公开(公告)号：US20060147619A1

公开(公告)日：2006-07-06

申请号：US11211213

申请日：2005-08-19

Applicant: Jeong Park ,  Kang II Cho ,  Seong Kwon

Inventor： Jeong Park ,  Kang II Cho ,  Seong Kwon

IPC: B05D5/12 ,  B05D5/06 ,  B05D3/12 ,  B05B15/00 ,  G02F1/133

CPC classification number: H01L21/6715 ,  B05B15/55 ,  B05B15/555 ,  B05C5/0254

Abstract: A slit coater having a pre-applying unit and a coating method using the same that minimizes the amount of washing solution used and improves the washing effectiveness of a roller by separating the coating solution attached to a pre-applying roller from the washing solution using a coating solution separating apparatus. The slit coater includes: a table on which an object to be processed is mounted; a slit nozzle applying coating solution onto a surface of the object; a pre-applying unit to which the slit nozzle pre-applies the coating solution; and a coating solution separating unit that separates the coating solution spread when the coating solution is pre-applied to the slit nozzle and discharges the separated coating solution.

Abstract translation: 一种具有预施加单元的切割涂布机和使用该预涂装置的涂布方法，其使用最少的洗涤溶液的量最小化并且通过使用以下步骤从洗涤溶液中分离附着在预涂辊上的涂布溶液来提高辊的洗涤效果 涂层溶液分离装置。 狭缝涂布机包括：安装有待处理对象的工作台; 狭缝喷嘴将涂布溶液施加到物体的表面上; 预涂单元，狭缝喷嘴预先施涂涂布溶液; 以及涂布液分离单元，其将当涂布溶液预先施加到狭缝喷嘴上时分散涂布溶液，并排出分离的涂布溶液。

公开(公告)号：US20090022880A1

公开(公告)日：2009-01-22

申请号：US12243202

申请日：2008-10-01

Applicant: O. Jun Kwon ,  Kang II Cho

Inventor： O. Jun Kwon ,  Kang II Cho

IPC: B05D5/12 ,  B05D1/02

CPC classification number: H01L21/6715 ,  C03C17/002 ,  G02F1/1303

Abstract: A slit coater including an apparatus for supplying coating solution by a coating method using a slit nozzle, which is configured to minimize contamination of coating solution, utilizing a filtering function, and supplying a controlled amount of photosensitive solution to a slit nozzle. The slit coater further includes a table on which an object to be processed is mounted, a slit nozzle unit that applies coating solution onto a surface of the object to be processed, and a coating solution supply apparatus including a storage tank that stores the coating solution, a pump that supplies the coating solution stored in the storage tank to the slit nozzle unit, and a buffer tank that is in fluid communication with the pump and the storage tank.

Abstract translation: 一种狭缝涂布机，其特征在于，包括使用狭缝喷嘴的涂布方法供给涂布液的装置，其利用过滤功能使涂布溶液的污染最小化，并将受控量的感光性溶液供给到狭缝喷嘴。 狭缝涂布机还包括安装有待处理物体的台，将涂布液涂布在待处理物体的表面上的狭缝喷嘴单元，以及涂布液供给装置，其具备：储存涂布液 将存储在储罐中的涂布溶液供给到狭缝喷嘴单元的泵，以及与泵和储罐流体连通的缓冲罐。

公开(公告)号：US20070275157A1

公开(公告)日：2007-11-29

申请号：US11798867

申请日：2007-05-17

Applicant: Kang II Cho

Inventor： Kang II Cho

IPC: C23C16/52 ,  B05C11/00

CPC classification number: B05C11/00 ,  B05C5/0254

Abstract: An apparatus for measuring withwise ejection uniformity of a slit nozzle comprises a plurality of oil pressure measuring units that are arranged in parallel in a widthwise direction of the slit nozzle so as to measure ejection pressure of fluid to be ejected from an ejection port of the slit nozzle, each oil pressure measuring unit having an oil-pressure detection surface facing the ejection port of the slit nozzle; and a control unit that measures ejection pressure applied to the oil pressure measuring unit so as to calculate the uniformity to display.

Abstract translation: 用于测量狭缝喷嘴的随动喷射均匀性的装置包括多个油压测量单元，其在狭缝喷嘴的宽度方向上平行设置，以便测量从狭缝喷射口喷出的流体的喷射压力 每个油压测量单元具有面向狭缝喷嘴的喷射口的油压检测表面; 以及控制单元，其测量施加到油压测量单元的喷射压力，以便计算显示的均匀性。