公开(公告)号：US20240387153A1

公开(公告)日：2024-11-21

申请号：US18788887

申请日：2024-07-30

Applicant: INNOVATION FOR CREATIVE DEVICES CO., LTD.

Inventor： Pyung-Woo LEE ,  Seungho LEE ,  Taeho SHIN ,  Buil JEON ,  Dooho LIM ,  Jungsu PARK ,  Jin Won KONG ,  Bumsoo ON

IPC: H01J37/32 ,  H01L21/683

Abstract: An electrostatic device according to one embodiment of the present invention comprises: an electrostatic electrode layer; a dielectric layer arranged on the electrostatic electrode layer; and a ring-shaped protrusion part arranged and formed on an edge of the dielectric layer, wherein the protrusion part forms a concave area, the concave area is filled with a cooling gas, and the protrusion part comprises a flat area and a surface treatment area to which a roughening treatment has been performed.