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1.发明授权Wavelength-tunable vertical cavity surface emitting laser for swept source optical coherence tomography system 有权用于扫频源光学相干断层扫描系统的波长可调垂直腔表面发射激光器公开(公告)号：US09203215B2
公开(公告)日：2015-12-01
申请号：US14321792
申请日：2014-07-01
Applicant: Inphenix, Inc.
Inventor： Toshihiko Makino , Tongning Li , David Eu
CPC classification number: H01S5/18366 , G01B9/02004 , G01N21/4795 , H01S5/18311 , H01S5/18369 , H01S5/3412 , H01S5/34313
Abstract: A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) with the use of microelectromechanical system (MEMS) technology is provided as a swept source for Optical Coherence Tomography (OCT). The wavelength-tunable VCSEL comprises a bottom mirror of the VCSEL, an active region, and a MEMS tunable upper mirror movable by electrostatic deflections. The bottom mirror comprising a GaAs based distributed Bragg reflector (DBR) stack, and the active region comprising multiple stacks of GaAs based quantum dot (QD) layers, are epitaxially grown on a GaAs substrate. The MEMS tunable upper mirror includes a membrane part supported by suspension beams, and an upper mirror comprising a dielectric DBR stack. The MEMS tunable quantum dots VCSEL can cover an operating wavelength range of more than 100 nm, preferably with a center wavelength between 250 and 1950 nm, and the sweeping rate can be from a few kHz to hundreds of kHz, and up to a few MHz.
Abstract translation: 提供了使用微机电系统（MEMS）技术的波长可调谐垂直腔表面发射激光器（VCSEL）作为光学相干断层扫描（OCT）的扫描源。 波长可调谐VCSEL包括VCSEL的底部反射镜，有源区域和可由静电偏转移动的MEMS可调谐上镜。 包括GaAs基分布式布拉格反射器（DBR）堆叠的底部反射镜和包含多个基于GaAs的量子点（QD）层的有源区在GaAs衬底上外延生长。 MEMS可调上反射镜包括由悬挂梁支撑的膜部分和包括电介质DBR堆叠的上反射镜。 MEMS可调量子点VCSEL可以覆盖超过100nm的工作波长范围，优选地具有在250和1950nm之间的中心波长，并且扫描速率可以是从几kHz到几百kHz，并且高达几MHz 。
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公开(公告)号：US20170235124A1
公开(公告)日：2017-08-17
申请号：US15583355
申请日：2017-05-01
Applicant: InPhenix, Inc.
Inventor： Mohammad Kamal , Tongning Li , David Eu , Qinian Qi
CPC classification number: G02B26/001 , B81C1/00317 , B81C2201/013 , G02B1/11 , G02B1/12 , H01L33/46 , H01L39/2467 , H01L2924/1461 , H01S3/08027 , H01S3/083 , H01S3/105 , H01S3/1062 , H01S5/141 , H01S5/18366
Abstract: A wavelength tunable gain medium with the use of micro-electromechanical system (MEMS) based Fabry-Perot (FP) filter cavity tuning is provided as a tunable laser. The system comprises a laser cavity and a filter cavity for wavelength selection. The laser cavity consists of a gain medium such as a Semiconductor Optical Amplifier (SOA), two collimating lenses and an end reflector. The MEMS-FP filter cavity comprises a fixed reflector and a moveable reflector, controllable by electrostatic force. By moving the MEMS reflector, the wavelength can be tuned by changing the FP filter cavity length. The MEMS FP filter cavity displacement can be tuned discretely with a step voltage, or continuously by using a continuous driving voltage. The driving frequency for continuous tuning can be a resonance frequency or any other frequency of the MEMS structure, and the tuning range can cover different tuning ranges such as 30 nm, 40 nm, and more than 100 nm.
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3.发明申请WAVELENGTH-TUNABLE VERTICAL CAVITY SURFACE EMITTING LASER FOR SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY SYSTEM 有权波长范围垂直孔表面发射激光，用于开关源光学相干光谱系统公开(公告)号：US20160056613A1
公开(公告)日：2016-02-25
申请号：US14930191
申请日：2015-11-02
Applicant: Inphenix, Inc.
