公开(公告)号：US12276784B2

公开(公告)日：2025-04-15

申请号：US17635907

申请日：2020-08-05

Applicant: ASML Netherlands B.V. ,  IMEC v.z.w.

Inventor： Luc Roger Simonne Haspeslagh ,  Veronique Rochus ,  Guilherme Brondani Torri ,  Nitesh Pandey ,  Sebastianus Adrianus Goorden

IPC: G02B26/08 ,  G02B7/18 ,  G03F7/00

Abstract: A micromirror array comprises a substrate, a plurality of minors for reflecting incident light and, for each mirror (20) of the plurality of minors, at least one piezoelectric actuator (21) for displacing the minor, wherein the at least one piezoelectric actuator is connected to the substrate. The micromirror array further comprises one or more pillars (24) connecting the minor to the at least one piezoelectric actuator. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection apparatus.

公开(公告)号：US11408764B2

公开(公告)日：2022-08-09

申请号：US16703657

申请日：2019-12-04

Applicant: IMEC VZW ,  KATHOLIEKE UNIVERSITEIT LEUVEN

Inventor： Wouter Jan Westerveld ,  Veronique Rochus ,  Simone Severi ,  Roelof Jansen

IPC: G01H9/00 ,  G02B6/42 ,  G02B6/293

Abstract: A sensor comprises: a thin structure, which is configured to receive a force for deforming a shape of the thin structure and which is arranged above a substrate; and a waveguide for guiding an electro-magnetic wave comprising: a first waveguide part; and a second waveguide part; wherein the second waveguide part has a larger width than the first waveguide part; and wherein the first and the second waveguide parts are spaced apart by a gap which is sufficiently small such that the first and second waveguide parts unitely form a single waveguide, wherein one of the first and the second waveguide part is arranged at least partly on the thin structure and another of the first and the second waveguide part is arranged on the substrate.

公开(公告)号：US11531418B2

公开(公告)日：2022-12-20

申请号：US17104844

申请日：2020-11-25

Applicant: IMEC VZW

Inventor： Alexandre Halbach ,  Veronique Rochus

IPC: G06F3/041 ,  G06F3/01 ,  G06F3/043 ,  H04M1/02

Abstract: A phased array ultrasound device includes transducer elements arranged in a two dimensional array; first electrodes, each first electrode extending along a first direction; and second electrodes, each second electrode extending along a second direction, where each transducer element is associated with one first electrode and one second electrode, where each transducer element includes a material located between its associated first electrode and second electrode, and is configured to emit an ultrasonic wave induced by a vibration force or an oscillation force of its material when the transducer element is actuated based on control signals applied to its associated first electrode and second electrode, where each transducer element has a unipolar actuation force direction, and where the phased array ultrasound device is configured to create a pressure focus point by actuating a set of transducer elements to form a combined ultrasonic wave.

公开(公告)号：US20220223175A1

公开(公告)日：2022-07-14

申请号：US17645107

申请日：2021-12-20

Applicant: IMEC vzw

Inventor： Grim Keulemans ,  Veronique Rochus ,  Maarten Rosmeulen ,  Xavier Rottenberg

IPC: G11B5/008 ,  G11B5/127

Abstract: A storage device configured to store data on a tape is provided. In one aspect, the storage device includes the tape, which is configured to store data, and a data head, which is configured to read and/or write data from and/or to the tape. The storage device further includes an actuator configured to move the tape in a length direction in a step-wise manner. The actuator can include a plurality of pulling electrodes, wherein each pulling electrode can be activated to exert a pulling force on the tape, and a plurality of clamping electrodes, wherein each clamping electrode can be activated to clamp the tape.

公开(公告)号：US20200158506A1

公开(公告)日：2020-05-21

申请号：US16690667

申请日：2019-11-21

Applicant: IMEC VZW

Inventor： Veronique Rochus ,  Roelof Jansen ,  Benedetto Troia

IPC: G01C19/66

Abstract: An optical gyroscope and a method for measuring an angular velocity of rotation are described. A closed-path optical cavity is configured for receiving at least a first optical signal circulating as at least one cavity mode of pre-determined orientation (inside the optical cavity. An extractor in optical communication with the optical cavity is configured for extracting a fraction of at least the circulating first optical signal from the optical cavity, wherein an amplitude of the extracted fraction increases when a resonance condition for the optical cavity in optical communication with the extractor is approached. A readout channel included in the optical gyroscope comprises an interferometric device adapted to spectrally modify the extracted fraction so as to produce a spectral Vernier effect. A difference between free spectral ranges of the interferometric device and the optical cavity is larger than the associated spectral widths. Readout detectors are included in the readout channel for detecting optical power levels of the spectrally modified optical signal, based on which the angular velocity is determined.

公开(公告)号：US10520677B2

公开(公告)日：2019-12-31

申请号：US16231452

申请日：2018-12-22

Applicant: IMEC VZW

Inventor： Bruno Figeys ,  Veronique Rochus ,  Roelof Jansen ,  Xavier Rottenberg

IPC: G02B6/35 ,  G02B6/34 ,  G02B6/12

Abstract: An integrated photonic device comprises: an input waveguide configured to extend in an input plane, and an output waveguide configured to extend in an output plane, wherein the output plane is parallel to or contained within the input plane; an input coupler optically coupled to the input waveguide, wherein the input coupler is configured to redirect a light signal out of the input waveguide and the input plane; a light property modifier configured to receive the light signal from the input coupler and reflect the light signal towards the output plane, wherein the light property modifier is configured to selectively adjust an optical path length of the light signal; and an output coupler optically coupled to the output waveguide, wherein the output coupler is configured to receive the reflected light signal from the light property modifier and redirect the light signal into the output waveguide and the output plane.

