公开(公告)号：US09470752B2

公开(公告)日：2016-10-18

申请号：US13853746

申请日：2013-03-29

Applicant: KOH YOUNG TECHNOLOGY INC.

Inventor： Joong-Ki Jeong ,  Yu-Jin Lee ,  Seung-Jun Lee ,  Bong-Ha Hwang

IPC: G06K9/00 ,  G01R31/309 ,  G01B11/25 ,  G06T7/00 ,  G01B11/30

CPC classification number: G01R31/309 ,  G01B11/2531 ,  G06T7/521

Abstract: An inspection method includes photographing a measurement target to acquire image data for each pixel of the measurement target, acquiring height data for each pixel of the measurement target, acquiring visibility data for each pixel of the measurement target, multiplying the acquired image data by at least one of the height data and the visibility data for each pixel to produce a result value, and setting a terminal area by using the produced result value. Thus, the terminal area may be accurately determined.

公开(公告)号：US09243900B2

公开(公告)日：2016-01-26

申请号：US14463287

申请日：2014-08-19

Applicant: KOH YOUNG TECHNOLOGY INC.

Inventor： Seung-Jun Lee ,  Kwang-Ill Kho ,  Moon-Young Jeon ,  Sang-Kyu Yun ,  Hong-Min Kim ,  Jung Hur

IPC: G01B11/25 ,  G01B11/245 ,  H04N5/247 ,  G02B27/40

CPC classification number: G01B11/2513 ,  G01B11/245 ,  G02B27/40 ,  H04N5/247

Abstract: Provided are an apparatus and a method for measuring a three dimensional shape with improved accuracy. The apparatus includes a stage, at least one lighting unit, a plurality of image pickup units and a control unit. The stage supports an object to be measured. The lighting unit includes a light source and a grid, and radiates grid-patterned light to the object to be measured. The image pickup units capture, in different directions, grid images reflected from the object to be measured. The control unit calculates a three dimensional shape of the object from the grid images captured by the image pickup units. The present invention has advantages in capturing grid images through a main image pickup portion and sub-image pickup portions, enabling the measurement of the three dimensional shape of the object in a rapid and accurate manner.

Abstract translation: 提供了一种以提高的精度测量三维形状的装置和方法。 该装置包括舞台，至少一个照明单元，多个摄像单元和控制单元。 舞台支持要测量的对象。 照明单元包括光源和栅格，并且将栅格图案的光辐射到待测量的对象。 图像拾取单元在不同方向捕获从待测对象反射的网格图像。 控制单元根据由图像拾取单元捕获的网格图像计算物体的三维形状。 本发明通过主要图像拾取部分和子图像拾取部分捕获网格图像具有能够以快速和准确的方式测量对象的三维形状的优点。

公开(公告)号：US10041991B2

公开(公告)日：2018-08-07

申请号：US14072178

申请日：2013-11-05

Applicant: KOH YOUNG TECHNOLOGY INC.

Inventor： Seung-Jun Lee ,  Moon-Young Jeon ,  Nam Ho Lee

IPC: G01R31/28 ,  G05B19/418 ,  H05K13/08

CPC classification number: G01R31/2805 ,  G05B19/41875 ,  G05B2219/37217 ,  G05B2219/45026 ,  H05K13/0817 ,  H05K13/083 ,  Y02P90/04 ,  Y02P90/22

Abstract: A board inspection apparatus system includes a first apparatus, a second apparatus, a third apparatus and an information transfer section. The first apparatus acquires first three-dimensional information of a solder paste on a board, and inspects whether the solder paste is formed good by a first tolerance based on the first three-dimensional information. The second apparatus mounts an electronic component on the board to join the electronic component and the solder paste. The third apparatus acquires second three-dimensional information of a solder joint, and inspects whether the electronic component is mounted good by a second tolerance based on the second three-dimensional information. The information transfer section transfers the first three-dimensional information to the third apparatus, or transfers the second three-dimensional information to the first apparatus. Thus, a more effective inspection condition may be established, and a rate of defect for each apparatus may be greatly reduced.

