公开(公告)号：US09797046B2

公开(公告)日：2017-10-24

申请号：US14396462

申请日：2013-04-25

Applicant: Japan Science and Technology Agency

Inventor： Takatoki Yamamoto ,  Ryuji Hatsuki

IPC: H01L21/302 ,  C23F1/02 ,  H01L21/3213 ,  C09K13/00 ,  C23F1/16 ,  C23F3/03 ,  C23F3/06

CPC classification number: C23F1/02 ,  C09K13/00 ,  C23F1/16 ,  C23F3/03 ,  C23F3/06 ,  H01L21/32134

Abstract: Provided are a method for etching a metal or metal oxide without using a reagent, etc., that affects the environment, a method for smoothing a surface of a metal or metal oxide on an atomic level, and a method for patterning on an atomic level. Etching of a metal or metal oxide, or smoothing of a surface of a metal or metal oxide is possible using ozone water in which only ozone is dissolved. Patterning can also be performed by providing a metal that does not dissolve in the ozone water as a resist on a metal or metal oxide that can be etched by ozone water in which only ozone is dissolved, and etching using the ozone water.

公开(公告)号：US20150129543A1

公开(公告)日：2015-05-14

申请号：US14396462

申请日：2013-04-25

Applicant: Japan Science and Technology Agency

Inventor： Takatoki Yamamoto ,  Ryuji Hatsuki

IPC: C23F1/02

CPC classification number: C23F1/02 ,  C09K13/00 ,  C23F1/16 ,  C23F3/03 ,  C23F3/06 ,  H01L21/32134

Abstract: Provided are a method for etching a metal or metal oxide without using a reagent, etc., that affects the environment, a method for smoothing a surface of a metal or metal oxide on an atomic level, and a method for patterning on an atomic level. Etching of a metal or metal oxide, or smoothing of a surface of a metal or metal oxide is possible using ozone water in which only ozone is dissolved. Patterning can also be performed by providing a metal that does not dissolve in the ozone water as a resist on a metal or metal oxide that can be etched by ozone water in which only ozone is dissolved, and etching using the ozone water.

Abstract translation: 提供一种用于在不使用影响环境的试剂等的情况下蚀刻金属或金属氧化物的方法，用于使原子水平上的金属或金属氧化物的表面平滑化的方法以及原子层上的图案化方法 。 金属或金属氧化物的蚀刻或金属或金属氧化物的表面的平滑化是可能的，其中只使用臭氧溶解的臭氧水。 图案化也可以通过提供不溶于臭氧水中的金属作为抗蚀剂来进行，所述金属或金属氧化物可以被仅臭氧溶解的臭氧水进行蚀刻，并使用臭氧水进行蚀刻。