公开(公告)号：US20220336179A1

公开(公告)日：2022-10-20

申请号：US17639277

申请日：2020-08-28

Applicant: KOBELCO RESEARCH INSTITUTE, INC.

Inventor： Kenji KOGA ,  Toshiaki TAKAGI ,  Fumiaki KUDO ,  Tatsuhiko KUSAMICHI

IPC: H01J1/146 ,  H01J1/304 ,  H01J1/34 ,  H01J9/02 ,  H01J9/04 ,  H01J9/12 ,  C22C5/04 ,  B22F9/04 ,  B22F3/10 ,  C30B29/52

Abstract: The cathode member for electron beam generation of the present disclosure includes: 95% by area or more of a single phase or two phases of a compound composed of iridium and cerium. A total content of one or more subcomponents of metallic iridium and an oxide of one or more elements of iridium and cerium is 5% by area or less of the cathode member.