公开(公告)号：US20130294679A1

公开(公告)日：2013-11-07

申请号：US13936065

申请日：2013-07-05

Applicant: KOH YOUNG TECHNOLOGY INC.

Inventor： Joong-Ki JEONG ,  Yu-Jin Lee ,  Seung-Jun Lee

IPC: G06T7/00

CPC classification number: G06T7/001 ,  G01B11/25 ,  G01B11/2531 ,  G06K9/6202 ,  G06T7/521

Abstract: An inspection method for inspecting a device mounted on a substrate, includes generating a shape template of the device, acquiring height information of each pixel by projecting grating pattern light onto the substrate through a projecting section, generating a contrast map corresponding to the height information of each pixel, and comparing the contrast map with the shape template. Thus, a measurement object may be exactly extracted.

Abstract translation: 一种用于检查安装在基板上的装置的检查方法，包括：生成装置的形状模板，通过投影部分将光栅图案光投影到基板上，获取每个像素的高度信息，生成对应于 每个像素，并将对比度图与形状模板进行比较。 因此，可以精确地提取测量对象。

公开(公告)号：US10996050B2

公开(公告)日：2021-05-04

申请号：US16735186

申请日：2020-01-06

Applicant: KOH YOUNG TECHNOLOGY INC.

Inventor： Seung-Jun Lee ,  Kwangill Koh ,  Moon-Young Jeon ,  Sang-Kyu Yun ,  Hong-Min Kim ,  Jung Hur

IPC: G01B11/25 ,  G01B11/245 ,  H04N5/247 ,  G02B27/40

Abstract: Provided are an apparatus and a method for measuring a three dimensional shape with improved accuracy. The apparatus includes a stage, at least one lighting unit, a plurality of image pickup units and a control unit. The stage supports an object to be measured. The lighting unit includes a light source and a grid, and radiates grid-patterned light to the object to be measured. The image pickup units capture, in different directions, grid images reflected from the object to be measured. The control unit calculates a three dimensional shape of the object from the grid images captured by the image pickup units. The present invention has advantages in capturing grid images through a main image pickup portion and sub-image pickup portions, enabling the measurement of the three dimensional shape of the object in a rapid and accurate manner.

公开(公告)号：US10563978B2

公开(公告)日：2020-02-18

申请号：US15929142

申请日：2019-06-12

Applicant: KOH YOUNG TECHNOLOGY INC.

Inventor： Seung-Jun Lee ,  Kwangill Koh ,  Moon-Young Jeon ,  Sang-Kyu Yun ,  Hong-Min Kim ,  Jung Hur

IPC: G01B11/25 ,  G01B11/245 ,  H04N5/247 ,  G02B27/40

Abstract: Provided are an apparatus and a method for measuring a three dimensional shape with improved accuracy. The apparatus includes a stage, at least one lighting unit, a plurality of image pickup units and a control unit. The stage supports an object to be measured. The lighting unit includes a light source and a grid, and radiates grid-patterned light to the object to be measured. The image pickup units capture, in different directions, grid images reflected from the object to be measured. The control unit calculates a three dimensional shape of the object from the grid images captured by the image pickup units. The present invention has advantages in capturing grid images through a main image pickup portion and sub-image pickup portions, enabling the measurement of the three dimensional shape of the object in a rapid and accurate manner.

公开(公告)号：US08724883B2

公开(公告)日：2014-05-13

申请号：US13936065

申请日：2013-07-05

Applicant: Koh Young Technology Inc.

Inventor： Joong-Ki Jeong ,  Yu-Jin Lee ,  Seung-Jun Lee

IPC: G06K9/00 ,  G03F9/00

CPC classification number: G06T7/001 ,  G01B11/25 ,  G01B11/2531 ,  G06K9/6202 ,  G06T7/521

Abstract: An inspection method for inspecting a device mounted on a substrate, includes generating a shape template of the device, acquiring height information of each pixel by projecting grating pattern light onto the substrate through a projecting section, generating a contrast map corresponding to the height information of each pixel, and comparing the contrast map with the shape template. Thus, a measurement object may be exactly extracted.

