear element of such a conduit may preclude the presence of a line-of-sight through the length of the conduit. The non-linear element may also have a shape that enables gas or vapor to flow therethrough with little or no turbulence, which, in embodiments where part or all of the material processing system lacks valves, enables the gas or vapor to flow freely through the material processing system, or at least through the valveless portion thereof.
Abstract:
A pyrolysis tube for use with a material deposition system includes a plurality of channels. The channels may be defined by internal elements of the pyrolysis tube, or by internal elements that form an insert for a conventionally configured pyrolysis tube. One or more of the channels may extend straight through the pyrolysis tube, providing a direct line of sight through the pyrolysis tube. Material deposition systems that include such an insert or pyrolysis tube are also disclosed, as are methods for efficiently pyrolyzing precursor materials at temperatures that are reduced relative to conventional pyrolysis temperatures and/or at rates that are increased relative to conventional pyrolysis rates.
Abstract:
Methods for obtaining a profile for a batch, or lot, of a precursor material and using the profile while processing the precursor material to form a polymer are disclosed. In such a method, a process profile that corresponds to the characteristics of a particular precursor material (e.g., the batch, etc.) may be generated. That process profile may then be used to cause a material processing system to process the precursor material in a manner that accounts for differences between that precursor material and a “standard” precursor material, while providing a polymer and, optionally, a film of “standard” quality. Apparatuses and systems that are configured to obtain profile data for a batch of precursor material, generate or modify a process profile based on the profile data and use the process profile to form a polymer are also disclosed.