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公开(公告)号:US20240071848A1
公开(公告)日:2024-02-29
申请号:US17895916
申请日:2022-08-25
Applicant: Intel Corporation
Inventor: Bohan SHAN , Haobo CHEN , Brandon C. MARIN , Srinivas V. PIETAMBARAM , Bai NIE , Gang DUAN , Kyle ARRINGTON , Ziyin LIN , Hongxia FENG , Yiqun BAI , Xiaoying GUO , Dingying David XU , Jeremy D. ECTON , Kristof DARMAWIKARTA , Suddhasattwa NAD
IPC: H01L23/15 , H01L21/48 , H01L23/498
CPC classification number: H01L23/15 , H01L21/486 , H01L23/49816 , H01L23/49827
Abstract: Embodiments disclosed herein include package substrates. In an embodiment, the package substrate comprises a core, where the core comprises glass. In an embodiment, a first layer is under the core, a second layer is over the core, and a via is through the core, the first layer, and the second layer. In an embodiment a width of the via through the core is equal to a width of the via through the first layer and the second layer. In an embodiment, the package substrate further comprises a first pad under the via, and a second pad over the via.
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公开(公告)号:US20230137877A1
公开(公告)日:2023-05-04
申请号:US17517152
申请日:2021-11-02
Applicant: Intel Corporation
Inventor: Bohan SHAN , Haobo CHEN , Omkar KARHADE , Malavarayan SANKARASUBRAMANIAN , Dingying XU , Gang DUAN , Bai NIE , Xiaoying GUO , Kristof DARMAWIKARTA , Hongxia FENG , Srinivas PIETAMBARAM , Jeremy D. ECTON
IPC: H01L23/00 , H01L25/065
Abstract: No-remelt solder joints can eliminate die or substrate movement in downstream reflow processes. In one example, one or more solder joints between two substrates can be formed as full IMC (intermetallic compound) solder joints. In one example, a full IMC solder joint includes a continuous layer (e.g., from the top pad to bottom pad) of intermetallic compounds. In one example, a full IMC joint can be formed by dispensing a no-remelt solder paste on some of the pads of one or both substrates to be bonded together.
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公开(公告)号:US20250106983A1
公开(公告)日:2025-03-27
申请号:US18373457
申请日:2023-09-27
Applicant: Intel Corporation
Inventor: Bohan SHAN , Kyle ARRINGTON , Dingying David XU , Ziyin LIN , Timothy GOSSELIN , Elah BOZORG-GRAYELI , Aravindha ANTONISWAMY , Wei LI , Haobo CHEN , Yiqun BAI , Jose WAIMIN , Ryan CARRAZZONE , Hongxia FENG , Srinivas Venkata Ramanuja PIETAMBARAM , Gang DUAN , Bin MU , Mohit GUPTA , Jeremy D. ECTON , Brandon C. MARIN , Xiaoying GUO , Ashay DANI
Abstract: Embodiments disclosed herein include glass core package substrates with a stiffener. In an embodiment, an apparatus comprises a substrate with a first layer with a first width, where the first layer is a glass layer, a second layer under the first layer, where the second layer has a second width that is smaller than the first width, and a third layer over the first layer, where the third layer has a third width that is smaller than the first width. In an embodiment, the apparatus further comprises a metallic structure with a first portion and a second portion, where the first portion is over a top surface of the substrate and the second portion extends away from the first portion and covers at least a sidewall of the first layer.
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公开(公告)号:US20240332125A1
公开(公告)日:2024-10-03
申请号:US18128848
申请日:2023-03-30
Applicant: Intel Corporation
Inventor: Kyle ARRINGTON , Clay ARRINGTON , Bohan SHAN , Haobo CHEN , Srinivas V. PIETAMBARAM , Gang DUAN , Ziyin LIN , Hongxia FENG , Yiqun BAI , Xiaoying GUO , Dingying XU , Bai NIE
IPC: H01L23/373 , H01L21/48 , H01L23/24 , H01L23/498
CPC classification number: H01L23/3737 , H01L21/4857 , H01L21/486 , H01L23/24 , H01L23/49822 , H01L23/49827
Abstract: Embodiments disclosed herein include a package substrate. In an embodiment, the package substrate comprises a first layer and a second layer over the first layer. In an embodiment, the second layer comprises a dielectric material including sulfur. In an embodiment, fillers are within the second layer. In an embodiment, the fillers have a volume fraction that is less than approximately 0.2.
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公开(公告)号:US20240222130A1
公开(公告)日:2024-07-04
申请号:US18091026
申请日:2022-12-29
Applicant: Intel Corporation
Inventor: Shaojiang CHEN , Jeremy D. ECTON , Oladeji FADAYOMI , Hsin-Wei WANG , Changhua LIU , Bin MU , Hongxia FENG , Brandon C. MARIN , Srinivas V. PIETAMBARAM
IPC: H01L21/306 , H01L21/321 , H01L21/48 , H01L21/768
CPC classification number: H01L21/30604 , H01L21/3212 , H01L21/486 , H01L21/7688 , H01L21/76898 , H01L21/268
Abstract: Embodiments disclosed herein include electronic packages and methods of forming electronic packages. In an embodiment, an electronic package comprises a core, where the core comprises glass. In an embodiment, a through glass via (TGV) is provided through a thickness of the core. In an embodiment, the TGV comprises a top surface that is non-planar and includes a symmetric ridge on the non-planar top surface.
