SCANNING MODULE, DETECTION DEVICE USING BESSEL BEAM, DETECTION PROBE, AND PROBE TYPE DETECTION DEVICE
    2.
    发明申请
    SCANNING MODULE, DETECTION DEVICE USING BESSEL BEAM, DETECTION PROBE, AND PROBE TYPE DETECTION DEVICE 有权
    扫描模块,使用BESSEL光束的检测装置,检测探头和探头类型检测装置

    公开(公告)号:US20160084701A1

    公开(公告)日:2016-03-24

    申请号:US14787780

    申请日:2013-12-18

    CPC classification number: G01J1/08 G01J1/42 G02B5/001 G02B26/105

    Abstract: A scanning module including first path shifting unit changing a path of an incident electromagnetic wave from a light source; a first driving unit adjusting the path of the electromagnetic wave by moving the first path shifting unit; and a Bessel beam generating unit making a Bessel beam on a portion of an object, using the electromagnetic wave with the path changed by the path shifting unit. A detection probe which includes a light source generating an electromagnetic wave; a path shifting unit changing a path of an electromagnetic wave from a light source; a Bessel beam generating unit making a Bessel beam on a portion of an object, using the electromagnetic wave with the path changed by the path shifting unit; a detecting unit detecting intensity of a wave from the object, and a housing accommodating the light source, path shifting unit, Bessel beam generating unit, and detecting unit.

    Abstract translation: 一种扫描模块,包括:第一路径移动单元,改变来自光源的入射电磁波的路径; 第一驱动单元,通过移动第一路径移位单元来调整电磁波的路径; 以及贝塞尔光束产生单元,使用具有由路径移位单元改变的路径的电磁波,在物体的一部分上形成贝塞尔光束。 一种检测探头,其包括产生电磁波的光源; 路径移动单元,改变来自光源的电磁波的路径; 贝塞尔光束产生单元,使用由路径移动单元改变的路径的电磁波,在物体的一部分上形成贝塞尔光束; 检测来自物体的波的强度的检测单元和容纳光源的壳体,路径移位单元,贝塞尔束生成单元和检测单元。

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