公开(公告)号：US20230003710A1

公开(公告)日：2023-01-05

申请号：US17849905

申请日：2022-06-27

Applicant: IMEC VZW

Inventor： Anne VERHULST ,  Pol VAN DORPE

IPC: G01N33/487 ,  G01N15/06

Abstract: A method of operating a pore field-effect transistor (FET) sensor for detecting particles, wherein the pore FET sensor comprises a FET wherein a gate is controlled by a pore filled by a fluid, comprises: controlling a first voltage (Vcis) to set the FET in a subthreshold region; controlling a second voltage (Vtrans) to set a voltage difference between the first and second voltages (Vtrans) such that an effective difference in gate voltage experienced between a minimum and a maximum effective gate voltage during movement of a particle in the fluid is at least kT/q; and detecting a drain-source current in the FET, wherein the particle passing through the pore modulates the drain-source current for detecting presence of the particle.