公开(公告)号：US20190025056A1

公开(公告)日：2019-01-24

申请号：US15657054

申请日：2017-07-21

Applicant: InvenSense, Inc.

Inventor： Kevin Hughes ,  Joseph Seeger ,  Karthik Vijayraghavan

IPC: G01C19/5712 ,  G01P15/125 ,  B81B7/00

Abstract: A MEMS sensor has a proof mass, a sense electrode, and a shield. At least a portion of the proof mass and shield may form a capacitor that causes an offset movement of the proof mass. A series of test values may be provided in order to minimize the offset movement or compensate for the offset movement. In some embodiments, the shield voltage may be modified to reduce the offset movement. Residual offsets due to other factors may also be determined and utilized for compensation to reduce an offset error in a sensed signal.