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公开(公告)号：US11411161B2
公开(公告)日：2022-08-09
申请号：US16849828
申请日：2020-04-15
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chih-Hsiou Lin , Shih-Ting Lin , Chung-Yuan Su , Chao-Ta Huang
IPC: G06F3/041 , G09G5/08 , H01L41/04 , G01L1/16 , H01L41/113
Abstract: A piezoelectric system comprises a piezoelectric sensor, a voltage stabilizer, a discharger and an operation sensor. The piezoelectric sensor outputs a sensing signal through a sensor output terminal according to a rate of change of pressure. The voltage stabilizer has a positive terminal electrically connecting with the sensor output terminal. The voltage stabilizer receives the sensing signal, stores the energy of the sensing signal, and keeps the voltage of the sensing signal as a constant when the rate of change of pressure is zero. The discharger has a first terminal connecting with the positive terminal, a second terminal coupled to ground, and a control terminal receiving a trigger signal to control the first terminal to conduct with or not conduct with the second terminal. The operation sensor electrically connects to the control terminal for sensing an operation generating the pressure and outputs the trigger signal accordingly.
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公开(公告)号：US10962992B2
公开(公告)日：2021-03-30
申请号：US15853850
申请日：2017-12-25
Applicant: Industrial Technology Research Institute
Inventor： Chien-Nan Yeh , Chung-Yuan Su , Chih-Yuan Chen , Chao-Ta Huang , Yu-Wen Hsu
Abstract: An apparatus with two anchors including a housing, a movable element, and a rotary element is provided. The housing includes a first expansion unit, a second expansion unit, and a linkage. First alignment structures are disposed in the movable element and anti-rotation structures are disposed in the linkage. When the movable element and the rotary element enter the housing from two ends and are coupled along an axis, the movable element and the rotary element can approach each other to expand the first expansion unit and the second expansion unit to form two anchors. The apparatus with two anchors secures a sensor in a variety of environments such as walls or machines. When the apparatus with two anchors fixes a sensor in a hole of a stamping machine, the impact force does not cause stress concentration on the sensor so as to improve the reliability of the sensor.
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公开(公告)号：US09841281B2
公开(公告)日：2017-12-12
申请号：US14553595
申请日：2014-11-25
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chung-Yuan Su , Chun-Yin Tsai , Chao-Ta Huang
IPC: B81B3/00 , G01C19/5762
CPC classification number: G01C19/5762 , B81B3/0045 , B81B2201/0235 , B81B2201/0242 , B81B2203/0163 , Y10T74/12
Abstract: A micro-electromechanical apparatus includes a rotary element, at least one restraint and at least two folded springs. The rotary element is capable of rotating with respect to an axis. The folded springs are symmetrically disposed about the axis. Each folded spring has a moving end and a fixed end, the moving end is connected to the rotary element, and the fixed end is connected to the at least one restraint. The moving end is not located on the axis, and the fixed end is not located on the axis. A moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis. A spring length is defined as a distance between the moving end and the fixed end. The spring length is varied according to the rotation of the rotary element.
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公开(公告)号：US20170188413A1
公开(公告)日：2017-06-29
申请号：US15250869
申请日：2016-08-29
Applicant: Industrial Technology Research Institute
Inventor： Yu-Wen Hsu , Chung-Yuan Su , Chao-Ta Huang
CPC classification number: H05B1/023 , G01N27/12 , G05D23/24 , H05B3/265 , H05B2203/003
Abstract: A micro-electromechanical temperature control system including a micro-electromechanical apparatus is provided. The micro-electromechanical apparatus includes a heater and a thermal reservoir. A specific heat capacity of the thermal reservoir is greater than a specific heat capacity of the heater, so that a heating time and a heating frequency of the heater are reduced to save electrical power consumption. The micro-electromechanical temperature control system is adapted for a micro-electromechanical sensor that is required to be controlled at an operating temperature, such as a gas sensor.
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公开(公告)号：US12025588B2
公开(公告)日：2024-07-02
申请号：US17539686
申请日：2021-12-01
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chung-Yuan Su , Chin-Fu Kuo , Liang-Ying Liu , Chao-Ta Huang
Abstract: A microelectromechanical sensing apparatus with calibration function comprises a microelectromechanical sensor and an IC chip. The microelectromechanical sensor comprises a proof mass, a movable driving electrode and a movable sensing electrode disposed on the proof mass, and a stationary driving electrode and stationary sensing electrode disposed on a substrate, wherein the sensing electrodes output a sensing signal when the proof mass vibrates. The IC chip comprises a conversion module electrically connected to the microelectromechanical sensor, wherein the conversion module converts the sensing signal into an input spectrum signal, and a calibration module electrically connected to the conversion module, wherein the calibration module receives the input spectrum signal and transforms the input spectrum signal into an output spectrum signal; wherein, the output spectrum signal is equal amplitude spectrum signal when the microelectromechanical sensor is subjected to an equal amplitude vibration and the input spectrum signal is an unequal amplitude spectrum signal.
