公开(公告)号：US20180143222A1

公开(公告)日：2018-05-24

申请号：US15573420

申请日：2016-04-01

Applicant: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY

Inventor： Jung Chul LEE ,  Seok Beom KIM ,  Jae Seol LEE

IPC: G01Q60/42

CPC classification number: G01Q60/42

Abstract: A method for manufacturing a microcantilever having a cantilever and a functional probe provided on the cantilever may include steps of: providing a probe mold which accommodates a liquid probe solution in which quantum dots for the functional probe are mixed, and has a groove corresponding to the shape of the functional probe; bringing a cantilever into contact with the probe mold on which the groove is formed to correspond to the location of the functional probe; forming the functional probe on the cantilever by curing the probe solution accommodated in the groove in a state where the cantilever contacts the probe mold; and separating the cantilever from the probe mold.

公开(公告)号：US20170022052A1

公开(公告)日：2017-01-26

申请号：US15125070

申请日：2014-10-13

Applicant: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY

Inventor： Jung Chul LEE ,  Joo Hyun KIM

IPC: B81C1/00 ,  G01N29/02 ,  G01N29/036 ,  G01N5/00

CPC classification number: B81C1/00071 ,  B81B2201/0271 ,  B81B2201/058 ,  B81C1/0015 ,  G01N5/00 ,  G01N9/002 ,  G01N29/022 ,  G01N29/036 ,  G01N2291/0256 ,  H01L31/0352

Abstract: Provided is a method for manufacturing a microchannel resonator capable of measuring a mass and characteristics of an object using a principle in which a resonance frequency is changed according to a mass of a moving material, the method including: providing a silicon substrate; forming a cavity channel inside the silicon substrate; forming a hollow silicon oxide structure on the inner wall surface of the cavity channel by oxidizing the inner wall surface of the cavity channel; and partially removing the periphery of the hollow silicon oxide structure such that the hollow silicon oxide structure can resonate with respect to the silicon substrate.

Abstract translation: 提供一种用于制造能够使用根据移动材料的质量改变共振频率的原理来测量物体的质量和特性的微通道谐振器的方法，所述方法包括：提供硅衬底; 在硅衬底内形成空腔通道; 通过氧化空腔通道的内壁表面在空腔通道的内壁表面上形成中空氧化硅结构; 并且部分地去除中空氧化硅结构的周边，使得中空氧化硅结构可以相对于硅衬底共振。