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公开(公告)号:US20240088052A1
公开(公告)日:2024-03-14
申请号:US18513015
申请日:2023-11-17
Applicant: Intel Corporation
Inventor: Bai NIE , Gang DUAN , Srinivas PIETAMBARAM , Jesse JONES , Yosuke KANAOKA , Hongxia FENG , Dingying XU , Rahul MANEPALLI , Sameer PAITAL , Kristof DARMAWIKARTA , Yonggang LI , Meizi JIAO , Chong ZHANG , Matthew TINGEY , Jung Kyu HAN , Haobo CHEN
CPC classification number: H01L23/5389 , H01L21/4853 , H01L21/4857 , H01L21/565 , H01L21/78 , H01L23/3121 , H01L23/5381 , H01L23/5383 , H01L23/5386 , H01L23/562 , H01L24/19 , H01L24/20 , H01L2224/214 , H01L2924/3511 , H01L2924/381
Abstract: A die assembly is disclosed. The die assembly includes a die, one or more die pads on a first surface of the die and a die attach film on the die where the die attach film includes one or more openings that expose the one or more die pads and that extend to one or more edges of the die.
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公开(公告)号:US20250149433A1
公开(公告)日:2025-05-08
申请号:US19018705
申请日:2025-01-13
Applicant: Intel Corporation
Inventor: Hongxia FENG , Dingying David XU , Sheng C. LI , Matthew L. TINGEY , Meizi JIAO , Chung Kwang Christopher TAN
IPC: H01L23/498 , H01L21/48 , H01L23/13 , H01L23/538
Abstract: A package substrate and package assembly including a package substrate including a substrate body including electrical routing features therein and a surface layer and a plurality of first and second contact points on the surface layer including a first pitch and a second pitch, respectively, wherein the plurality of first contact points and the plurality of second contact points are continuous posts to the respective ones of the electrical routing features. A method including forming first conductive vias in a package assembly, wherein the first conductive vias include substrate conductive vias to electrical routing features in a package substrate and bridge conductive vias to bridge surface routing features of a bridge substrate; forming a first surface layer and a second surface layer on the package substrate; and forming second conductive vias through each of the first surface layer and the second surface layer to the bridge conductive vias.
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公开(公告)号:US20230090350A1
公开(公告)日:2023-03-23
申请号:US17478439
申请日:2021-09-17
Applicant: Intel Corporation
Inventor: Kyle MCELHINNY , Haobo CHEN , Hongxia FENG , Xiaoying GUO , Leonel ARANA
IPC: H01L23/538 , H01L23/498 , H01L21/48 , H01L25/065 , H01L23/00
Abstract: Embodiments disclosed herein include electronic packages. In an embodiment, the electronic package comprises a package substrate, and a first pad over the package substrate. In an embodiment, a layer is over the package substrate, where the layer is an insulating material. In an embodiment, the electronic package further comprises a via through the layer and in contact with the first pad. In an embodiment a first end of the via has a first width and a second end of the via that is in contact with the first pad has a second width that is larger than the first width. In an embodiment, the electronic package further comprises a second pad over the via.
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公开(公告)号:US20220310518A1
公开(公告)日:2022-09-29
申请号:US17213147
申请日:2021-03-25
Applicant: Intel Corporation
Inventor: Haobo CHEN , Xiaoying GUO , Hongxia FENG , Kristof DARMAWIKARTA , Bai NIE , Tarek A. IBRAHIM , Gang DUAN , Jeremy D. ECTON , Sheng C. LI , Leonel ARANA
IPC: H01L23/538 , H01L23/498 , H01L23/00 , H01L21/48
Abstract: Embodiments disclosed herein include a multi-die packages with an embedded bridge and a thinned surface. In an example, a multi-die interconnect structure includes a package substrate having a cavity. A bridge die is in the cavity of the package substrate, the bridge die including silicon. A dielectric material is over the package substrate, over the bridge die, and in the cavity. A plurality of conductive bond pads is on the dielectric material. The multi-die interconnect structure further includes a plurality of conductive pillars, individual ones of the plurality of conductive pillars on a corresponding one of the plurality of conductive bond pads. A solder resist material is on the dielectric material, on exposed portions of the plurality of conductive bond pads, and laterally surrounding the plurality of conductive pillars. The plurality of conductive pillars has a top surface above a top surface of the solder resist material.
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公开(公告)号:US20210318612A1
公开(公告)日:2021-10-14
申请号:US17356536
申请日:2021-06-24
Applicant: Intel Corporation
Inventor: Hongxia FENG , Changhua LIU , Bohan SHAN , Dingying XU , Leonel ARANA , Manuel GADOGBE , Matthew TINGEY , Julianne TROIANO
Abstract: The present disclosure is directed to a patterning process that includes providing a composite dry film resist on a surface, in which the composite dry film resist includes a base film, a barrier layer and a resist layer, in which the base film is disposed over the barrier layer and the barrier layer is disposed over the resist layer. In another aspect, the patterning process includes removing the base film from the barrier layer and exposing the barrier layer to form an exposure precursor, which has a first area and a second area, further exposing the first area of the exposure precursor to electromagnetic irradiation, which passes through the barrier layer and the resist layer in the exposed first area becomes water-insoluble, and removing the barrier layer and the unexposed second area to form a pattern template.
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