Inventor： Toshihiko Makino , Tongning Li , David Eu
CPC classification number: H01S5/18366 , G01B9/02004 , G01N21/4795 , H01S5/18311 , H01S5/18369 , H01S5/3412 , H01S5/34313
Abstract: A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) with the use of microelectromechanical system (MEMS) technology is provided as a swept source for Optical Coherence Tomography (OCT). The wavelength-tunable VCSEL comprises a bottom mirror of the VCSEL, an active region, and a MEMS tunable upper mirror movable by electrostatic deflections. The bottom mirror comprising a GaAs based distributed Bragg reflector (DBR) stack, and the active region comprising multiple stacks of GaAs based quantum dot (QD) layers, are epitaxially grown on a GaAs substrate. The MEMS tunable upper mirror includes a membrane part supported by suspension beams, and an upper mirror comprising a dielectric DBR stack. The MEMS tunable quantum dots VCSEL can cover an operating wavelength range of more than 100 nm, preferably with a center wavelength between 250 and 1950 nm, and the sweeping rate can be from a few kHz to hundreds of kHz, and up to a few MHz.
Abstract translation: 提供了使用微机电系统（MEMS）技术的波长可调谐垂直腔表面发射激光器（VCSEL）作为光学相干断层扫描（OCT）的扫描源。 波长可调谐VCSEL包括VCSEL的底部反射镜，有源区域和可由静电偏转移动的MEMS可调谐上镜。 包括GaAs基分布式布拉格反射器（DBR）堆叠的底部反射镜和包含多个基于GaAs的量子点（QD）层的有源区在GaAs衬底上外延生长。 MEMS可调上反射镜包括由悬挂梁支撑的膜部分和包括电介质DBR堆叠的上反射镜。 MEMS可调量子点VCSEL可以覆盖超过100nm的工作波长范围，优选地具有在250和1950nm之间的中心波长，并且扫描速率可以是从几kHz到几百kHz，并且高达几MHz 。
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4.发明申请公开(公告)号：US20180048121A1
公开(公告)日：2018-02-15
申请号：US15671564
申请日：2017-08-08
Applicant: Inphenix, Inc.
Inventor： Toshihiko Makino , Tongning Li , David Eu
CPC classification number: H01S5/18366 , G01B9/02004 , G01N21/4795 , H01S5/18311 , H01S5/18369 , H01S5/3412 , H01S5/34313
Abstract: A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) with the use of microelectromechanical system (MEMS) technology is provided as a swept source for Optical Coherence Tomography (OCT). The wavelength-tunable VCSEL comprises a bottom mirror of the VCSEL, an active region, and a MEMS tunable upper mirror movable by electrostatic deflections. The bottom mirror comprising a GaAs based distributed Bragg reflector (DBR) stack, and the active region comprising multiple stacks of GaAs based quantum dot (QD) layers, are epitaxially grown on a GaAs substrate. The MEMS tunable upper mirror includes a membrane part supported by suspension beams, and an upper mirror comprising a dielectric DBR stack. The MEMS tunable quantum dots VCSEL can cover an operating wavelength range of more than 100 nm, preferably with a center wavelength between 250 and 1950 nm, and the sweeping rate can be from a few kHz to hundreds of kHz, and up to a few MHz.
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公开(公告)号：US09762031B2
公开(公告)日：2017-09-12
申请号：US14930191
申请日：2015-11-02
Applicant: Inphenix, Inc.
