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公开(公告)号：US11262566B2
公开(公告)日：2022-03-01
申请号：US16916801
申请日：2020-06-30
Applicant: KOH YOUNG TECHNOLOGY INC.
Inventor： Hong Ki Kim , Min Kyu Kim , Min Young Hwangbo
IPC: G02B21/00 , G02B21/02 , G01N21/45 , A61B5/00 , G02B27/14 , G01B7/04 , A61B90/00 , G02B21/14 , G02B21/26 , G02B21/36 , G06T7/00
Abstract: A biological tissue inspection apparatus is disclosed. The biological tissue inspection apparatus comprises a stage and a probe. The probe comprises an optical imaging device, an optical interference detector, and a light guide. The probe acquires data regarding optical images and optical interference, through the optical imaging device and the optical interference detector. The stage or the probe moves such that a selected area of the inspection object is positioned in the FOV of the optical imaging device and of the optical interference detector. The light guide is configured such that illumination light from the optical imaging device and measurement light from the optical interference detector are coaxially emitted to the inspection object.
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2.发明授权公开(公告)号：US10852125B2
公开(公告)日：2020-12-01
申请号：US16202543
申请日：2018-11-28
Applicant: KOH YOUNG TECHNOLOGY INC.
Inventor： Young Joo Hong , Deok Hwa Hong , Min Kyu Kim , Jeong Hun Choi
Abstract: A substrate inspection apparatus is disclosed. The substrate inspection apparatus according to the present disclosure may include: a light source configured to radiate laser light onto a coated film that is spread on a region of a substrate; a light detector configured to obtain optical interference data on an interference between reference light, that is generated by the laser light being reflected from a surface of the coated film, and measurement light, that is generated by the laser light penetrating the coated film and being scattered; and a processor configured to derive a thickness of the coated film corresponding to the region, based on the optical interference data.
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公开(公告)号：US11543238B2
公开(公告)日：2023-01-03
申请号：US17060633
申请日：2020-10-01
Applicant: KOH YOUNG TECHNOLOGY INC.
Inventor： Young Joo Hong , Deok Hwa Hong , Min Kyu Kim , Jeong Hun Choi
IPC: G01B11/06 , G01N21/95 , G01N21/64 , G01B9/02091
Abstract: A substrate inspection apparatus is disclosed. The substrate inspection apparatus includes: a first light source configured to radiate an ultraviolet light onto a coated film of a substrate, the coated film being mixed with fluorescent pigments; a first light detector configured to capture fluorescence generated from the coated film onto which the ultraviolet light is radiated, and to obtain a two-dimensional (2D) image of the substrate; a processor configured to derive one region among a plurality of regions of the substrate based on the 2D image; a second light source configured to radiate a laser light onto the one region; and a second light detector configured to obtain optical interference data generated from the one region by the laser light, wherein the processor is configured to derive a thickness of the coated film of the one region based on the optical interference data.
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Patent Agency Ranking
公开(公告)号：US10859371B2
公开(公告)日：2020-12-08
申请号：US16202450
申请日：2018-11-28
Applicant: KOH YOUNG TECHNOLOGY INC.
Inventor： Young Joo Hong , Deok Hwa Hong , Min Kyu Kim , Jeong Hun Choi
Abstract: A substrate inspection apparatus is disclosed. The substrate inspection apparatus includes: a first light source configured to radiate an ultraviolet light onto a coated film of a substrate, the coated film being mixed with fluorescent pigments; a first light detector configured to capture fluorescence generated from the coated film onto which the ultraviolet light is radiated, and to obtain a two-dimensional (2D) image of the substrate; a processor configured to derive one region among a plurality of regions of the substrate based on the 2D image; a second light source configured to radiate a laser light onto the one region; and a second light detector configured to obtain optical interference data generated from the one region by the laser light, wherein the processor is configured to derive a thickness of the coated film of the one region based on the optical interference data.
