公开(公告)号：US20140339215A1

公开(公告)日：2014-11-20

申请号：US13894950

申请日：2013-05-15

Applicant: LAM RESEARCH AG

Inventor： Ante PLAZONIC ,  Vijay Kumar BADAM ,  Michael BRUGGER

IPC: H01L21/67

CPC classification number: H01L21/67115 ,  F27B5/14 ,  F27D2003/0087 ,  H01L21/67023 ,  H01L21/68728 ,  H01L21/68764 ,  H01L21/68785 ,  H01L21/68792 ,  H05B3/0047

Abstract: An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. At least the transparent plate positioned between the infrared heating elements and the underside of a wafer is mounted for rotation with the spin chuck. Alternatively, the transparent plate is part of a housing that encloses the infrared heating elements and that rotates with the spin chuck as the heating elements are stationary relative thereto.

Abstract translation: 一种用于处理盘状物品的设备包括旋转卡盘和至少三个独立可控的红外加热元件。 相对于所述旋转卡盘的旋转，红外加热元件以固定的方式安装。 至少位于红外加热元件和晶片下侧之间的透明板被安装成与旋转卡盘一起旋转。 或者，透明板是包围红外加热元件的壳体的一部分，并且随着加热元件相对于其而静止，旋转卡盘。

公开(公告)号：US20150001202A1

公开(公告)日：2015-01-01

申请号：US13932926

申请日：2013-07-01

Applicant: LAM RESEARCH AG

Inventor： Kevin Matthew CRABB ,  Philipp ENGESSER ,  Vijay Kumar BADAM

IPC: H01L21/67

CPC classification number: H01L21/67115 ,  F27B5/14 ,  F27B17/0025 ,  F27D5/0037 ,  F27D2099/0008

Abstract: An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. The infrared heating elements are arranged in a nested configuration so as to define individually controllable inner, middle and outer heating zones adjacent a disc-shaped article when positioned on the spin chuck.

Abstract translation: 一种用于处理盘状物品的设备包括旋转卡盘和至少三个独立可控的红外加热元件。 相对于所述旋转卡盘的旋转，红外加热元件以固定的方式安装。 红外加热元件布置成嵌套构型，以便当定位在旋转卡盘上时，限定与盘形物品相邻的独立可控的内部，中间和外部加热区域。