Abstract translation: 一种用于检查安装在基板上的装置的检查方法，包括：生成装置的形状模板，通过投影部分将光栅图案光投影到基板上，获取每个像素的高度信息，生成对应于 每个像素，并将对比度图与形状模板进行比较。 因此，可以精确地提取测量对象。

公开(公告)号：US08548224B2

公开(公告)日：2013-10-01

申请号：US13679390

申请日：2012-11-16

Applicant: Koh Young Technology Inc.

Inventor： Joong-Ki Jeong ,  Yu-Jin Lee ,  Seung-Jun Lee

IPC: G06K9/00 ,  G03F9/00

CPC classification number: G06T7/001 ,  G01B11/25 ,  G01B11/2531 ,  G06K9/6202 ,  G06T7/521

Abstract: An inspection method for inspecting a device mounted on a substrate, includes generating a shape template of the device, acquiring height information of each pixel by projecting grating pattern light onto the substrate through a projecting section, generating a contrast map corresponding to the height information of each pixel, and comparing the contrast map with the shape template. Thus, a measurement object may be exactly extracted.

Abstract translation: 一种用于检查安装在基板上的装置的检查方法，包括：生成装置的形状模板，通过投影部分将光栅图案光投影到基板上，获取每个像素的高度信息，生成对应于 每个像素，并将对比度图与形状模板进行比较。 因此，可以精确地提取测量对象。

公开(公告)号：US10359276B2

公开(公告)日：2019-07-23

申请号：US15331499

申请日：2016-10-21

Applicant: KOH YOUNG TECHNOLOGY INC.

Inventor： Seung-Jun Lee ,  Kwangill Koh ,  Moon-Young Jeon ,  Sang-Kyu Yun ,  Hong-Min Kim ,  Jung Hur

IPC: G01B11/25 ,  G01B11/245 ,  H04N5/247 ,  G02B27/40

Abstract: Provided are an apparatus and a method for measuring a three dimensional shape with improved accuracy. The apparatus includes a stage, at least one lighting unit, a plurality of image pickup units and a control unit. The stage supports an object to be measured. The lighting unit includes a light source and a grid, and radiates grid-patterned light to the object to be measured. The image pickup units capture, in different directions, grid images reflected from the object to be measured. The control unit calculates a three dimensional shape of the object from the grid images captured by the image pickup units. The present invention has advantages in capturing grid images through a main image pickup portion and sub-image pickup portions, enabling the measurement of the three dimensional shape of the object in a rapid and accurate manner.

公开(公告)号：US09791266B2

公开(公告)日：2017-10-17

申请号：US13860228

申请日：2013-04-10

Applicant: KOH YOUNG TECHNOLOGY INC.

Inventor： Joong-Ki Jeong ,  Min-Young Kim ,  Seung-Jun Lee

IPC: H04N9/47 ,  H04N7/18 ,  G01B11/25 ,  G06K9/03 ,  G01N21/956

CPC classification number: G01B11/254 ,  G01B11/2513 ,  G01B11/2531 ,  G01N2021/95638 ,  G06K9/036

Abstract: A shape measurement apparatus includes a work stage supporting a target substrate, a pattern-projecting section including a light source, a grating part partially transmitting and blocking light generated by the light source to generate a grating image and a projecting lens part making the grating image on a measurement target of the target substrate, an image-capturing section capturing the grating image reflected by the measurement target of the target substrate, and a control section controlling the work stage, the pattern-projecting section and the image-capturing section, calculating a reliability index of the grating image and phases of the grating image, which is corresponding to the measurement target, and inspecting the measurement target by using the reliability index and the phases. Thus, the accuracy of measurement may be enhanced.