Apparatus and method for detecting photoluminescent light emitted from a sample

    公开(公告)号:US12000785B2

    公开(公告)日:2024-06-04

    申请号:US17428607

    申请日:2020-02-14

    Applicant: IMEC VZW

    CPC classification number: G01N21/6454 G01N21/49 G01N2021/6471

    Abstract: The present invention provides an apparatus for detecting photoluminescent light emitted from a sample, said apparatus (200; 300) comprising at least one light source (210; 310, 318), which is configured to emit light of a first and a second wavelength towards a sample comprising photoluminescent particles, wherein said first wavelength is an excitation wavelength for inducing photoluminescent light from said photoluminescent particles, and wherein said second wavelength is longer than said first wavelength and for gathering background noise information from said sample. The apparatus further comprises a photo-detector (206) for detecting light incident on the photo-detector (206); and an interference filter (204; 304) arranged on the photo-detector (206), wherein the interference filter (204; 304) is configured to selectively collect and transmit light towards the photo-detector (206) based on an angle of incidence of the light towards the interference filter (204; 304), wherein the interference filter (204; 304) is configured to selectively transmit supercritical angle light from the sample towards the photo-detector (206) and suppress undercritical angle light from the sample.

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