公开(公告)号：US06951769B2

公开(公告)日：2005-10-04

申请号：US10454198

申请日：2003-06-04

Applicant: Joshua Malone

Inventor： Joshua Malone

IPC: B81C1/00 ,  G02B26/08 ,  H01L21/00 ,  H01L21/302

CPC classification number: B81C1/00833 ,  B81B2201/047 ,  B81C1/00317 ,  B81C2201/056 ,  B81C2201/117 ,  B81C2203/0145 ,  G02B26/0833

Abstract: The present invention provides methods of manufacturing a MEMS assembly. In one embodiment, the method includes mounting a MEMS device, such as a MEMS mirror array, on an assembly substrate, where the MEMS device has a sacrificial layer over components formed therein. The method also includes coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, whereby the coupling maintains an opening to the interior of the MEMS assembly. Furthermore, the method includes removing the sacrificial layer through the opening. A MEMS assembly constructed according to a process of the present invention is also disclosed.

Abstract translation: 本发明提供了制造MEMS组件的方法。 在一个实施例中，该方法包括将MEMS器件（例如MEMS反射镜阵列）安装在组装衬底上，其中MEMS器件在其中形成的部件上具有牺牲层。 该方法还包括将组装盖耦合到组装衬底和MEMS器件上以形成容纳MEMS器件的MEMS组件的内部，由此耦合保持到MEMS组件的内部的开口。 此外，该方法包括通过开口去除牺牲层。 还公开了根据本发明的方法构造的MEMS组件。

公开(公告)号：US20120068377A1

公开(公告)日：2012-03-22

申请号：US13221992

申请日：2011-08-31

Applicant: Joshua Malone

Inventor： Joshua Malone

IPC: B29C55/00 ,  B28B7/42

CPC classification number: B29C53/02 ,  A44C5/0069 ,  B29C53/84 ,  B29L2031/7096

Abstract: A system and method for making shaped bands includes stretching a band into a shape, heating the band to a softening point of a material of the band, and cooling the band to room temperature, such that the band sets into the shape. Other embodiments include an apparatus comprising a pegboard with a plurality of holes, and a plurality of pegs configured to be inserted into corresponding holes from the plurality of holes, wherein the corresponding holes are located at vertices of a shape, and stretching the band around the pegs into the shape. Another embodiment includes attaching the band to a metal wire and bending the metal wire into the shape.

Abstract translation: 用于制造成形带的系统和方法包括将带拉伸成形状，将带加热到带的材料的软化点，并将带冷却至室温，使得带变成形状。 其他实施例包括一种包括具有多个孔的钉板的装置，以及多个钉，其构造成从多个孔插入到相应的孔中，其中相应的孔位于形状的顶点，并且拉伸围绕 钉入形状。 另一实施例包括将带附接到金属线并将金属线弯曲成形状。

公开(公告)号：US20050237598A1

公开(公告)日：2005-10-27

申请号：US11159486

申请日：2005-06-23

Applicant: Joshua Malone

Inventor： Joshua Malone

IPC: B81B7/00 ,  G02B26/08 ,  H01L21/48 ,  G02B26/00

CPC classification number: B81C1/00333 ,  G02B26/0841 ,  H01L21/481

Abstract: A system and method of aligning a micromirror array to the micromirror package and the micromirror package to a display system. One embodiment provides a method of forming and utilizing a package that exposes regions of an alignment reference plane. The device within the package is mounted on the reference plane such that the exposed regions allow precise alignment with the device in a direction perpendicular to the reference plane. Alignment surfaces formed in a display system or other system contact the reference plane at the exposed regions to position the packaged device relative to other components of the system. One embodiment of the package 400 taught has laminated layers forming the package substrate 402 and providing a precision reference plane 416 relative to the position of the micromirror device 404. The package may be formed by laminating several layers of material in sheets to form several package substrates simultaneously. Voids formed in the layers 408 on one side of the reference plane provide access to the reference plane. A transparent cover or lid 412 is attached to the package substrate 402 sealing the micromirror 404 in the cavity 410. The preceding abstract is submitted with the understanding that it only will be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosure as described in 37 C.F.R. § 1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.

