公开(公告)号：US20250164520A1

公开(公告)日：2025-05-22

申请号：US18896555

申请日：2024-09-25

Applicant: InvenSense, Inc.

Inventor： Xian HUANG ,  Varun Subramaniam Kumar ,  Eric Lautenschlager ,  Matthew Julian Thompson ,  Mrigank Sharma ,  Wenting Gu

IPC: G01P15/08

Abstract: A microelectromechanical system (MEMS) accelerometer includes a proof mass that translates outside of a MEMS device plane in response to a force of interest such as a z-axis linear acceleration. The proof mass is a component of a suspended spring-mass system that is anchored to both a cover substrate layer and a base substrate layer by an anchoring system. The anchoring system includes a central anchor that is mechanically anchored to only the cover layer, while two adjacent anchors are located at opposite sides of the central anchor and are anchored to at least the base substrate and have an electrical connection to processing circuitry of the base substrate. Compliant springs connect the central anchor to the two adjacent anchors in a manner such that the anchoring system absorbs applied stresses such as shear forces applied during system packaging, assembly, and during use in an end product.