Inventor： Toshihiko Makino , Tongning Li , David Eu
CPC classification number: H01S5/18366 , G01B9/02004 , G01N21/4795 , H01S5/18311 , H01S5/18369 , H01S5/3412 , H01S5/34313
Abstract: A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) with the use of microelectromechanical system (MEMS) technology is provided as a swept source for Optical Coherence Tomography (OCT). The wavelength-tunable VCSEL comprises a bottom mirror of the VCSEL, an active region, and a MEMS tunable upper mirror movable by electrostatic deflections. The bottom mirror comprising a GaAs based distributed Bragg reflector (DBR) stack, and the active region comprising multiple stacks of GaAs based quantum dot (QD) layers, are epitaxially grown on a GaAs substrate. The MEMS tunable upper mirror includes a membrane part supported by suspension beams, and an upper mirror comprising a dielectric DBR stack. The MEMS tunable quantum dots VCSEL can cover an operating wavelength range of more than 100 nm, preferably with a center wavelength between 250 and 1950 nm, and the sweeping rate can be from a few kHz to hundreds of kHz, and up to a few MHz.
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Patent Agency Ranking
公开(公告)号：US09638913B2
公开(公告)日：2017-05-02
申请号：US14553807
申请日：2014-11-25
Applicant: Inphenix, Inc.
Inventor： Mohammad Kamal , Tongning Li , David Eu , Qinian Qi
CPC classification number: G02B26/001 , B81C1/00317 , B81C2201/013 , G02B1/11 , G02B1/12 , H01L33/46 , H01L39/2467 , H01L2924/1461 , H01S3/08027 , H01S3/083 , H01S3/105 , H01S3/1062 , H01S5/141 , H01S5/18366
Abstract: A wavelength tunable gain medium with the use of micro-electromechanical system (MEMS) based Fabry-Perot (FP) filter cavity tuning is provided as a tunable laser. The system comprises a laser cavity and a filter cavity for wavelength selection. The laser cavity consists of a gain medium such as a Semiconductor Optical Amplifier (SOA), two collimating lenses and an end reflector. The MEMS-FP filter cavity comprises a fixed reflector and a moveable reflector, controllable by electrostatic force. By moving the MEMS reflector, the wavelength can be tuned by changing the FP filter cavity length. The MEMS FP filter cavity displacement can be tuned discretely with a step voltage, or continuously by using a continuous driving voltage. The driving frequency for continuous tuning can be a resonance frequency or any other frequency of the MEMS structure, and the tuning range can cover different tuning ranges such as 30 nm, 40 nm, and more than 100 nm.
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7.发明申请WAVELENGTH-TUNABLE VERTICAL CAVITY SURFACE EMITTING LASER FOR SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY SYSTEM 有权波长范围垂直孔表面发射激光，用于开关源光学相干光谱系统公开(公告)号：US20150010031A1
公开(公告)日：2015-01-08
申请号：US14321792
申请日：2014-07-01
Applicant: Inphenix, Inc.
Inventor： Toshihiko Makino , Tongning Li , David Eu
CPC classification number: H01S5/18366 , G01B9/02004 , G01N21/4795 , H01S5/18311 , H01S5/18369 , H01S5/3412 , H01S5/34313
Abstract: A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) with the use of micro-electromechanical system (MEMS) technology is provided as a swept source for Optical Coherence Tomography (OCT). The wavelength-tunable VCSEL comprises a bottom mirror of the VCSEL, an active region, and a MEMS tunable upper mirror movable by electrostatic deflections. The bottom mirror comprising a GaAs based distributed Bragg reflector (DBR) stack, and the active region comprising multiple stacks of GaAs based quantum dot (QD) layers, are epitaxially grown on a GaAs substrate. The MEMS tunable upper mirror includes a membrane part supported by suspension beams, and an upper mirror comprising a dielectric DBR stack. The MEMS tunable quantum dots VCSEL can cover an operating wavelength range of more than 100 nm, preferably with a center wavelength between 250 and 1950 nm, and the sweeping rate can be from a few kHz to hundreds of kHz, and up to a few MHz.