公开(公告)号：US11372158B2

公开(公告)日：2022-06-28

申请号：US16703242

申请日：2019-12-04

Applicant: IMEC VZW ,  KATHOLIEKE UNIVERSITEIT LEUVEN

Inventor： Wouter Jan Westerveld ,  Veronique Rochus ,  Simone Severi ,  Roelof Jansen

IPC: G02B6/12 ,  G02B6/122 ,  G01D5/353

Abstract: A waveguide for guiding an electro-magnetic wave comprises: a first waveguide part; and a second waveguide part; wherein the first waveguide part has a first width in a first direction (Y) perpendicular to the direction of propagation of the electro-magnetic wave and the second waveguide part has a second width in the first direction (Y), wherein the second width is larger than the first width; and wherein the first and the second waveguide parts are spaced apart by a gap in a second direction (Z) perpendicular to the first and second planes in which the waveguide parts are formed, wherein the gap has a size which is sufficiently small such that the first and second waveguide parts unitely form a single waveguide for guiding the electro-magnetic wave. The waveguide may be used in numerous applications, such as in a photonic integrated circuit, in a sensor or in an actuator.

公开(公告)号：US10775254B2

公开(公告)日：2020-09-15

申请号：US16006835

申请日：2018-06-12

Applicant: IMEC VZW

Inventor： Roelof Jansen ,  Xavier Rottenberg ,  Veronique Rochus

IPC: G01L11/02 ,  G01L13/02

Abstract: A force sensing device comprises: a membrane (120), which is configured to deform upon receiving a force; a first Mach Zehnder-type interferometer device (110); a second Mach Zehnder-type interferometer device (130), wherein a first measurement propagation path (114) of the first Mach Zehnder-type interferometer device (110) and a second measurement propagation path (134) of the second Mach Zehnder-type interferometer device (130) are arranged on or in the membrane (120), and wherein the first measurement propagation path (114) and the second measurement propagation path (134) are differently sensitive to applied force on the membrane (120).

公开(公告)号：US20140292323A1

公开(公告)日：2014-10-02

申请号：US14228090

申请日：2014-03-27

Applicant: King Abdulaziz City for Science and Technology ,  IMEC

Inventor： Mahmoud A. Farghaly ,  Veronique Rochus ,  Xavier Rottenberg ,  Hendrikus Tilmans

IPC: G01R33/028 ,  G06F17/50

CPC classification number: G01R33/0286 ,  G01R15/245 ,  G01R33/0005 ,  G01R33/028 ,  G01R33/0283 ,  G01V3/087 ,  G01V3/40 ,  G06F17/5086

Abstract: A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the centre of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.

Abstract translation: 双轴MEMS磁力仪在一个平面中包括具有内壁和四个扭转弹簧的独立的矩形框架，其中框架的相对的内壁与仅两个扭转弹簧的一端接触，每个扭转弹簧由其另一个 朝向框架的中心延伸到基板。 在操作中，磁力计使用差分电容测量来测量两个正交感测模式中的磁场。

公开(公告)号：US20130187669A1

公开(公告)日：2013-07-25

申请号：US13746149

申请日：2013-01-21

Applicant: IMEC

Inventor： Murali Jayapala ,  Geert Van Der Plas ,  Veronique Rochus ,  Xavier Rottenberg ,  Simone Severi ,  Stéphane Donnay

IPC: G02B27/00

CPC classification number: G02B27/00 ,  G02B1/00 ,  G02B6/352 ,  G02B6/359 ,  G02B26/0825 ,  G02B26/0841 ,  G02B2207/00 ,  H04N1/00

Abstract: A built-in self-calibration system and method for a micro-mirror array device, for example, operating as a variable focal length lens is described. The calibration method comprises determining a capacitance value for each micro-mirror element in the array device at a number of predetermined reference angles to provide a capacitance-reference angle relationship. From the capacitance values, an interpolation step is carried to determine intermediate tilt angles for each micro-mirror element in the array. A voltage sweep is applied to the micro-mirror array and capacitance values, for each micro-mirror element in the array, are measured. For a capacitance value that matches one of the values in the capacitance-reference angle relationship, the corresponding voltage is linked to the associated tilt angle to provide a voltage-tilt angle characteristic which then stored in a memory for subsequent use.

Abstract translation: 描述了用作微反射镜阵列器件的内置自校准系统和方法，例如作为可变焦距透镜操作。 校准方法包括以多个预定参考角度确定阵列器件中的每个微镜元件的电容值，以提供电容参考角度关系。 根据电容值，进行插值步骤以确定阵列中的每个微镜元件的中间倾斜角度。 对微镜阵列施加电压扫描，并测量阵列中每个微镜元件的电容值。 对于与电容参考角度关系中的一个值匹配的电容值，相应的电压与相关联的倾斜角度相关联，以提供电压倾斜角特性，然后将其存储在存储器中用于随后的使用。