公开(公告)号：US20030016436A1

公开(公告)日：2003-01-23

申请号：US10053328

申请日：2002-01-16

Applicant: INTPAX, Inc.

Inventor： Liji Huang ,  Yahong Yao ,  Naiqian Han ,  Gaofeng Wang

IPC: G02F001/03 ,  G02F001/07 ,  G02B026/00 ,  G02F001/00

CPC classification number: G02B26/02 ,  G02B6/122 ,  G02B26/001 ,  G02B2006/12104 ,  G02B2006/12109 ,  G02B2006/12159 ,  G02B2006/12176

Abstract: The present invention discloses an electro-optical device support on a substrate. The electro-optical device includes two face-to-face freestanding membranes each supported near a top surface on one of two bonded substrates for defining a resonant cavity between the two membranes. Each of the substrates having an entire bulk-portion opposite the cavity etched off as a bulk micro-machining opening extended from each of the membranes through a bottom surface of the substrates.

Abstract translation: 本发明公开了一种在基片上的电光装置支架。 电光装置包括两个面对面独立的膜，每个膜分别支撑在两个键合衬底中的一个上的顶表面附近，用于限定两个膜之间的谐振腔。 每个衬底具有与腔体相对的整个体积部分的整个部分，作为从每个膜通过衬底的底表面延伸的大块微加工开口。

公开(公告)号：US20030045036A1

公开(公告)日：2003-03-06

申请号：US10062774

申请日：2002-02-01

Applicant: INTPAX, Inc.

Inventor： Gaofeng Wang ,  Naiqian Han ,  Liji Huang

IPC: G02B026/00 ,  H01L021/00 ,  H01L021/84

CPC classification number: G02B26/0833 ,  G02B6/122 ,  G02B26/001 ,  G02B2006/12104

Abstract: This invention discloses a configuration of thin-film membrane. This thin-film membrane is freestanding, movable, and made of multiple layers of different materials such as silicon nitride, polycrystalline silicon or the combination of these two. This thin-film membrane can be actuated by external controlling forces such as electrostatic force. This thin-film membrane consists of odd number of layers, e.g., 1 layer, 3 layers, 5 layers, . . . etc. Moreover, the layer profile of this membrane is symmetric, e.g., the bottommost layer is made to be identical to the topmost layer, the next bottommost layer is made to be identical to the next topmost layer, so on and so forth.

Abstract translation: 本发明公开了薄膜的结构。 该薄膜是独立的，可移动的，并且由多层不同的材料制成，例如氮化硅，多晶硅或这两者的组合。 该薄膜可以通过诸如静电力的外部控制力来致动。 该薄膜膜由奇数层组成，例如1层，3层，5层。 。 。 此外，该膜的层轮廓是对称的，例如，最底层与最顶层相同，下一个最下层被制成与下一个最上层相同，等等。

公开(公告)号：US20020110948A1

公开(公告)日：2002-08-15

申请号：US10011350

申请日：2001-11-12

Applicant: INTPAX, Inc.

Inventor： Liji Huang ,  Naiqian Han ,  Yahong Yao ,  Gaofeng Wang

IPC: H01L027/15 ,  H01L031/12 ,  H01L033/00 ,  H01L021/265 ,  H01L021/00

CPC classification number: B81C1/00047 ,  B81B2201/047 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81C1/00571 ,  B81C2201/0109 ,  B81C2201/0136

Abstract: The present invention discloses an electro-optical device support on a substrate. The electro-optical device includes a sacrificial layer disposed on the substrate having a chamber-wall region surrounding and defining an optical chamber. The electro-optical device further includes a membrane layer disposed on top of the sacrificial layer having a chamber-removal opening surrounding and defining an electric tunable membrane for transmitting an optical signal therethrough. The electrically tunable membrane disposed on top of the optical chamber surrounded by the chamber wall regions. The chamber-wall region is doped with iondopants for maintaining the chamber-wall region for removal-resistance under a chamber-forming process performed through the chamber-removal opening. In a preferred embodiment, the chamber-wall region is a doped silicon dioxide region with carbon or nitrogen. In another preferred embodiment, the chamber-wall region is a nitrogen ion-doped SiNxOy region. In another preferred embodiment, the optical chamber is an etched chamber formed by etching through the chamber removal opening for etching off an etch-enhanced region surrounded by an etch-resistant region constituting the chamber wall.