Abstract translation: 提供了使用微机电系统（MEMS）技术的波长可调谐垂直腔表面发射激光器（VCSEL）作为光学相干断层扫描（OCT）的扫描源。 波长可调谐VCSEL包括VCSEL的底部反射镜，有源区域和可由静电偏转移动的MEMS可调谐上镜。 包括GaAs基分布式布拉格反射器（DBR）堆叠的底部反射镜和包含多个基于GaAs的量子点（QD）层的有源区在GaAs衬底上外延生长。 MEMS可调上反射镜包括由悬挂梁支撑的膜部分和包括电介质DBR堆叠的上反射镜。 MEMS可调量子点VCSEL可以覆盖超过100nm的工作波长范围，优选地具有在250和1950nm之间的中心波长，并且扫描速率可以是从几kHz到几百kHz，并且高达几MHz 。
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公开(公告)号：US10288870B2
公开(公告)日：2019-05-14
申请号：US15583355
申请日：2017-05-01
Applicant: InPhenix, Inc.
Inventor： Mohammad Kamal , Tongning Li , David Eu , Qinian Qi
IPC: G02B26/00 , H01L39/24 , H01S3/08 , H01S3/105 , H01S5/14 , H01S3/106 , B81C1/00 , G02B1/11 , G02B1/12 , H01L33/46 , H01S5/183 , H01S3/083
Abstract: A wavelength tunable gain medium with the use of micro-electromechanical system (MEMS) based Fabry-Perot (FP) filter cavity tuning is provided as a tunable laser. The system comprises a laser cavity and a filter cavity for wavelength selection. The laser cavity consists of a gain medium such as a Semiconductor Optical Amplifier (SOA), two collimating lenses and an end reflector. The MEMS-FP filter cavity comprises a fixed reflector and a moveable reflector, controllable by electrostatic force. By moving the MEMS reflector, the wavelength can be tuned by changing the FP filter cavity length. The MEMS FP filter cavity displacement can be tuned discretely with a step voltage, or continuously by using a continuous driving voltage. The driving frequency for continuous tuning can be a resonance frequency or any other frequency of the MEMS structure, and the tuning range can cover different tuning ranges such as 30 nm, 40 nm, and more than 100 nm.
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9.发明申请公开(公告)号：US20190097394A1
公开(公告)日：2019-03-28
申请号：US16189930
申请日：2018-11-13
Applicant: Inphenix, Inc.
Inventor： Toshihiko Makino , Tongning Li , David Eu
Abstract: A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) with the use of micro-electromechanical system (MEMS) technology is provided as a swept source for Optical Coherence Tomography (OCT). The wavelength-tunable VCSEL comprises a bottom mirror of the VCSEL, an active region, and a MEMS tunable upper mirror movable by electrostatic deflections. The bottom mirror comprising a GaAs based distributed Bragg reflector (DBR) stack, and the active region comprising multiple stacks of GaAs based quantum dot (QD) layers, are epitaxially grown on a GaAs substrate. The MEMS tunable upper mirror includes a membrane part supported by suspension beams, and an upper mirror comprising a dielectric DBR stack. The MEMS tunable quantum dots VCSEL can cover an operating wavelength range of more than 100 nm, preferably with a center wavelength between 250 and 1950 nm, and the sweeping rate can be from a few kHz to hundreds of kHz, and up to a few MHz.
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公开(公告)号：US10128637B2
公开(公告)日：2018-11-13
申请号：US15671564
申请日：2017-08-08
Applicant: Inphenix, Inc.
Inventor： Toshihiko Makino , Tongning Li , David Eu
Abstract: A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) with the use of microelectromechanical system (MEMS) technology is provided as a swept source for Optical Coherence Tomography (OCT). The wavelength-tunable VCSEL comprises a bottom mirror of the VCSEL, an active region, and a MEMS tunable upper mirror movable by electrostatic deflections. The bottom mirror comprising a GaAs based distributed Bragg reflector (DBR) stack, and the active region comprising multiple stacks of GaAs based quantum dot (QD) layers, are epitaxially grown on a GaAs substrate. The MEMS tunable upper mirror includes a membrane part supported by suspension beams, and an upper mirror comprising a dielectric DBR stack. The MEMS tunable quantum dots VCSEL can cover an operating wavelength range of more than 100 nm, preferably with a center wavelength between 250 and 1950 nm, and the sweeping rate can be from a few kHz to hundreds of kHz, and up to a few MHz.
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