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Patent Agency Ranking
公开(公告)号：US20190172958A1
公开(公告)日：2019-06-06
申请号：US15856925
申请日：2017-12-28
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Feng-Chia Hsu , Shing-Cheng Chang , Peng-Jen Chen , Chung-Yuan Su
IPC: H01L31/0236 , H01L27/146 , H01L35/32
Abstract: An infrared sensor including a substrate, an infrared absorption layer and a concave is provided. The infrared absorption layer is formed on a substrate and has a sensing surface. The concave extends toward the substrate from a sensing surface of the infrared absorption layer.
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公开(公告)号：US10132877B2
公开(公告)日：2018-11-20
申请号：US14576203
申请日：2014-12-19
Applicant: Industrial Technology Research Institute
Inventor： Chung-Yuan Su , Chao-Ta Huang , Sheng-Ren Chiu
IPC: G01C19/5712 , G01R33/02
Abstract: A micro-electromechanical apparatus may include a substrate, a first frame, a plurality of first anchors, a region and a plurality of pivot elements. The plurality of first anchors and the region is disposed on the substrate. The region is surrounded by the plurality of first anchors. Each of the pivot elements includes a pivot end and a rotary end. Each of the pivot ends is connected to a corresponding first anchor and each of the rotary ends is connected to the first frame such that the first frame is able to rotate with respect to an axis passing the region. The micro-electromechanical apparatus having the pivot elements and the region is adapted for detecting multi-degree physical quantities such as angular velocities in at least two axes, angular velocities and accelerations, angular velocities and Earth's magnetic field.
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公开(公告)号：US20170184628A1
公开(公告)日：2017-06-29
申请号：US15252226
申请日：2016-08-31
Applicant: Industrial Technology Research Institute
Inventor： Yu-Wen Hsu , Chung-Yuan Su , Chao-Ta Huang
CPC classification number: G01P15/18 , B81B3/0062 , B81B3/0072 , B81B2201/0235 , B81B2201/025 , B81B2203/0163 , B81B2203/0307 , B81B2203/04 , B81B2203/051 , B81B2203/053 , B81B2203/055 , G01P15/08 , G01P15/125 , G01P2015/084
Abstract: A micro-electromechanical (MEMS) apparatus includes a substrate, two first anchors, a frame, and two elastic members. The substrate is provided with a reference point thereon. The frame surrounds the two first anchors, and each of the elastic members connects the corresponding first anchor and the frame. Each of the first anchors is disposed near the center of the MEMS apparatus to decrease an effect caused by warpage of the substrate. The MEMS apparatus can be applied to an MEMS sensor having a rotatable mass, such as a three-axis accelerometer or a magnetometer, to improve process yield, reliability, and measurement accuracy.
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公开(公告)号：US20140245832A1
公开(公告)日：2014-09-04
申请号：US14151843
申请日：2014-01-10
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Shih-Chieh Lin , Chao-Ta Huang , Chung-Yuan Su , Yu-Wen Hsu
IPC: G01P15/08
CPC classification number: G01P15/125 , G01P2015/0814 , G01P2015/0857
Abstract: A micro-electro mechanical apparatus with interdigitated spring including a substrate, at least one first mass, a movable electrode, a stationary electrode, an anchor and an interdigitated spring is provided. The movable electrode is disposed on the mass along an axial direction. The stationary electrode is disposed on the substrate along the axial direction, and the movable electrode and the stationary electrode have a critical gap there between. The interdigitated springs connects the mass and the anchor along the axial direction. The interdigitated spring includes first folded portions, first connecting portions, second folded portions, and second connecting portions. Each first folded portion includes two first spans and a first head portion. Each second folded portion includes two second spans and a second head portion. A width of the first span and a width of the second span are greater than the critical gap respectively.
Abstract translation: 提供了具有叉指弹簧的微机电装置，其包括基板，至少一个第一质量块，可动电极，固定电极，锚和叉指弹簧。 可移动电极沿轴向设置在质量块上。 固定电极沿着轴向设置在基板上，可动电极和固定电极之间具有临界间隙。 交叉弹簧沿着轴向连接质量块和锚固件。 叉指弹簧包括第一折叠部分，第一连接部分，第二折叠部分和第二连接部分。 每个第一折叠部分包括两个第一跨度和第一头部。 每个第二折叠部分包括两个第二跨度和第二头部。 第一跨度的宽度和第二跨度的宽度分别大于临界间隙。
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公开(公告)号：US12180062B2
公开(公告)日：2024-12-31
申请号：US17743331
申请日：2022-05-12
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Jen-Chieh Li , Chao-Ta Huang , Chung-Yuan Su , RueiHung Kao
Abstract: A microelectromechanical apparatus includes a base and a thin film including a stationary part disposed on the base, a peripheral part, a central part surrounded by the peripheral part, and a first and second elastic part. The first elastic part is connected to the stationary part and the peripheral part. The second elastic part is connected to the peripheral part and the central part. When low frequency signal is input to a first electrode of the first elastic part, the peripheral part and the and the central part respectively vibrate with a first and second low-frequency amplitudes. When high-frequency signal is input to a second electrode of the second elastic part, the peripheral part and the central part respectively vibrate with a first and second high-frequency amplitudes. A difference between the first and second low-frequency amplitudes is smaller than a difference between the first and second high-frequency amplitudes.
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