Abstract translation: 将微镜阵列与微镜组件和微镜组件对准到显示系统的系统和方法。 一个实施例提供了一种形成和利用暴露对准参考平面的区域的封装的方法。 封装内的器件安装在参考平面上，使得暴露区域允许在垂直于参考平面的方向上与器件精确对准。 形成在显示系统或其他系统中的对准表面在暴露区域处接触参考平面以相对于系统的其它部件定位封装的装置。 所教导的封装400的一个实施例具有形成封装衬底402的层压层，并且相对于微反射镜器件404的位置提供精确的参考平面416.封装可以通过将片材中的多层材料层叠以形成多个封装衬底 同时。 在参考平面一侧的层408中形成的空隙提供对参考平面的访问。 将透明盖或盖412连接到封装基板402上，密封空腔410中的微镜404.前面的摘要被提交，理解是它仅用于帮助从粗略检查来确定自然和要点 的37 CFR中描述的技术披露 §1.72（b）。 在任何情况下，本摘要不得用于解释任何专利权利要求的范围。

公开(公告)号：US07432572B2

公开(公告)日：2008-10-07

申请号：US11229968

申请日：2005-09-19

Applicant: Joshua Malone

Inventor： Joshua Malone

IPC: H01L29/84

CPC classification number: B81C1/00833 ,  B81B2201/047 ,  B81C1/00317 ,  B81C2201/056 ,  B81C2201/117 ,  B81C2203/0145 ,  G02B26/0833

Abstract: The present invention provides methods of manufacturing a MEMS assembly. In one embodiment, the method includes mounting a MEMS device, such as a MEMS mirror array, on an assembly substrate, where the MEMS device has a sacrificial layer over components formed therein. The method also includes coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, whereby the coupling maintains an opening to the interior of the MEMS assembly. Furthermore, the method includes removing the sacrificial layer through the opening. A MEMS assembly constructed according to a process of the present invention is also disclosed.

Abstract translation: 本发明提供了制造MEMS组件的方法。 在一个实施例中，该方法包括将MEMS器件（例如MEMS反射镜阵列）安装在组装衬底上，其中MEMS器件在其中形成的部件上具有牺牲层。 该方法还包括将组装盖耦合到组装衬底和MEMS器件上以形成容纳MEMS器件的MEMS组件的内部，由此耦合保持到MEMS组件的内部的开口。 此外，该方法包括通过开口去除牺牲层。 还公开了根据本发明的方法构造的MEMS组件。

公开(公告)号：US20060014312A1

公开(公告)日：2006-01-19

申请号：US11229968

申请日：2005-09-19

Applicant: Joshua Malone

Inventor： Joshua Malone

IPC: H01L21/00

CPC classification number: B81C1/00833 ,  B81B2201/047 ,  B81C1/00317 ,  B81C2201/056 ,  B81C2201/117 ,  B81C2203/0145 ,  G02B26/0833

Abstract: The present invention provides methods of manufacturing a MEMS assembly. In one embodiment, the method includes mounting a MEMS device, such as a MEMS mirror array, on an assembly substrate, where the MEMS device has a sacrificial layer over components formed therein. The method also includes coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, whereby the coupling maintains an opening to the interior of the MEMS assembly. Furthermore, the method includes removing the sacrificial layer through the opening. A MEMS assembly constructed according to a process of the present invention is also disclosed.

Abstract translation: 本发明提供了制造MEMS组件的方法。 在一个实施例中，该方法包括将MEMS器件（例如MEMS反射镜阵列）安装在组装衬底上，其中MEMS器件在其中形成的部件上具有牺牲层。 该方法还包括将组装盖耦合到组装衬底和MEMS器件上以形成容纳MEMS器件的MEMS组件的内部，由此耦合保持到MEMS组件的内部的开口。 此外，该方法包括通过开口去除牺牲层。 还公开了根据本发明的方法构造的MEMS组件。

公开(公告)号：US20070236778A1

公开(公告)日：2007-10-11

申请号：US11278375

申请日：2006-03-31

Applicant: Joshua Malone

Inventor： Joshua Malone

IPC: G02F1/29

CPC classification number: G02B26/0841

Abstract: The disclosed embodiments reveal an analog MEMS device with a pivotal micromirror that is supported by one or more beams that provide non-linear resistance. An electrode can electrostatically attract the micromirror, while the beam(s) provide resistance to deflection. When the forces equalize, the micromirror is held at a target angle. The beam support disclosed in the embodiments is superior to conventional torsion hinge supports, because it provides non-linear support for the micromirror, better matching the non-linear nature of the electrostatic force.

Abstract translation: 所公开的实施例揭示了具有由提供非线性电阻的一个或多个光束支撑的枢转微镜的模拟MEMS器件。 电极可以静电吸引微镜，而光束提供抵抗偏转。 当力均衡时，微镜保持在目标角度。 实施例中公开的梁支架优于传统的扭转铰链支架，因为它为微镜提供非线性支撑，更好地匹配静电力的非线性特性。