NEW METHOD TO ENABLE 30 MICRONS PITCH EMIB OR BELOW

    公开(公告)号:US20250149433A1

    公开(公告)日:2025-05-08

    申请号:US19018705

    申请日:2025-01-13

    Abstract: A package substrate and package assembly including a package substrate including a substrate body including electrical routing features therein and a surface layer and a plurality of first and second contact points on the surface layer including a first pitch and a second pitch, respectively, wherein the plurality of first contact points and the plurality of second contact points are continuous posts to the respective ones of the electrical routing features. A method including forming first conductive vias in a package assembly, wherein the first conductive vias include substrate conductive vias to electrical routing features in a package substrate and bridge conductive vias to bridge surface routing features of a bridge substrate; forming a first surface layer and a second surface layer on the package substrate; and forming second conductive vias through each of the first surface layer and the second surface layer to the bridge conductive vias.

    LITHOGRAPHY PILLAR PROCESS FOR EMBEDDED BRIDGE SCALING

    公开(公告)号:US20230090350A1

    公开(公告)日:2023-03-23

    申请号:US17478439

    申请日:2021-09-17

    Abstract: Embodiments disclosed herein include electronic packages. In an embodiment, the electronic package comprises a package substrate, and a first pad over the package substrate. In an embodiment, a layer is over the package substrate, where the layer is an insulating material. In an embodiment, the electronic package further comprises a via through the layer and in contact with the first pad. In an embodiment a first end of the via has a first width and a second end of the via that is in contact with the first pad has a second width that is larger than the first width. In an embodiment, the electronic package further comprises a second pad over the via.

    EMBEDDED BRIDGE ARCHITECTURE WITH THINNED SURFACE

    公开(公告)号:US20220310518A1

    公开(公告)日:2022-09-29

    申请号:US17213147

    申请日:2021-03-25

    Abstract: Embodiments disclosed herein include a multi-die packages with an embedded bridge and a thinned surface. In an example, a multi-die interconnect structure includes a package substrate having a cavity. A bridge die is in the cavity of the package substrate, the bridge die including silicon. A dielectric material is over the package substrate, over the bridge die, and in the cavity. A plurality of conductive bond pads is on the dielectric material. The multi-die interconnect structure further includes a plurality of conductive pillars, individual ones of the plurality of conductive pillars on a corresponding one of the plurality of conductive bond pads. A solder resist material is on the dielectric material, on exposed portions of the plurality of conductive bond pads, and laterally surrounding the plurality of conductive pillars. The plurality of conductive pillars has a top surface above a top surface of the solder resist material.

    COMPOSITE DRY FILM RESIST FOR PHOTOLITHOGRAPHY

    公开(公告)号:US20210318612A1

    公开(公告)日:2021-10-14

    申请号:US17356536

    申请日:2021-06-24

    Abstract: The present disclosure is directed to a patterning process that includes providing a composite dry film resist on a surface, in which the composite dry film resist includes a base film, a barrier layer and a resist layer, in which the base film is disposed over the barrier layer and the barrier layer is disposed over the resist layer. In another aspect, the patterning process includes removing the base film from the barrier layer and exposing the barrier layer to form an exposure precursor, which has a first area and a second area, further exposing the first area of the exposure precursor to electromagnetic irradiation, which passes through the barrier layer and the resist layer in the exposed first area becomes water-insoluble, and removing the barrier layer and the unexposed second area to form a pattern template.

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