公开(公告)号：US09558909B2

公开(公告)日：2017-01-31

申请号：US14395765

申请日：2014-05-06

Applicant: INSTITUTE OF PHYSICS, CHINESE ACADEMY OF SCIENCES

Inventor： Jianqi Li ,  Huanfang Tian ,  Gaolong Cao ,  Chao Ma ,  Huaixin Yang

IPC: H01J37/26 ,  H01J37/06 ,  H01J37/073 ,  H01J37/28

CPC classification number: H01J37/06 ,  H01J37/073 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3178 ,  H01J2237/2802

Abstract: The present invention discloses a multifunctional ultrafast electron gun of a transmission electron microscopy. The ultrafast electron gun of a transmission electron microscope comprises: a laser source, an electron gun body and a laser introducing module. The electron gun body comprises: an electron gun sleeve comprising a first section sleeve and a second section sleeve; and, a cathode, an acceleration electrode and an anode arranged in up-down order, wherein the cathode and the acceleration electrode are located within the first section sleeve and the anode is located within the second section sleeve. The laser introducing module includes an introducing module sleeve sealedly connected between the first section sleeve and the second section sleeve and provided with a laser incoming window in a side thereof; and a laser reflective mirror located in the introducing module sleeve, which is configured to face right the laser incoming window and configured adjacent to a central axis of the introducing module sleeve, and the reflective face of which is configured to make an angle of 45° with the central axis of the introducing module sleeve. The multifunctional ultrafast electron gun of a transmission electron microscopy according to the present invention achieve the best coherence performance of the electrons obtained in the case of the photoelectron emission compared with those in the prior art.

Abstract translation: 本发明公开了一种透射电子显微镜的多功能超快电子枪。 透射电子显微镜的超快电子枪包括：激光源，电子枪体和激光引入模块。 电子枪主体包括：电子枪套筒，包括第一部分套筒和第二部分套筒; 阴极，加速电极和阳极，其以上下顺序排列，其中阴极和加速电极位于第一部分套筒内，阳极位于第二部分套筒内。 激光引入模块包括密封地连接在第一部分套筒和第二部分套筒之间并在其侧面设置有激光进入窗口的引导模块套筒; 以及位于所述引导模块套筒中的激光反射镜，所述激光反射镜被配置为面对所述激光入射窗口的右侧并且被配置成与所述引入模块套筒的中心轴线相邻，并且其反射面被配置为形成45°的角度 与引入模块套筒的中心轴线。 与现有技术相比，根据本发明的透射电子显微镜的多功能超快电子枪实现了在光电子发射的情况下获得的电子的最佳相干性能。