公开(公告)号：US11703681B2

公开(公告)日：2023-07-18

申请号：US17302938

申请日：2021-05-17

Applicant: Infineon Technologies AG

Inventor： Stephan Gerhard Albert ,  Marten Oldsen

IPC: B81C1/00 ,  G02B26/08 ,  B81B3/00 ,  H01L21/02

CPC classification number: G02B26/0841 ,  B81B3/007 ,  B81B3/0021 ,  B81C1/0019 ,  B81C1/00063 ,  B81C1/00373 ,  B81C1/00682 ,  H01L21/02595 ,  H01L21/02598 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/033

Abstract: A method for producing a MEMS device comprises fabricating a first semiconductor layer and selectively depositing a second semiconductor layer over the first semiconductor layer, wherein the second semiconductor layer comprises a first part composed of monocrystalline semiconductor material and a second part composed of polycrystalline semiconductor material. The method furthermore comprises structuring at least one of the semiconductor layers, wherein the monocrystalline semiconductor material of the first part and underlying material of the first semiconductor layer form a spring element of the MEMS device and the polycrystalline semiconductor material of the second part and underlying material of the first semiconductor layer form at least one part of a comb drive of the MEMS device.

公开(公告)号：US11300778B2

公开(公告)日：2022-04-12

申请号：US16415104

申请日：2019-05-17

Applicant: Infineon Technologies AG

Inventor： Stephan Gerhard Albert ,  Franz Michael Darrer ,  Marcus Edward Hennecke ,  Hendrikus Van Lierop

IPC: G02B26/08 ,  B81C1/00 ,  B81B3/00

Abstract: A MEMS device includes a body pivoting around a pivot axis, a support, and a suspension structure mechanically coupling the body to the support. The suspension structure includes a torsion element defining the pivot axis, and first and second spring elements extending with an angle relative to the pivot axis on opposing sides of the torsion element so that a distance between at least portions of the first and second spring elements is changing in the direction of the pivot axis. The extension of the first and second spring elements in the direction of the pivot axis is larger than the extension of the torsion element in the direction of the pivot axis.

公开(公告)号：US12237840B2

公开(公告)日：2025-02-25

申请号：US17403083

申请日：2021-08-16

Applicant: Infineon Technologies AG

Inventor： Norbert Druml ,  Stephan Gerhard Albert ,  Franz Michael Darrer ,  Philipp Greiner

IPC: G02B26/08 ,  H03B5/32 ,  H03L7/099

Abstract: An oscillator control system includes an oscillator structure configured to oscillate about first and second rotation axes according to a Lissajous pattern, wherein an oscillation about the second rotation axis imparts a cross-coupling error onto an oscillation about the first rotation axis, and wherein the cross-coupling error changes in accordance with a Lissajous position within the Lissajous pattern; and a driver circuit that includes a phase-locked loop (PLL) configured to regulate a driving signal that drives the oscillation about the first rotation axis. The PLL is configured to generate a PLL signal based on a phase error of the oscillation about the first rotation axis. The PLL includes a compensation circuit configured to receive the PLL signal and the Lissajous position within the Lissajous pattern, apply a compensation value to the PLL signal to generate a compensated PLL signal used for generating the driving signal based on the Lissajous position.

公开(公告)号：US12196950B2

公开(公告)日：2025-01-14

申请号：US17220149

申请日：2021-04-01

Applicant: Infineon Technologies AG

Inventor： Han Woong Yoo ,  Stephan Gerhard Albert ,  David Brunner ,  Norbert Druml ,  Selma Karic ,  Leonhard Niedermueller ,  Georg Schitter ,  Richard Schroedter

IPC: G02B26/08 ,  G02B26/10

Abstract: A method of Lissajous scanning includes driving a first oscillator structure about a first rotation axis at a first resonance frequency according to a first driving signal, and driving a second oscillator structure about a second rotation axis at a second resonance frequency according to second driving signal different from the first resonance frequency. The first driving signal has a first low level, a first high level, and a first duty cycle, the combination of which produces the first resonance frequency, and the second driving signal has a second low level, a second high level, and a second duty cycle, the combination of which produces the second resonance frequency. At least one of the second low level, the second high level, and the second duty cycle is different from the first low level, the first high level, and the first duty cycle, respectively.

