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    Method for open-loop compensation of a MEMS gyroscope
    1.
    发明授权
    Method for open-loop compensation of a MEMS gyroscope 有权

    公开(公告)号：US10921124B2

    公开(公告)日：2021-02-16

    申请号：US16379555

    申请日：2019-04-09

    Applicant: InvenSense, Inc.

    Inventor： Kevin Hughes

    IPC: G01C19/00 ,  G01C19/5712 ,  G01C19/5776

    Abstract: A circuit comprising a microelectromechanical (MEMS) gyroscope and a gain circuit coupled with the MEMS gyroscope. The gain circuit is configured to receive a digitized drive signal based at least in part on a digitized drive voltage amplitude of the MEMS gyroscope. The gain circuit is also configured to determine a percentage change in quality factor of the MEMS gyroscope based at least in part on the digitized drive signal and a stored trim value of the MEMS gyroscope. The gain circuit is also configured to compensate for an effect of a change in the quality factor of the MEMS gyroscope based at least in part on the percentage change in quality factor.

    ELECTROSTATIC OFFSET CORRECTION
    2.
    发明申请
    ELECTROSTATIC OFFSET CORRECTION 审中-公开

    公开(公告)号：US20190025056A1

    公开(公告)日：2019-01-24

    申请号：US15657054

    申请日：2017-07-21

    Applicant: InvenSense, Inc.

    Inventor： Kevin Hughes ,  Joseph Seeger ,  Karthik Vijayraghavan

    IPC: G01C19/5712 ,  G01P15/125 ,  B81B7/00

    Abstract: A MEMS sensor has a proof mass, a sense electrode, and a shield. At least a portion of the proof mass and shield may form a capacitor that causes an offset movement of the proof mass. A series of test values may be provided in order to minimize the offset movement or compensate for the offset movement. In some embodiments, the shield voltage may be modified to reduce the offset movement. Residual offsets due to other factors may also be determined and utilized for compensation to reduce an offset error in a sensed signal.

    REAL-TIME ISOLATION OF SELF-TEST AND LINEAR ACCELERATION SIGNALS
    4.
    发明申请
    REAL-TIME ISOLATION OF SELF-TEST AND LINEAR ACCELERATION SIGNALS 有权

    公开(公告)号：US20210364546A1

    公开(公告)日：2021-11-25

    申请号：US16881732

    申请日：2020-05-22

    Applicant: INVENSENSE, INC.

    Inventor： Kevin Hughes ,  Giacomo Laghi ,  Vito Avantaggiati

    IPC: G01P21/00 ,  G01P15/125

    Abstract: A MEMS accelerometer includes proof masses that move in-phase in response to a sensed linear acceleration. Self-test drive circuitry imparts an out-of-phase movement onto the proof masses. The motion of the proof masses in response to the linear acceleration and the self-test movement is sensed as a sense signal on common sense electrodes. Processing circuitry extracts from a linear acceleration signal corresponding to the in-phase movement due to linear acceleration and a self-test signal corresponding to the out-of-phase movement due to the self-test drive signal.

    Compensating circuit for a microelectromechanical (MEMS) resonator
    7.
    发明授权
    Compensating circuit for a microelectromechanical (MEMS) resonator 有权

    公开(公告)号：US10302432B2

    公开(公告)日：2019-05-28

    申请号：US15134131

    申请日：2016-04-20

    Applicant: InvenSense, Inc.

    Inventor： Kevin Hughes

    IPC: G01C19/00 ,  G01C19/5712 ,  G01C19/5776

    Abstract: A circuit comprising a microelectromechanical (MEMS) gyroscope and a gain circuit coupled with the MEMS gyroscope. The gain circuit is configured to receive a digitized drive signal based at least in part on a digitized drive voltage amplitude of the MEMS gyroscope. The gain circuit is also configured to determine a percentage change in quality factor of the MEMS gyroscope based at least in part on the digitized drive signal and a stored trim value of the MEMS gyroscope. The gain circuit is also configured to compensate for an effect of a change in the quality factor of the MEMS gyroscope based at least in part on the percentage change in quality factor.

    REAL-TIME ISOLATION OF SELF-TEST AND LINEAR ACCELERATION SIGNALS
    8.
    发明申请
    REAL-TIME ISOLATION OF SELF-TEST AND LINEAR ACCELERATION SIGNALS 有权

    公开(公告)号：US20220229086A1

    公开(公告)日：2022-07-21

    申请号：US17695077

    申请日：2022-03-15

    Applicant: INVENSENSE, INC.

    Inventor： Kevin Hughes ,  Giacomo Laghi ,  Vito Avantaggiati

    IPC: G01P21/00 ,  G01P15/125

    Abstract: A MEMS accelerometer includes proof masses that move in-phase in response to a sensed linear acceleration. Self-test drive circuitry imparts an out-of-phase movement onto the proof masses. The motion of the proof masses in response to the linear acceleration and the self-test movement is sensed as a sense signal on common sense electrodes. Processing circuitry extracts from a linear acceleration signal corresponding to the in-phase movement due to linear acceleration and a self-test signal corresponding to the out-of-phase movement due to the self-test drive signal.

    Real-time isolation of self-test and linear acceleration signals
    9.
    发明授权
    Real-time isolation of self-test and linear acceleration signals 有权

    公开(公告)号：US11307218B2

    公开(公告)日：2022-04-19

    申请号：US16881732

    申请日：2020-05-22

    Applicant: INVENSENSE, INC.

    Inventor： Kevin Hughes ,  Giacomo Laghi ,  Vito Avantaggiati

    IPC: G01P21/00 ,  G01P15/125 ,  G01P15/08

    Abstract: A MEMS accelerometer includes proof masses that move in-phase in response to a sensed linear acceleration. Self-test drive circuitry imparts an out-of-phase movement onto the proof masses. The motion of the proof masses in response to the linear acceleration and the self-test movement is sensed as a sense signal on common sense electrodes. Processing circuitry extracts from a linear acceleration signal corresponding to the in-phase movement due to linear acceleration and a self-test signal corresponding to the out-of-phase movement due to the self-test drive signal.

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