公开(公告)号：US20240055266A1

公开(公告)日：2024-02-15

申请号：US18244863

申请日：2023-09-11

Applicant: KOREA INSTITUTE OF MATERIALS SCIENCE

Inventor： Young Jo PARK ,  Ha Neul KIM ,  Jae Woong KO ,  Mi Ju KIM ,  Hyeon Myeong OH

IPC: H01L21/3065 ,  H01J37/32 ,  B22F3/10

CPC classification number: H01L21/3065 ,  H01J37/32009 ,  B22F3/10 ,  H01J2237/334

Abstract: Provided is a method of using a plasma etching apparatus in semiconductor manufacturing, the method including using a plasma etching apparatus in semiconductor manufacturing, the plasma etching apparatus comprising a component including a composite sintered body therein, wherein the composite sintered body comprises 30 vol % to 70 vol % of yttria (Y2O3) and 30 vol % to 70 vol % of magnesia (MgO), and wherein the component has plasma resistance. In addition, provided is a method of reducing etching by plasma in a plasma etching apparatus during semiconductor manufacturing, the method including providing a plasma etching apparatus for manufacturing a semiconductor including a component including a composite sintered body, wherein the composite sintered body comprises 30 vol % to 70 vol % of yttria (Y2O3) and 30 vol % to 70 vol % of magnesia (MgO), and wherein the component has plasma resistance.

公开(公告)号：US20220285164A1

公开(公告)日：2022-09-08

申请号：US17628515

申请日：2020-07-13

Applicant: KOREA INSTITUTE OF MATERIALS SCIENCE

Inventor： Young Jo PARK ,  Ha Neul KIM ,  Jae Woong KO ,  Mi Ju KIM ,  Hyeon Myeong OH

IPC: H01L21/3065 ,  H01J37/32

Abstract: Provided is a plasma etching apparatus component for manufacturing a semiconductor characterized by including a composite sintered body which contains 30 vol % to 70 vol % of yttria (Y2O3) and 30 vol % to 70 vol % of magnesia (MgO) and having plasma resistance.
The plasma etching apparatus component for manufacturing a semiconductor provided in one aspect of the present invention has excellent corrosion resistance to plasma, and may have good corrosion resistance to plasma even when the composite sintered body is sintered at a relatively low relative density. In addition, the composite sintered body has a small crystal grain size and a small increase in surface roughness after etching, so that there is an effect that contaminant particles may be reduced. Furthermore, the plasma etching apparatus component for manufacturing a semiconductor has excellent strength compared to a typical plasma-resistant material, is inexpensive, and is excellent in terms of economic feasibility and utilization.