Abstract translation: 本发明公开了一种在基片上的电光装置支架。 电光装置包括设置在基板上的牺牲层，其具有围绕并限定光学室的室壁区域。 电光装置还包括设置在牺牲层顶部的膜层，其具有围绕并限定用于透射光信号的电可调膜的室去除开口。 设置在由室壁区域围绕的光学室的顶部上的电可调膜。 在室壁区域掺杂有离子掺杂剂，用于在通过室去除开口进行的室形成过程中保持室壁区域用于去除电阻。 在优选实施例中，室壁区域是具有碳或氮的掺杂二氧化硅区域。 在另一个优选的实施方案中，室壁区域是氮离子掺杂的SiN x O y区域。 在另一个优选实施例中，光学室是通过蚀刻通过室去除开口形成的蚀刻室，用于蚀刻由构成室壁的耐蚀刻区域围绕的蚀刻增强区域。

公开(公告)号：US20020080465A1

公开(公告)日：2002-06-27

申请号：US10003811

申请日：2001-11-02

Applicant: INTPAX, Inc.

Inventor： Naiqian Han ,  Liji Huang

IPC: G02B026/00 ,  G02F001/03 ,  G02F001/07 ,  G02F001/29 ,  G02B026/08

CPC classification number: G02B26/02 ,  G02B6/266

Abstract: The present invention discloses an optimized optical attenuator device. It includes the design of resonator formed by two identical mirrors, which are made by MEMS process. The structure realizes the minimum insertion loss. The two membranes are chosen to be with high reflection rate. Multiple layer or metal layer or mixture of them can produce membrane of high reflection rate. High reflection rate causes low tuning voltage for one certain attenuation range. To reduce the manufacture error and the cost, the two identical membranes can be formed by bonding two MEMS cells fabricated in the same process face to face. To further reduce the insertion loss, the input mode should match the residual basic mode in the resonator. The basic residual mode is the only one surviving in the resonator. A design of the resonator will guarantee this happen. Ripple is a key specification for present optical component. To achieve very low ripple device, all the interfaces of the MEMS device should be coated with anti-reflection coating. The lower the reflection rate is, the lower the ripple is. Charging will cause the control voltage craze while using the attenuator device. To eliminate the charging effect, the electrode should be attached to the conductive face to face layers during the tuning process, which means between the two electrodes, positive and negative, there should be no dielectric material to trap the charges. However, one or two very thin dielectric layers between the two conductive layer electrodes can improve the electric breakdown voltage. The dielectric material and the thickness are selected without generating severe charging effect, while the safety of MEMS device can be guaranteed. Finally, the device is controlled by a smart control system with the temperature and wavelength compensation functionality. The control system makes the device stable and will keep the attenuation fixed regardless the temperature or wavelength changing. A device should have communication interface with system.

公开(公告)号：US20030156779A1

公开(公告)日：2003-08-21

申请号：US10177505

申请日：2002-06-19

Applicant: INTPAX, Inc.

Inventor： Gaofeng Wang ,  Naiqian Han ,  Liji Huang

IPC: G02B006/26 ,  G02B006/42

CPC classification number: G02B6/12021 ,  G02B6/12033 ,  G02B6/266 ,  G02B6/293 ,  G02B6/29391 ,  G02B6/29395

Abstract: The present invention discloses an optical gain equalization system for receiving and equalizing a multiple-channel input optical signal. The optical gain equalization system includes a cascaded array of tunable optical filters filtering the multiple-channel input optical signal and generating a plurality of sub-signals and a residual signal and each of the sub-signals transmitted over a mutually exclusive filter-specific spectrum-range while a combination of all the filter-specific spectrums dynamically covering the spectral portions of said multi-channel input optical signal where power equalizations are required, and all said filter-specific spectrums together with the residual signal spectrum substantially covering an entire spectral range of the multi-channel input optical signal. The gain equalization system further includes a corresponding array of variable optical attenuators (VOAs) each connected to one of a corresponding tunable optical filter for attenuating the sub-signal transmitted over the filter-specific spectrum range for generating an equalized sub-signal. And, the gain equalization system further includes a multiplexing means for receiving and multiplexing the equalized sub-signals generated by the array of variable optical attenuators (VOAs) and the residual signal for generating an equalized output optical signal.

