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公开(公告)号:US20230320057A1
公开(公告)日:2023-10-05
申请号:US17711875
申请日:2022-04-01
Applicant: Intel Corporation
Inventor: Clifford Ong , Leonard Guler , Mohit Haran , Smita Shridharan , Reken Patel , Charles Wallace , Chanaka Munasinghe , Pratik Patel
IPC: H01L27/11 , H01L27/02 , G11C11/412 , H01L21/768 , H01L23/522 , H01L29/423
CPC classification number: H01L27/1104 , H01L27/0207 , G11C11/412 , H01L21/76877 , H01L23/5226 , H01L29/42392
Abstract: Integrated circuit (IC) devices include transistors with gate, source and drain contact metallization, some of which are jumpered together by a metallization that is recessed below a height of other metallization that is not jumpered. The jumper metallization may provide a local interconnect between terminals of one transistor or adjacent transistors, for example between a gate of one transistor and a source/drain of another transistor. The jumper metallization may not induce the same pitch constraints faced by interconnect line metallization levels employed for more general interconnection. In some examples, a static random-access memory (SRAM) bit-cell includes a jumper metallization joining two transistors of the cell to reduce cell height for a given feature patterning capability.
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公开(公告)号:US20240404917A1
公开(公告)日:2024-12-05
申请号:US18204864
申请日:2023-06-01
Applicant: Intel Corporation
Inventor: Sikandar Abbas , Chanaka Munasinghe , Leonard Guler , Reza Bayati , Madeleine Stolt , Makram Abd El Qader , Pratik Patel , Anindya Dasgupta
IPC: H01L23/48 , H01L21/768 , H01L23/528
Abstract: Devices, transistor structures, systems, and techniques are described herein related to coupling backside and frontside metallization layers that are on opposite sides of a device layer. A device includes a transistor having semiconductor structures extending between a source and a drain, and a gate between the source and drain, a bridge via extending between a frontside metallization over the transistor and a backside metallization below the transistor, and a thin insulative liner between the bridge via and components of the transistor.
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