公开(公告)号：US20160181129A1

公开(公告)日：2016-06-23

申请号：US14575692

申请日：2014-12-18

Applicant: LAM RESEARCH AG

Inventor： Michael DALMER ,  Alexander LIPPERT ,  Philipp ENGESSER ,  Rainer OBWEGER

IPC: H01L21/67 ,  G01L5/00

CPC classification number: H01L21/67051 ,  H01L21/6708 ,  H01L21/67253 ,  H01L21/67288

Abstract: A device for measuring the distribution and/or impulse of a series of droplets comprises a piezoelectric sensor positioned relative to a source of droplets such that each of a plurality of droplets contacts the piezoelectric sensor in succession, thereby to generate an electrical signal. Logic circuitry is configured to calculate one or more frequencies from the electrical signal.

Abstract translation: 用于测量一系列液滴的分布和/或脉冲的装置包括相对于液滴源定位的压电传感器，使得多个液滴中的每一个液滴连续地接触压电传感器，从而产生电信号。 逻辑电路被配置为从电信号计算一个或多个频率。

公开(公告)号：US20150187561A1

公开(公告)日：2015-07-02

申请号：US14145727

申请日：2013-12-31

Applicant: LAM RESEARCH AG

Inventor： Dieter FRANK ,  Michael DALMER

IPC: H01L21/02 ,  B01D53/22 ,  B01D19/00 ,  H01L21/67

CPC classification number: H01L21/02052 ,  B01D19/0031 ,  B01D19/0036 ,  B01D53/22 ,  H01L21/02057 ,  H01L21/67051 ,  H01L21/6708

Abstract: In an apparatus and method for treating a wafer-shaped article, a spin chuck is provided for holding and rotating a wafer-shaped article. A first liquid dispenser communicates with a supply of an organic liquid and is positioned so as to dispense the organic liquid onto a surface of a wafer-shaped article. A degasifying unit is positioned upstream of the first liquid dispenser and downstream of the supply. The degasifying unit is configured to reduce a dissolved gas content of the organic liquid to less than 20% of a saturation concentration at a pressure of 1 bar.

Abstract translation: 在用于处理晶片状物品的装置和方法中，提供了用于保持和旋转晶片状物品的旋转卡盘。 第一液体分配器与有机液体供应器连通并且被定位成将有机液体分配到晶片状物品的表面上。 脱气单元位于第一液体分配器的上游并且在供应的下游。 脱气单元被构造成在1巴的压力下将有机液体的溶解气体含量降低到饱和浓度的20％以下。