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公开(公告)号：US20230273025A1
公开(公告)日：2023-08-31
申请号：US17680637
申请日：2022-02-25
Applicant: INVENSENSE, INC.
Inventor： Vadim Tsinker , Frederico Mazzarella , Ali Shirvani
IPC: G01C19/5776 , H03M1/12 , H03M1/38 , G01P15/08
CPC classification number: G01C19/5776 , H03M1/1245 , H03M1/38 , G01P15/08 , G01P15/125
Abstract: A round robin sensor device for processing sensor data is provided herein. The sensor device includes a multiplexer stage configured to sequentially select sensor outputs from one or more sensors continuously. Continuously and sequentially selecting sensor outputs results in a stream of selected sensor outputs. The sensor device also includes a charge-to-voltage converter operatively coupled to the multiplexer stage and configured to convert a charge from a first sensor of the one or more sensors to a voltage. Further, the sensor device includes a resettable integrator operatively coupled to the charge-to-voltage converter and configured to demodulate and integrate the voltage, resulting in an integrated voltage. Also included in the sensor device is an analog-to-digital converter operatively coupled to the resettable integrator and configured to digitize the integrated voltage to a digital code.
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公开(公告)号：US10574259B2
公开(公告)日：2020-02-25
申请号：US15723814
申请日：2017-10-03
Applicant: InvenSense, Inc.
Inventor： Du Chen , Vadim Tsinker , Stanley Bo-Ting Wang
Abstract: A system includes a sensor device, a circuit driving he sensor device at a drive frequency, a receiver, and a low pass filter. The sensor device is configured to change its electrical characteristics in response to external stimuli. The sensor device generates a modulated signal proportional to the external stimuli. The receiver is configured to receive the modulated signal and further configured to demodulate the modulated signal to generate a demodulated signal. The demodulation signal has a guard band. The receiver consumes power responsive to receiving the modulated signal. The low pass filter is configured to receive the demodulated signal and further configured to generate a sensor output.
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公开(公告)号：US20250119104A1
公开(公告)日：2025-04-10
申请号：US18483661
申请日：2023-10-10
Applicant: InvenSense, Inc.
Inventor： Vadim Tsinker
Abstract: A microelectromechanical system (MEMS) gyroscope includes a MEMS structure that outputs a capacitive signal that includes both a Coriolis signal used to determine an angular velocity and a quadrature signal 90 degrees out-of-phase with the Coriolis signal. A capacitance to voltage (C2V) amplifier receives and amplifies the capacitive signal for further processing. Quadrature cancellation circuitry processes the output of the C2V amplifier to isolate the quadrature signal and generate a signal to control variable capacitors coupled to the C2V amplifier input in a manner that removes the quadrature signal from the C2V amplifier output.
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公开(公告)号：US11174153B2
公开(公告)日：2021-11-16
申请号：US16547275
申请日：2019-08-21
Applicant: INVENSENSE, INC.
Inventor： Ilya Gurin , Matthew Julian Thompson , Vadim Tsinker
IPC: B81B7/00
Abstract: A microelectromechanical (MEMS) device may be coupled to a dielectric material at an upper planar surface or lower planar surface of the MEMS device. One or more temperature sensors may be attached to the dielectric material layer. Signals from the one or more temperature sensors may be used to determine a thermal gradient along on axis that is normal to the upper planar surface and the lower planar surface. The thermal gradient may be used to compensate for values measured by the MEMS device.
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公开(公告)号：US20200264210A1
公开(公告)日：2020-08-20
申请号：US16794952
申请日：2020-02-19
Applicant: INVENSENSE, INC.
Inventor： Sriraman Dakshinamurthy , Vadim Tsinker , Matthew Julian Thompson
Abstract: A MEMS accelerometer includes a suspended spring-mass system that has a frequency response to accelerations experienced over a range of frequencies. The components of the suspended spring-mass system such as the proof masses respond to acceleration in a substantially uniform manner at frequencies that fall within a designed bandwidth for the MEMS accelerometer. Digital compensation circuitry compensates for motion of the proof masses outside of the designed bandwidth, such that the functional bandwidth of the MEMS accelerometer is significantly greater than the designed bandwidth.
