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1.发明申请Semiconductor device and method for detecting damaging of a semiconductor device 有权用于检测半导体器件损坏的半导体器件和方法公开(公告)号：US20150253375A1
公开(公告)日：2015-09-10
申请号：US14197564
申请日：2014-03-05
Applicant: Infineon Technologies AG
Inventor： DIRK MEINHOLD
CPC classification number: G01R31/2644 , B81B7/02 , B81B2201/0264 , B81C99/0035 , G01L27/007 , H01L22/30 , H01L22/34
Abstract: A micro-electro-mechanical device comprising a movable structure, wherein the movable structure comprises an test structure changing an electrical characteristic, if the movable structure is damaged.
Abstract translation: 一种包括可移动结构的微机电装置，其中如果可移动结构被损坏，则可移动结构包括改变电特性的测试结构。
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