Abstract translation: 本发明公开了一种用于接收和均衡多通道输入光信号的光增益均衡系统。 光学增益均衡系统包括可调谐滤光器的级联阵列，其对多通道输入光信号进行滤波，并产生多个子信号和残留信号，并且每个子信号通过互斥滤波器特定频谱 - 范围，同时所有滤波器特定频谱的组合动态地覆盖需要功率均衡的所述多信道输入光信号的频谱部分，并且所有所述滤波器特定频谱与残留信号频谱一起基本上覆盖整个频谱范围 多通道输入光信号。 增益均衡系统还包括相应的可变光衰减器阵列（VOA），每个可变光衰减器连接到相应的可调光滤波器之一，用于衰减通过滤波器专用频谱范围传输的子信号，用于产生均衡的子信号。 并且，增益均衡系统还包括多路复用装置，用于接收和复用由可变光衰减器阵列产生的均衡的子信号和用于产生均衡的输出光信号的残余信号。

公开(公告)号：US20030137020A1

公开(公告)日：2003-07-24

申请号：US10165490

申请日：2002-06-07

Applicant: INTPAX, Inc.

Inventor： Naiqian Han ,  Jidong Hou ,  Xiaoping Zhang ,  Liji Huang ,  Gaofeng Wang

IPC: H01L029/82

CPC classification number: H01S5/18366 ,  H01S5/0207

Abstract: The present invention discloses a tunable optical device. The tunable optical device includes a tuning cavity having a tuning means provided for alternately bonding to at least two different tunable optical cells each comprising a tuning membrane wherein the tuning cavity disposed near the tuning membrane for moving the tuning membrane for tuning one of the at least two tunable optical cells bonded thereon. In a preferred embodiment, the tuning cavity further includes a first electrode disposed on the tuning membrane and a second electrode disposed on a substrate supporting the tuning cavity for applying a voltage to move the tuning membrane. In a preferred embodiment, the optical device further includes an optical device control circuit connected to the tuning means for controlling and moving the tuning membrane. In a preferred embodiment, the tuning cavity further includes through hole along an optical path for an optical transmission passing through the tunable membrane for providing an interface-free and ripple-free optical path for the optical transmission. In a preferred embodiment, the tunable optical cells constitute an optical filter for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical attenuator for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical switch for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical dispersion compensator for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the optical device constitutes a micro-electro-mechanical system (MEMS) optical device manufactured by applying a micro-electro-mechanical system (MEMS) technology.

公开(公告)号：US20020054416A1

公开(公告)日：2002-05-09

申请号：US09877367

申请日：2001-06-07

Applicant: INTPAX, Inc.

Inventor： Liji Huang ,  Jian LI ,  Naiqian Han ,  James Yang

IPC: G02F001/03 ,  G02F001/07 ,  G02B026/00

CPC classification number: G02B26/02 ,  G02B26/001

Abstract: The present invention discloses an array of multi-channel optical attenuating devices. This array of multi-channel optical attenuating devices includes this invention discloses an array of multi-channel optical attenuating devices. This array of multi-channel attenuating devices formed as a plurality of electro-optical devices support on a conductive substrate. Each of these electro-optical devices includes a membrane having an optically transparent portion. Each of these electro-optical devices further includes a flexible support for positioning the optically transparent portion of the membrane spaced from the substrate for defining an air gap. The air gap constitutes a cross-shaped gap-chamber having a horizontally and vertically elongated chambers extended from a central intersection area. The central intersection area constitutes an optical active area. Each of these electro-optical devices further includes a voltage bias circuit for applying an electrical bias between the conductive substrate and the membrane to adjust and control an air-gap thickness at the optical active area between the conductive substrate and the membrane. Each of the devices can be individually controlled to accommodate the different wavelength attenuation at each channel required by state-of-the-art optical communication network system. Any desirable numbers of devices forming the array can be manufactured on the same silicon wafer using the same process. Alignment of the array to optical fiber only need to be done on any one of the devices and therefore it significantly reduces the package cost.

Abstract translation: 本发明公开了一种多通道光衰减器件阵列。 这种多通道光衰减器件阵列包括本发明公开了一种多通道光衰减器件阵列。 形成为多个电光器件的多通道衰减器件阵列支撑在导电衬底上。 这些电光装置中的每一个包括具有光学透明部分的膜。 这些电光器件中的每一个还包括柔性支撑件，用于定位膜的光学透明部分与衬底间隔开以限定气隙。 气隙构成十字形间隙室，其具有从中心交叉区域延伸的水平和垂直细长的室。 中心交叉区域构成光学有源区域。 这些电光器件中的每一个还包括用于在导电衬底和膜之间施加电偏压的电压偏置电路，以调节和控制导电衬底和膜之间的光学有源区域处的气隙厚度。 每个设备可以单独控制，以适应最先进的光通信网络系统所需的每个通道的不同波长衰减。 可以使用相同的工艺在同一硅晶片上制造形成阵列的任何期望数量的器件。 阵列与光纤的对准只需要在任何一个器件上完成，因此可显着降低封装成本。