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Patent Agency Ranking
公开(公告)号：US20250080130A1
公开(公告)日：2025-03-06
申请号：US18240514
申请日：2023-08-31
Applicant: InvenSense, Inc.
Inventor： Vadim Tsinker
IPC: H03M1/38
Abstract: A continuous time reconfigurable integrator is dynamically reconfigurable to facilitate real time high-resolution modification of the integrator output signal. An initial output of the integrator is evaluated to generate a coarse estimate which is then used to modify capacitive inputs to the integrator, which result in the output of a residue signal. The initial and residue outputs are individually processed by an analog-to-digital converter (ADC), such as a successive-approximation-register ADC, and digitally combined.
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公开(公告)号：US20250070735A1
公开(公告)日：2025-02-27
申请号：US18237533
申请日：2023-08-24
Applicant: InvenSense, Inc.
Inventor： Federico Mazzarella , Vadim Tsinker
Abstract: In a microelectromechanical system (MEMS) sensor, movement of a component such as a proof mass due to a force of interest is sensed capacitively. A capacitance-to-voltage (C2V) converter receives a capacitance signal from the sensor and outputs a signal that includes an offset in addition to a signal of interest. The output signal is analyzed to identify the offset portion of the output signal and to modify values one or more variable capacitors coupled to the C2V input reduce the offset portion of the output signal.
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公开(公告)号：US11548780B2
公开(公告)日：2023-01-10
申请号：US17516245
申请日：2021-11-01
Applicant: INVENSENSE, INC.
Inventor： David deKoninck , Varun Subramaniam Kumar , Matthew Julian Thompson , Vadim Tsinker , Logeeswaran Veerayah Jayaraman , Sarah Nitzan , Houri Johari-Galle , Jongwoo Shin , Le Jin
Abstract: An exemplary microelectromechanical device includes a MEMS layer, portions of which respond to an external force in order to measure the external force. A substrate layer is located below the MEMS layer and an anchor couples the substrate layer and MEMS layer to each other. A plurality of temperature sensors are located within the substrate layer to identify a temperature gradient being experienced by the MEMS device. Compensation is performed or operations of the MEMS device are modified based on temperature gradient.
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公开(公告)号：US11186479B2
公开(公告)日：2021-11-30
申请号：US16547257
申请日：2019-08-21
Applicant: INVENSENSE, INC.
Inventor： David deKoninck , Varun Subramaniam Kumar , Matthew Julian Thompson , Vadim Tsinker , Logeeswaran Veerayah Jayaraman , Sarah Nitzan , Houri Johari-Galle , Jongwoo Shin , Le Jin
Abstract: An exemplary microelectromechanical device includes a MEMS layer, portions of which respond to an external force in order to measure the external force. A substrate layer is located below the MEMS layer and an anchor couples the substrate layer and MEMS layer to each other. A plurality of temperature sensors are located within the substrate layer to identify a temperature gradient being experienced by the MEMS device. Compensation is performed or operations of the MEMS device are modified based on temperature gradient.
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公开(公告)号：US20200300887A1
公开(公告)日：2020-09-24
申请号：US16824161
申请日：2020-03-19
Applicant: INVENSENSE, INC.
Inventor： Sriraman Dakshinamurthy , Matthew Julian Thompson , Vadim Tsinker
IPC: G01P21/00 , G01P15/08 , G01P15/125
Abstract: A method of measuring noise of an accelerometer can comprise exposing the accelerometer comprising a micro-electro-mechanical system (MEMS) component coupled to an application specific integrated circuit component (ASIC), to an external environmental input, with the MEMS component being configured to provide a first output to the ASIC based on the external environmental input. The method can further comprise estimating a first noise generated by operation of the MEMS component, and replacing the first output provided to the ASIC from the MEMS component, with a second output generated by a MEMS emulator component, with the second output comprising the first noise. Further, the method can include generating an output of the accelerometer based on the second output processed by the ASIC.
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