公开(公告)号：US10782219B2

公开(公告)日：2020-09-22

申请号：US15853475

申请日：2017-12-22

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Sheng-Jui Chen ,  Sheau-Shi Pan ,  Ta-Chang Yu

IPC: G01N15/02 ,  G01N15/14 ,  G01N15/06 ,  G01N15/00

Abstract: A particle counting method comprises obtaining first particle information related to the gas to be measured by a first particle counter with a first particle size detection range, obtaining second particle information related to the gas to be measured by a second particle counter with a second particle size detection range, and generating particle size distribution information according to the first and second particle information. The first particle information includes a plurality of particle size ranges and a plurality of particle quantities wherein each of the plurality of particle size ranges corresponds to a respective one of the plurality of particle quantities, the second particle information includes the quantity of particles of which the size values are in the second particle size range, and the lower limit of the second particle size range is lower than that of the first particle size range.