公开(公告)号：US20230051926A1

公开(公告)日：2023-02-16

申请号：US17403083

申请日：2021-08-16

Applicant: Infineon Technologies AG

Inventor： Norbert Druml ,  Stephan Gerhard Albert ,  Franz Michael Darrer ,  Philipp Greiner

IPC: H03L7/099 ,  G02B26/08 ,  H03B5/32

Abstract: An oscillator control system includes an oscillator structure configured to oscillate about first and second rotation axes according to a Lissajous pattern, wherein an oscillation about the second rotation axis imparts a cross-coupling error onto an oscillation about the first rotation axis, and wherein the cross-coupling error changes in accordance with a Lissajous position within the Lissajous pattern; and a driver circuit that includes a phase-locked loop (PLL) configured to regulate a driving signal that drives the oscillation about the first rotation axis. The PLL is configured to generate a PLL signal based on a phase error of the oscillation about the first rotation axis. The PLL includes a compensation circuit configured to receive the PLL signal and the Lissajous position within the Lissajous pattern, apply a compensation value to the PLL signal to generate a compensated PLL signal used for generating the driving signal based on the Lissajous position.

公开(公告)号：US11835710B2

公开(公告)日：2023-12-05

申请号：US17122300

申请日：2020-12-15

Applicant: Infineon Technologies AG

Inventor： David Brunner ,  Stephan Gerhard Albert ,  Franz Michael Darrer ,  Georg Schitter ,  Richard Schroedter ,  Han Woong Yoo

IPC: G02B26/08 ,  G02B26/10 ,  G01D5/241

CPC classification number: G02B26/0841 ,  G01D5/2417 ,  G02B26/105

Abstract: A scanning system includes a microelectromechanical system (MEMS) scanning structure configured with a desired rotational mode of movement based on a driving signal; a plurality of comb-drives configured to drive the MEMS scanning structure according to the desired rotational mode of movement based on the driving signal, each comb-drive including a rotor comb electrode and a stator comb electrode that form a capacitive element that has a capacitance that depends on the deflection angle of the MEMS scanning structure; a driver configured to generate the at least one driving signal; a sensing circuit selectively coupled to at least a subset of the plurality of comb-drives for receiving sensing signals therefrom, wherein each sensing signal is representative of the capacitance of a corresponding comb-drive; and a processing circuit configured to determine a scanning direction of the MEMS scanning structure in the desired rotational mode of movement based on the sensing signals.

公开(公告)号：US10768410B2

公开(公告)日：2020-09-08

申请号：US16437922

申请日：2019-06-11

Applicant: Infineon Technologies AG

Inventor： Christoph Steiner ,  Stephan Gerhard Albert ,  Franz Michael Darrer ,  Marcus Edward Hennecke ,  Hendrikus Van Lierop ,  Thomas Thurner

IPC: G01L1/14 ,  G02B26/10 ,  H03B5/30 ,  G02B26/08 ,  G01R27/26

Abstract: A device is provided for detecting and/or regulating an amplitude of an oscillation of an oscillatory body about an oscillation axis, wherein a change in a capacitance between at least one electrode of the oscillatory body and a stationary electrode takes place during the oscillation of the oscillatory body. The device comprises a detection circuit for detecting a signal representing a measure of the change in capacitance; and an evaluation circuit for determining information from the signal, wherein the evaluation circuit is designed to calculate the amplitude of the oscillation of the oscillatory body from the determined information and an ascertained period of the oscillation of the oscillatory body and/or to regulate the amplitude of the oscillation of the oscillatory body using the determined information and the ascertained period of the oscillation of the oscillatory body.

公开(公告)号：US20200018948A1

公开(公告)日：2020-01-16

申请号：US16437922

申请日：2019-06-11

Applicant: Infineon Technologies AG

Inventor： Christoph Steiner ,  Stephan Gerhard Albert ,  Franz Michael Darrer ,  Marcus Edward Hennecke ,  Hendrikus Van Lierop ,  Thomas Thurner

IPC: G02B26/08 ,  G02B26/10 ,  G01R27/26

Abstract: A device is provided for detecting and/or regulating an amplitude of an oscillation of an oscillatory body about an oscillation axis, wherein a change in a capacitance between at least one electrode of the oscillatory body and a stationary electrode takes place during the oscillation of the oscillatory body. The device comprises a detection circuit for detecting a signal representing a measure of the change in capacitance; and an evaluation circuit for determining information from the signal, wherein the evaluation circuit is designed to calculate the amplitude of the oscillation of the oscillatory body from the determined information and an ascertained period of the oscillation of the oscillatory body and/or to regulate the amplitude of the oscillation of the oscillatory body using the determined information and the ascertained period of the oscillation of the oscillatory body.