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公开(公告)号：US12193802B2
公开(公告)日：2025-01-14
申请号：US17430225
申请日：2020-02-11
Applicant: KOH YOUNG TECHNOLOGY INC.
Inventor： Hong Ki Kim , Young Joo Hong , Deok Hwa Hong , Guk Bin Lim , Seung Tae Kim , Min Kyu Kim , Eun Ha Jo
Abstract: A blood flow measurement device according to various embodiments may be configured to irradiate light to a first position of a subject and a second position of the subject located in a first direction with respect to the first position, acquire intensities of the reflected light at the first position and the second position, determine a first value which is a difference between the intensities of the reflected light at the first position and the second position, irradiate light to a third position of the subject located in a second direction with respect to the second position, acquire an intensity of the reflected light at the third position, determine a second value which is a difference between the intensities of the reflected light at the second position and the third position, and determine a blood flow direction based on the first value and the second value.
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公开(公告)号：US10823548B2
公开(公告)日：2020-11-03
申请号：US16202450
申请日：2018-11-28
Applicant: KOH YOUNG TECHNOLOGY INC.
Inventor： Young Joo Hong , Deok Hwa Hong , Min Kyu Kim , Jeong Hun Choi
Abstract: A substrate inspection apparatus is disclosed. The substrate inspection apparatus includes: a first light source configured to radiate an ultraviolet light onto a coated film of a substrate, the coated film being mixed with fluorescent pigments; a first light detector configured to capture fluorescence generated from the coated film onto which the ultraviolet light is radiated, and to obtain a two-dimensional (2D) image of the substrate; a processor configured to derive one region among a plurality of regions of the substrate based on the 2D image; a second light source configured to radiate a laser light onto the one region; and a second light detector configured to obtain optical interference data generated from the one region by the laser light, wherein the processor is configured to derive a thickness of the coated film of the one region based on the optical interference data.
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公开(公告)号：US10754134B2
公开(公告)日：2020-08-25
申请号：US16301307
申请日：2017-05-12
Applicant: KOH YOUNG TECHNOLOGY INC.
Inventor： Hong Ki Kim , Min Kyu Kim , Min Young Hwangbo
IPC: G02B21/00 , G02B21/02 , G01N21/45 , A61B5/00 , G02B27/14 , G01B7/04 , A61B90/00 , G02B21/14 , G02B21/26 , G02B21/36 , G06T7/00
Abstract: A biological tissue inspection apparatus is disclosed. The biological tissue inspection apparatus comprises a stage and a probe. The probe comprises an optical imaging device, an optical interference detector, and a light guide. The probe acquires data regarding optical images and optical interference, through the optical imaging device and the optical interference detector. The stage or the probe moves such that a selected area of the inspection object is positioned in the FOV of the optical imaging device and of the optical interference detector. The light guide is configured such that illumination light from the optical imaging device and measurement light from the optical interference detector are coaxially emitted to the inspection object.
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公开(公告)号：US20190162522A1
公开(公告)日：2019-05-30
申请号：US16202450
申请日：2018-11-28
Applicant: KOH YOUNG TECHNOLOGY INC.
Inventor： Young Joo Hong , Deok Hwa Hong , Min Kyu Kim , Jeong Hun Choi
CPC classification number: G01B11/0675 , G01B9/02091 , G01N21/64 , G01N21/95
Abstract: A substrate inspection apparatus is disclosed. The substrate inspection apparatus includes: a first light source configured to radiate an ultraviolet light onto a coated film of a substrate, the coated film being mixed with fluorescent pigments; a first light detector configured to capture fluorescence generated from the coated film onto which the ultraviolet light is radiated, and to obtain a two-dimensional (2D) image of the substrate; a processor configured to derive one region among a plurality of regions of the substrate based on the 2D image; a second light source configured to radiate a laser light onto the one region; and a second light detector configured to obtain optical interference data generated from the one region by the laser light, wherein the processor is configured to derive a thickness of the coated film of the one region based on the optical interference data.
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